{"id":412,"date":"2023-05-30T16:24:36","date_gmt":"2023-05-30T07:24:36","guid":{"rendered":"http:\/\/www.comm.tcu.ac.jp\/nano_slabo\/en\/?page_id=412"},"modified":"2025-06-27T10:16:41","modified_gmt":"2025-06-27T01:16:41","slug":"international","status":"publish","type":"page","link":"https:\/\/www.comm.tcu.ac.jp\/nano_slabo\/en\/international\/","title":{"rendered":"International conference"},"content":{"rendered":"\n<h2 class=\"wp-block-heading\">International conference(\uff5e2025, 6)<\/h2>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2025<\/strong><\/p>\n\n\n\n<p>R. Yokoki, S. Sano, M. Aikawa, H. Imai, S. Kikuoka, K. Sawano<br>\u201cStrong room temperature electroluminescence from strained SiGe\/Ge p-i-n diodes on strained GOI<br>formed by layer transfer\u201d<br>E-MRS 2025 Spring Meeting, Strasbourg, France, May 26\u201330, 2025<\/p>\n\n\n\n<p>R. Mizoguchi, M. Nagao, Y. Shibahara, M. Aikawa, M. Yamada, K. Hamaya, K. Sawano<br>\u201cFormation of crack-free strained SiGe\/Ge by selective ion implantation\u201d<br>E-MRS 2025 Spring Meeting, Strasbourg, France, May 26\u201330, 2025<\/p>\n\n\n\n<p>S. Watahiki, A. Yamada, S. Obinata, S. Kikuoka, M. Yamada, S. Yamada, K. Sawano, K. Hamaya<br>&#8220;Observation of magnetoresistance effect in vertical Co2FeAl0.5Si0.5\/Ge\/Co2FeSi heterostructures&#8221;<br>E-MRS 2025 Spring Meeting, Strasbourg, France, May 26\u201330, 2025<\/p>\n\n\n\n<p>K. Oki, K. Yoshinari, S. Kikuoka, S. Yoshikawa, K. Yamamoto, T. Usami, A. N. Hattori, K. Sawano,<br>and K. Hamaya<br>&#8220;Ge-based lateral spin-valve devices fabricated on Ge on insulator&#8221;<br>E-MRS 2025 Spring Meeting, Strasbourg, France, May 26\u201330, 2025<\/p>\n\n\n\n<p>Ayaka Odashima, Ryoto Yanagisawa, Kentarou Sawano and Masahiro Nomura<br>\u201cEfficient reduction in thermal conductivity of Si thin-film by short period SiGe interfaces\u201d<br>The 41st International and 7th Asian Conference on Thermoelectrics (ICT\/ACT 2025), Sendai, Japan,<br>June 15-19, 2025<\/p>\n\n\n\n<p><strong>2024<\/strong><\/p>\n\n\n\n<p>T. Inoue, A. Odashima, M. Nagao, T. Ito, O. Yoshikawa, K. Sawano <br>\u201cEnhancement of PL intensity from Ge microbridges via surface passivation by ALD\u201d<br>E-MRS 2024 Spring Meeting, Strasbourg, France, May 27\u201331, 2024<\/p>\n\n\n\n<p>Ayaka Odashima, Takahiro Inoue, Riku Ishikawa and Kentarou Sawano <br>\u201cFabrication of suspended Ge microbridges based on Ge-on-SOI and effects of metal film deposition\u201d<br>E-MRS 2024 Spring Meeting, Strasbourg, France, May 27\u201331, 2024<\/p>\n\n\n\n<p>Yuka Shibahara, Shuya Kikuoka, Rena Kanesawa, Michihiro Yamada, Kohei Hamaya, Kentarou Sawano <br>\u201cStudy on crack formation in strained SiGe\/Ge-on-Si(111) via ultrasonic treatment\u201d<br>E-MRS 2024 Spring Meeting, Strasbourg, France, May 27\u201331, 2024<\/p>\n\n\n\n<p>Sota Koike, Ryoto Yanagisawa, Takahiro Inoue, Kentarou Sawano and Masahiro Nomura<br>\u201cReduction of Thermal Conductivity in Silicon Thin Film by Super-lattice Interface and Phononic Crystal Nanostructures\u201d<br>2024 International Conference on Solid State Devices and Materials (SSDM), Himeji, Japan, Sep. 1-\n4, 2024<\/p>\n\n\n\n<p>S. Ueda, K. Oki, S. Kikuoka, M. Yamada, S. Fujii, T. Usami, K. Sawano, and K. Hamaya:<br>&#8220;Observation of Spin Signals through Co2FeAl0.5Si0.5\/Ge-pn Junction at Room Temperature&#8221;,<br>ICMBE 2024, Oral, (Sept. 9 2024, Matsue).<\/p>\n\n\n\n<p><strong>2023<\/strong><\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cStrain engineering of Si\/Ge heterostructures based on Ge virtual substrates\u201d Invited <br>E-MRS 2023 Spring Meeting, Strasbourg, France, May 29 &#8211; June 2, 2023<\/p>\n\n\n\n<p>Takahiro Inoue, Youya Wagatsuma, Reo Ikegaya, Ayaka Odashima, Masaki Nagao, Kentarou Sawano<br>\u201cFabrication of Si\/Ge microbridges based on Ge-on-Si (110) and effect of bridge length\u201d<br>The Joint ISTDM-ICSI 2023, Como, Italy, May 21-25, 2023 <\/p>\n\n\n\n<p>Shuya Kikuoka, Youya Wagatsuma, Yuwa Sugiura, Rena Kanesawa, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano<br>\u201cDiode characteristics and room temperature EL emission of strained SiGe\/Ge quantum well LEDs\u201d<br>The Joint ISTDM-ICSI 2023, Como, Italy, May 21-25, 2023 <\/p>\n\n\n\n<p>R. Kanesawa, Y. Wagatsuma, S. Kikuoka, Y. Sugiura, M. Yamada, K. Hamaya and K. Sawano <br>\u201cFabrication of crack free strained SiGe\/Ge multiple quantum wells on Ge on Si(111) by the patterning method\u201d<br>The Joint ISTDM-ICSI 2023, Como, Italy, May 21-25, 2023\n<\/p>\n\n\n\n<p>Shuhei Kusumoto, Michihiro Yamada, Atsuya Yamada, Youya Wagatsuma, Kentarou Sawano and Kohei Hamaya<br>\u201cStructural and Magnetic Properties of CoFe\/Sn-Doped Ge\/Co2FeSi for Vertical Spin-Valve Devices on Si\u201d<br>2023 IEEE International Magnetic Conference (INTERMAG), Sendai, Japan, May 15-19, 2023<\/p>\n\n\n\n<p>K. Kawashima, T. Naito, M. Yamada, T. Okada, Y. Wagatsuma, K. Sawano and K. Hamaya<br>\u201cSignificant effect of carrier concentration on spin lifetime at low temperatures in strained Si0.1Ge0.9\u201d<br>2023 IEEE International Magnetic Conference (INTERMAG), Sendai, Japan, May 15-19, 2023<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2022<\/strong><\/p>\n\n\n\n<p>Md. Mahfuz Alam, Youya Wagatsuma, Kazuya Okada, Michihiro Yamada, Kohei Hamaya, and Kentarou Sawano<br>\u201cStrain engineering of heteroepitaxial SiGe\/Ge on Si with various crystal orientations\u201d Invited<br>The 242nd ECS Meeting, Atlanta, USA, Oct. 9-13, 2022<\/p>\n\n\n\n<p>T. Inoue, Y. Wagatsuma, L. Ikegaya, A. Odashima, M. Nagao and K. Sawano<br>\u201cEpitaxially grown of SiGe on Ge microbridge and observation of strong resonant light emission\u201d<br>The 242nd ECS Meeting, Atlanta, USA, Oct. 9-13, 2022<\/p>\n\n\n\n<p>Ayaka Odashima, Takahiro Inoue, Youya Wagatsuma, Reo Ikegaya, Masaki Nagao and Kentarou Sawano<br>\u201cFabrication of microbridges based on Ge-on-SOI and observation of strong resonant light emission\u201d<br>The 242nd ECS Meeting, Atlanta, USA, Oct. 9-13, 2022<\/p>\n\n\n\n<p>Reo Ikegaya, Takahiro Inoue, Takuya Komazawa, Youya Wagatsuma and Kentarou Sawano<br>\u201cFabrication of strained Ge microbridge structures with meshed pads and their optical properties\u201c<br>The 242nd ECS Meeting, Atlanta, USA, Oct. 9-13, 2022<\/p>\n\n\n\n<p>Shuya Kikuoka, Youya Wagatsuma, Yuwa Sugiura, Rena Kanesawa, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano<br>\u201cStrong Room-temperature EL emissions from strained SiGe\/Ge-on-Si (111) LEDs\u201c<br>The 242nd ECS Meeting, Atlanta, USA, Oct. 9-13, 2022<\/p>\n\n\n\n<p>Rena Kanesawa, Youya Wagatsuma, Syuya Kikuoka, Yuwa Sugiura and Kentarou Sawano<br>\u201cFabrication of thick SiGe\uff0fGe multiple quantum wells on Ge-on-Si and their optical properties\u201d<br>The 242nd ECS Meeting, Atlanta, USA, Oct. 9-13, 2022<\/p>\n\n\n\n<p>Youya Wagatsuma, Rena Kanesawa, Md. Mahfuz Alam, Kazuya Okada, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano<br>\u201cEvaluation of crack propagation in strained SiGe on Ge(111) patterned with various etching thickness\u201d<br>The 242nd ECS Meeting, Atlanta, USA, Oct. 9-13, 2022<\/p>\n\n\n\n<p>Ayaka Odashima, Takahiro Inoue, Youya Wagatsuma, Reo Ikegaya, Masaki Nagao and Kentarou Sawano<br>\u201cFabrication of microbridges based on Ge-on-SOI and observation of strong resonant light emission\u201d<br>The 22nd International Vacuum Congress IVC-22, Sapporo, Japan, Sep. 11-16, 2022<\/p>\n\n\n\n<p>Rena Kanesawa, Youya Wagatsuma, Syuya Kikuoka, Yuwa Sugiura, Kentarou Sawano<br>Light emissions from strained Si1-xGex\/Ge MQW formed on Ge-on-Si<br>The 22nd International Vacuum Congress IVC-22, Sapporo, Japan, Sep. 11-16, 2022<\/p>\n\n\n\n<p>Youya Wagatsuma, Rena Kanesawa, Md. Mahfuz Alam, Kazuya Okada, Michihiro Yamada, Kohei Hamaya, and Kentarou Sawano<br>Increased critical thickness of strained SiGe layers on Ge-on-Si(111)<br>The 22nd International Vacuum Congress IVC-22, Sapporo, Japan, Sep. 11-16, 2022<\/p>\n\n\n\n<p>T. Inoue, Y. Wagatsuma, R. Ikegaya, A. Odashima, M. Nagao, K. Sawano<br>\u201cPumping power dependence of light emissions from strained Ge microbridges\u201d<br>The 22nd International Vacuum Congress IVC-22, Sapporo, Japan, Sep. 11-16, 2022<\/p>\n\n\n\n<p>T. Inoue, Y. Wagatsuma, R. Ikegaya, A. Odashima, M. Nagao, K. Sawano<br>\u201cFabrication of SiGe\/Ge microbridges based on Ge-on-Si(110) and observation of resonant light emission\u201d<br>APAC Silicide 2022, July 30 &#8211; August 1, 2022, online<\/p>\n\n\n\n<p>Youya Wagatsuma, Rena Kanesawa, Md. Mahfuz Alam, Kazuya Okada, Michihiro Yamada, Kohei Hamaya, and Kentarou Sawano<br>\u201cCrack formations in SiGe\/Ge MQW layers on Ge-on-Si(111) substrates\u201d<br>APAC Silicide 2022, July 30 &#8211; August 1, 2022, online<\/p>\n\n\n\n<p>Takahiro Inoue, Youya Wagatsuma, Leo Ikegaya, Kentarou Sawano<br>\u201cFabrication of branch-like bridges based on Ge-on-Si(110) and observation of strong resonant light emission\u201d<br>The 2022 Spring Meeting of the European Materials Research Society (E-MRS), May 30 &#8211; June 3, 2022 online<\/p>\n\n\n\n<p>Youya Wagatsuma, Rena Kanesawa, Md. Mahfuz Alam, Kazuya Okada, Michihiro Yamada, Kohei Hamaya, and Kentarou Sawano<br>\u201cEffects of etching depth on crack generation in strained SiGe films on mesa-patterned Ge\u201d<br>The 2022 Spring Meeting of the European Materials Research Society (E-MRS), May 30 &#8211; June 3, 2022 online<\/p>\n\n\n\n<p>Piezoelectricity of the hBN\/1L-MoS2 heterostructure membrane<br>Calvin Chiba, Shota Sugawara, Emi Kitayoshi, Kenji Watanabe, Takashi Taniguchi, Kentarou Sawano,Hiroyuki Fujita and Yusuke Hoshi<br>2021 International Conference on Solid State Devices and Materials (SSDM), online, Sep. 27, 2022<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2021<\/strong><\/p>\n\n\n\n<p>Yuwa Sugiura, Masashi Sasaki, Youya Wagatsuma, Koudai Yamada, Yusuke Hoshi, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano<br>\u201cStrong room-temperature EL emission from Ge-on-Si(111) diodes with ferromagnetic Schottky-tunnel electrodes\u201d<br>ISNTT2021, December 14-17, 2021 online.<\/p>\n\n\n\n<p>Takahiro Inoue, Youya Wagatsuma, Leo Ikegaya, Kazuya Okada and Kentarou Sawano<br>\u201cStrong resonant light emission in strained Ge microbridges\u201d<br>ISNTT2021, December 14-17, 2021 online.<\/p>\n\n\n\n<p>Youya Wagatsuma, Md. Mahfuz Alam, Kazuya Okada, Rena Kanesawa, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano<br>\u201cObservation of photoluminous from SiGe\/Ge MQW on Ge-on-Si(111)\u201d<br>ISNTT2021, December 14-17, 2021 online.<\/p>\n\n\n\n<p>Yuwa Sugiura, Masashi Sasaki, Youya Wagatsuma, Koudai Yamada, Yusuke Hoshi, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano<br>\u201cStrong room-temperature EL emission from Ge-on-Si(111) diodes\u201d<br>21st ICMBE 2021, September 6-9, 2021 online.<\/p>\n\n\n\n<p>Takahiro Inoue, Youya Wagatsuma, Leo Ikegaya, Kazuya Okada and Kentarou Sawano<br>\u201cEpitaxial growth of strained Si0.2Ge0.8 on Ge microbridge\u201d<br>21st ICMBE 2021, September 6-9, 2021 online.<\/p>\n\n\n\n<p>Youya Wagatsuma, Md. Mahfuz Alam, Kazuya Okada, Rena Kanesawa, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano<br>\u201cSuppression of crack formation and propagation in strained SiGe by patterning Ge-on-Si substrates\u201d<br>21st ICMBE 2021, September 6-9, 2021 online.<\/p>\n\n\n\n<p>Yuwa Sugiura, Youya Wagatsuma, Koudai Yamada, Yusuke Hoshi, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano<br>\u201cRoom temperature EL from strained Ge-on-Si(111) diode structures\u201d<br>EMRS 2021 Spring Meeting, May 31-June 4, 2021 online<\/p>\n\n\n\n<p>Takahiro Inoue, Youya Wagatsuma, Kodai Yamada and Kentarou Sawano<br>\u201cEffect of uniaxial strain direction on luminescence properties of strained Ge microbridge structures\u201d<br>EMRS 2021 Spring Meeting, May 31-June 4, 2021 online<\/p>\n\n\n\n<p>Youya Wagatsuma, Md. Mahfuz Alam, Kazuya Okada, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano \u201cSuppression of crack formation in strained SiGe layers by patterning of Ge-on-Si substrates\u201d<br>EMRS 2021 Spring Meeting, May 31-June 4, 2021 online<\/p>\n\n\n\n<p>Kairi Yamase, Shunya Hayashida, Kenji Watanabe, Takashi Taniguchi, Kentarou Sawano, Yusuke Hoshi<br>\u201cElectroluminescence from hBN-encapsulated bilayer MoTe2 by dual back-gate voltage modulation\u201d<br>Compound Semiconductor Week 2021, May 2021<\/p>\n\n\n\n<p>Satoshi Nogamida, Shunya Hayashida, Kousuke O Hara, Kentarou Sawano, Yusuke Hoshi<br>\u201cInvestigation of a defect-assisted-metal formed by annealing MoTe2 crystals with Ar ion implantation\u201d<br>The 2022 Spring Meeting of the European Materials Research Society, May 2021 online<\/p>\n\n\n\n<p>Yusuke Hoshi, Shunya Hayashida, Satoshi Nogamida, Kenji Watanabe, Takashi Taniguchi, Kentarou Sawano<br>\u201cInfluences of thermal treatment on crystal quality of semiconducting MoTe2 monolayers encapsulated by hexagonal boron nitrides\u201d<br>The 2022 Spring Meeting of the European Materials Research Society, May, 2021 online<\/p>\n\n\n\n<p>Yusuke Hoshi, Yuma Odagiri, Shunya Hayashida, Kenji Watanabe, Takashi Taniguchi, Kentarou Sawano<br>\u201cImprovement of Electrical Properties in hBN-encapsulated MoTe2 monolayers by Thermal Anneal\u201d<br>International Symposium on Novel maTerials and quantum Technologies, Dec. 2021<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2020<\/strong><\/p>\n\n\n\n<p>Kentarou Sawano, Youya Wagatsuma, Md. Mahfuz Alam, Kaisei Omata, Kenta Niikura, Shougo Shibata, Yusuke Hoshi, Michihiro Yamada and Kohei Hamaya<br>\u201cStrain engineering of Si\/Ge heterostructures on Ge-on-Si platform\u201d (invited)<br>PRiME 2020, October 4-9, 2020 online<\/p>\n\n\n\n<p>Youya Wagatsuma, Md. Mahfuz Alam, Kazuya Okada, Yusuke Hoshi, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano<br>\u201cIncreased critical thickness for strained SiGe on Ge-on-Si(111)\u201d<br>PRiME 2020, October 4-9, 2020 online<\/p>\n\n\n\n<p>Kodai Yamada, Yusuke Hoshi and Kentarou Sawano<br>\u201cStrong room-temperature electroluminescence from Ge-on-Si by precise in-situ doping control\u201d<br>PRiME 2020, October 4-9, 2020 online<\/p>\n\n\n\n<p>K. Arimoto, J. Yamanaka, K. O. Hara, K. Sawano, N. Usami and K. Nakagawa<br>\u201cEngineering Strain, Defects and Electronic Properties of (110)-Oriented Strained Si\u201d<br>PRiME 2020, October 4-9, 2020 online<\/p>\n\n\n\n<p>Hiroshi Nohira, Eriko Shigesawa and Kentarou Sawano<br>\u201cFormation and Evaluation of Al2O3 Layer by Direct ALD on Epitaxial SiGe\u201d<br>PRiME 2020, D01-1388, October 4-9, 2020 online<\/p>\n\n\n\n<p>S. Hayashida, R. Saito, K. Watanabe, T. Taniguchi, K. Sawano, Y. Hoshi<br>\u201cCrystal quality degradation in MoTe2 monolayers by a thermal annealing and its suppression by hexagonal boron nitride encapsulation\u201d<br>PRiME2020, B01-1132, (October 4-9 2020, Online)<\/p>\n\n\n\n<p>Miyake Takuma, Rikito Osako, Xuejun Xu, Kentarou Sawano, Takuya Maruizumi, Takehiko Tawara and Hideki Gotoh<br>Silicon Microdisk Resonators in the Mid-Infrared for On-Chip Gas Sensing<br>SSDM 2020, September 27-30, 2020 online<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2019<\/strong><\/p>\n\n\n\n<p>Shunya Hayashida, Kenji Watanabe, Takashi Taniguchi, Kentarou Sawano, and Yusuke Hoshi<br>&#8220;Effect of thermal annealing at a low temperature on exciton dynamics in semiconducting MoTe2 crystals&#8221;<br>SSDM2019, Nagoya University, Nagoya, Japan, September 2-5, 2019<\/p>\n\n\n\n<p>Yusuke Hoshi, Shunya Hayashida, Kentarou Sawano<br>&#8220;Optical Interferences in Monolayer Tungsten Disulfide and Tungsten Diselenide Encapsulated by Hexagonal Boron nitride&#8221;<br>ISCSI\u2167 (8th International Symposium on Control of Semiconductor Interfaces), Tohoku University, Sendai, Japan, November 27-30, 2019<\/p>\n\n\n\n<p>Kenta Niikura, Yuta Kumazawa, Natsuki Yamahata, Yusuke Hoshi, Tsukasa Takamura, Kimihiko Saito, Makoto Konagai, Kentarou Sawano<br>&#8220;Enhanced Photoluminescence from Strained Ge-on-Insulator Surface-Passivated with Hydrogenated Amorphous Si&#8221;<br>ISCSI\u2167 (8th International Symposium on Control of Semiconductor Interfaces), Tohoku University, Sendai, Japan, November 27-30, 2019<\/p>\n\n\n\n<p>Youya Wagatsuma, Md. Mahfuz Alam, Kazuya Okada, Yusuke Hoshi, Michihiro Yamada, Kohei Hamaya, Kentarou Sawano<br>&#8220;Surface Morphology Evolution of Strained Si1-xGex Grown on Relaxed Ge(111)&#8221;<br>ISCSI\u2167 (8th International Symposium on Control of Semiconductor Interfaces), Tohoku University, Sendai, Japan, November 27-30, 2019<\/p>\n\n\n\n<p>Shunya Hayashida, Kenji Watanabe, Takashi Taniguchi, Kentarou Sawano, and Yusuke Hoshi<br>&#8220;Thermal stability of mechanically-exfoliated monolayer and few layer MoTe2&#8221;<br>ISCSI\u2167 (8th International Symposium on Control of Semiconductor Interfaces), Tohoku University, Sendai, Japan, November 27-30, 2019<\/p>\n\n\n\n<p>Md. Mahfuz Alam and Kentarou Sawano (Invited)<br>\u201cSi\/Ge Heterostructures with Various Surface Orientations\u201d<br>EMN Epitaxy 2019, Amsterdam, the Netherlands, June 18-20, 2019<\/p>\n\n\n\n<p>Md. Mahfuz Alam, Kazuya Okada, Yuya Wagatsuma, Yusuke Hoshi, Michihiro Yamada, Kohei Hamaya and Kentarou Sawano<br>\u201cStrain states and critical thickness of Si1-xGex epitaxial layers on Ge-on-Si(111)\u201d<br>ISTDM \/ ICSI 2019 Conference, Madison, USA, June 2-6, 2019<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2018<\/strong><\/p>\n\n\n\n<p>Kentarou Sawano, Xuejun Xu, Takuya Maruizumi<br>\u201cGermanium light source monolithically integrated on Si platform\u201d (Invited)<br>International Conference on Small Science 2018 (ICSS 2018), Rome, Italy, July 4, 2018<\/p>\n\n\n\n<p>Md. Mahfuz Alam, Keijiro Sato, Kosuke Sawada, Kentarou Sawano<br>\u201cStructural and electrical properties of compressive strained Ge channels fabricated on Si (111) and Si (100)\u201d<br>Joint ISTDM \/ ICSI 2018, Potsdam, Germany, May 27 &#8211; 31, 2018<\/p>\n\n\n\n<p>Ryotaro Matsuoka, Eriko Shigesawa, Satoru Miyamoto, Kentarou Sawano and K.M. Itoh<br>\u201cFabrication of Ge MOS with low interface trap density by ALD of Al2O3 on epitaxially grown Ge\u201d<br>Joint ISTDM \/ ICSI 2018, Potsdam, Germany, May 27 &#8211; 31, 2018<\/p>\n\n\n\n<p>Eriko Shigesawa, Masashi Fukumoto, Ryotaro Matsuoka, Ryosuke Sano, Kohei M. Itoh, Kentarou Sawano and Hiroshi Nohira<br>\u201cFormation of high quality Al2O3\/Ge interface by ALD directly on epitaxial Ge\u201d<br>Joint ISTDM \/ ICSI 2018, Potsdam, Germany, May 27 &#8211; 31, 2018<\/p>\n\n\n\n<p>K. Oki, K. Arimoto, J. Yamanaka, K. Nakagawa, K, Sawano<br>\u201cFabrication and evaluation of Ge on Si (110) by using two-step growth method\u201d<br>Joint ISTDM \/ ICSI 2018, Potsdam, Germany, May 27 &#8211; 31, 2018<\/p>\n\n\n\n<p>Yuta Kumazawa, Xuejun Xu, Kentarou Sawano, Takuya Maruizumi<br>\u201cEffects of post annealing on in-situ n-doped Ge-on-Si\u201d<br>Joint ISTDM \/ ICSI 2018, Potsdam, Germany, May 27 &#8211; 31, 2018<\/p>\n\n\n\n<p>R. Sano, S. Konoshima, K. Sawano, H. Nohira<br>\u201cEffect of Strain on the Binding Energy of Ge 2p and 3d core level\u201d<br>Joint ISTDM \/ ICSI 2018, Potsdam, Germany, May 27 &#8211; 31, 2018<\/p>\n\n\n\n<p>M. Tsukahara, M. Yamada, T. Naito, S. Yamada, K. Sawano, and K. Hamaya<br>\u201cRoom-temperature magnetoresistance effect in Ge lateral spin valve devices\u201d<br>Joint ISTDM \/ ICSI 2018, Potsdam, Germany, May 27 &#8211; 31, 2018<\/p>\n\n\n\n<p>Michihiro Yamada, Takahiro Naito, Makoto Tsukahara, Shinya, Yamada, Kentarou Sawano, and Kohei Hamaya<br>\u201cElectrical spin injection and transport in a SiGe alloy\u201d<br>Joint ISTDM \/ ICSI 2018, Potsdam, Germany, May 27 &#8211; 31, 2018<\/p>\n\n\n\n<p>Kentarou Sawano, Xuejun Xu, Takuya Maruizumi<br>\u201cCMOS-compatible Germanium Light Sources\u201d (Invited)<br>233rd ECS Meeting, Seattle, USA, May 13-17, 2018<\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cStrained Ge Optoelectronic Devices Integrated on a Si Platform\u201d (Invited)<br>Nanotech Malaysia 2018, Kuala Lumpur, Malaysia, May 7, 2018<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2017<\/strong><\/p>\n\n\n\n<p>Peiji Zhou, Xuejun Xu, Yuta Kanda, Sho Matsushita, Kentarou Sawano, and Takuya Maruizumi,<br>\u201cThe Resonant Phenomenon in the PL Spectra Measured in the Tensile-Strained Ge Microbridges\u201d,<br>2017 International Conference on Solid State Devices and Materials (SSDM), Sendai, Japan, September 19-23, 2017<\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cControlled doping for Ge based optoelectronic devices\u201d invited<br>2017 EMN\/CC Meeting, Barcelona, Spain, Sep. 11-15 (2017)<\/p>\n\n\n\n<p>Shiori Konoshima, Eisuke Yonekura, Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa, and Kentarou Sawano<br>\u201cFormation of uniaxially strained Ge by local introduction of ion implantation defects\u201d<br>29th International Conference on Defects in Semiconductors (ICDS2017), Matsue, Japan, July 31 &#8211; Aug. 4 (2017)<\/p>\n\n\n\n<p>Ryotaro Matsuoka, Satoru Miyamoto, Kentarou Sawano, and Kohei M Itoh<br>\u201cLow-Defect-Density Al2O3 Insulating Layer for Gate-Controlled Si\/SiGe Quantum Dots\u201d<br>29th International Conference on Defects in Semiconductors (ICDS2017), Matsue, Japan, July 31 &#8211; Aug. 4 (2017)<\/p>\n\n\n\n<p>Kenji Oki, Madoka Kato, Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa, and Kentarou Sawano<br>\u201cEffects of ion implantation defects on strain relaxation of SiGe layers on Si (110)\u201d<br>29th International Conference on Defects in Semiconductors (ICDS2017), Matsue, Japan, July 31 &#8211; Aug. 4 (2017)<\/p>\n\n\n\n<p>Hideaki Hashimoto, Yuta Kumazawa, Xuejun Xu, Kentarou Sawano, and Takuya Maruizumi<br>\u201cCircular distributed Bragg reflector resonators on highly n-doped Ge-on-insulator\u201d<br>10th International Conference on Silicon Epitaxy and Heterostructures (ICSI-10), Coventry, UK, May14-19 (2017)<\/p>\n\n\n\n<p>Sho Matsushita, Yuta Kanda, Xu Xuejun, Kentarou Sawano, Takuya Maruizumi<br>\u201cResonant light emission from uniaxially tensile-strained Ge microbridges\u201d<br>10th International Conference on Silicon Epitaxy and Heterostructures (ICSI-10), Coventry, UK, May14-19 (2017)<\/p>\n\n\n\n<p>Xuejun Xu, Hideaki Hashimoto, Kentarou Sawano, and Takuya Maruizumi, \u201cResonant light emission from highly n-doped germanium-on-insulator microdisks with circular Bragg grating\u201d, 2017 Conference on Lasers and Electro-Optics (CLEO: 2017), San Jose, US, May 14-19, 2017<\/p>\n\n\n\n<p>M. Nomura, J. Nakagawa, K. Sawano, J. Maire, R. Anufriev, S. Volz<br>\u201cThermal Phonon MFP Spectrum Probing Using Phononic Crystals\u201d<br>2017 MRS Spring Meeting &amp; Exhibit, NM2.4.24, Phoenix, USA, April (2017).<\/p>\n\n\n\n<p>Xuejun Xu, Hideaki Hashimoto, Keisuke Yoshida, Kentarou Sawano, and Takuya Maruizumi, \u201cHigh Q-factor resonant photoluminescence from Ge-on-Insulator microdisks\u201d, SPIE Photonics Europe 2016, Brussels, Belgium, April 4-7, 2016<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2016<\/strong><\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cAnisotropic strain engineering of Si\/Ge heterostructures\u201d Invited<br>2016 Global Research Efforts on Energy and Nanomaterials (GREEN 2016) Taipei, Taiwan, Dec. 24 (2016).<\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cStraining of Group IV Semiconductor Materials for Bandgap and Mobility Engineering\u201d Invited<br>Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME 2016), Honolulu, USA, Oct. 2-7 (2016).<\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cAnisotropic Strain Introduction into Si\/Ge Hetero Structures\u201d Invited<br>Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME 2016), Honolulu, USA, Oct. 2-7 (2016).<\/p>\n\n\n\n<p>H. Hashimoto, X. Xu, K. Sawano, T. Maruizumi<br>\u201cEnhanced Light Emission from N-Doped Ge Microdisks by Thermal Oxidation\u201d<br>Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME 2016), Honolulu, USA, Oct. 2-7 (2016).<\/p>\n\n\n\n<p>K. Sawano, K. Mizutani, K. Watanabe, X. Xu, T. Maruizumi<br>\u201cLight Emission Enhancement from Ge Quantum Dots with Phosphorous \uf064-Doping\u201d<br>19th International Conference on Molecular Beam Epitaxy (MBE 2016), Montpellier (France) (Sep 4-9, 2016)<\/p>\n\n\n\n<p>M. Kato, T. Murakami, K. Arimoto, J. Yamanaka, K. Nakagawa, K, Sawano<br>\u201cFabrication of high-quality strain relaxed SiGe(110) films by controlling defects via ion implantation\u201d<br>19th International Conference on Molecular Beam Epitaxy (MBE 2016), Montpellier (France) (Sep 4-9, 2016)<\/p>\n\n\n\n<p>H. Hashimoto, X. Xu, K. Sawano, T. Maruizumi<br>\u201cHighly N-doped Ge Microdisks with Circular Bragg Gratings on Ge-on-Insulator\u201d<br>19th International Conference on Molecular Beam Epitaxy (MBE 2016), Montpellier (France) (Sep 4-9, 2016)<\/p>\n\n\n\n<p>Y.Arisawa, K. Sawano and N. Usami<br>\u201cStudy on ion implantation conditions in fabricating compressively strained Si\/relaxed Si1-xCx heterostructures using the defect control by ion implantation technique\u201d<br>The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18), Nagoya, Japan (Aug 7-12, 2016)<\/p>\n\n\n\n<p>K. Sawano, K. Watanabe, K. Mizutani, X. Xu, T. Maruizumi<br>\u201cInfluences of Phosphorous \u03b4-Doping at Ge Quantum Dots \/ Si Interface on Photoluminescence Properties and Dot Formation\u201d<br>The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18), Nagoya, Japan (Aug 7-12, 2016)<\/p>\n\n\n\n<p>Shiori Konoshima, Eisuke Yonekura, Kentarou Sawano<br>\u201cFabrication of uniaxially strained Ge by selective ion implantation technique\u201d<br>The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18), Nagoya, Japan (Aug 7-12, 2016)<\/p>\n\n\n\n<p>K. Arimoto, S. Yagi, J. Yamanaka, K. Nakagawa, N. Usami, K. Sawano<br>Hole Mobility in Strained Si\/SiGe\/Vicinal Si(110) Grown by Gas Source MBE<br>The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18), Nagoya, Japan (Aug 7-12, 2016)<\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cStrained Ge-on-Insulator Substrates toward Optoelectronic Integrated Circuits\u201d (Invited)<br>The International Conference on Small Science (ICSS 2016), Prague, Czech Republic (June 25-29, 2016)<\/p>\n\n\n\n<p>Michihiro Yamada, Yuichi Fujita, Shinya Yamada, Kentarou Sawano, Kohei Hamaya<br>\u201cControl of Electrical Properties in Heusler-Alloy\/Ge Schottky Tunnel Contacts formed by Phosphorous \u03b4-Doping with Si-Layer Insertion\u201d<br>International SiGe Technology and Device Meeting 2016 (ISTDM2016), Nagoya, Japan (June 7-11, 2016)<\/p>\n\n\n\n<p>You Arisawa, Yusuke Hoshi, Kentarou Sawano, Junji Yamanaka, Keisuke Arimoto, Chiaya Yamamoto, Noritaka Usami<br>\u201cThermal Stability of Compressively Strained Si\/Relaxed Si1-xCx Heterostructures Formed on Ar Ion Implanted Si (100) Substrates\u201d<br>International SiGe Technology and Device Meeting 2016 (ISTDM2016), Nagoya, Japan (June 7-11, 2016)<\/p>\n\n\n\n<p>Yuuki Yajima, Yuta Ariyama, Kentarou Sawano<br>\u201cFormation of Strained Ge-on-Insulator (GOI) Substrates using SiGe Etching Stop Layers\u201d<br>International SiGe Technology and Device Meeting 2016 (ISTDM2016), Nagoya, Japan (June 7-11, 2016)<\/p>\n\n\n\n<p>Yuichi Fujita, Michihiro Yamada, Shinya Yamada, Kentarou Sawano, Takeshi Kanashima, Kohei Hamaya<br>\u201cRoom-Temperature Electrical Spin Injection and Detection in n-Ge through Co2FeSi0.5Al0.5\/n+-Ge Schottky Tunnel Contacts\u201d<br>International SiGe Technology and Device Meeting 2016 (ISTDM2016), Nagoya, Japan (June 7-11, 2016)<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2015<\/strong><\/p>\n\n\n\n<p>Yuichi Fujita, Takayasu Oka, Yuta Nagatomi, Keisuke Yamamoto, Michihiro Yamada, Kentarou Sawano, Shinya Yamada, Takeshi Kanashima, Hiroshi Nakashima, and Kohei Hamaya<br>\u201cLow-temperature fabrication of a gate stack structure for Ge-based spin-MOSFET\u201d<br>2015 International Workshop on Dielectric Thin Films for Future Electron Devices -Science and Technology- (2015 IWDTF), Tokyo, Japan (November 2-4, 2015)<\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cStrained Germanium based Nano-Structures toward High Performance Optoelectronic Integrated Circuits\u201d (Invited)<br>International Symposium for Advanced Materials Research 2015 (ISAMR 2015), Sun Moon Lake, Taiwan (August 16-20, 2015)<\/p>\n\n\n\n<p>K. Sawano, T. Nagashima, H. Hashimoto, X. Xu, K. Hamaya, and T. Maruizumi<br>\u201cFabrication of Strained Ge-on-Insulator for Ge-based Optoelectronic Devices\u201d<br>E-MRS 2015 Spring Meeting, Lille, France (May 11-15, 2015)<\/p>\n\n\n\n<p>Y. Hoshi, K. Arimoto, K. Sawano, Y. Arisawa, K. Fujiwara, J. Yamanaka, K. Nakagawa, N. Usami<br>\u201cCompressively strained Si\/Si1-xCx heterostructures formed by Ar ion implantation technique\u201c<br>9th International Conference on Silicon Epitaxy and Heterostructures, Montreal, Canada (May 2015)<\/p>\n\n\n\n<p>Michihiro Yamada, Kentarou Sawano, Masashi Uematsu, and Kohei. M. Itoh<br>\u201cSuppression of the segregation of delta-doped P by the insertion of Si layers in Ge\u201d<br>9th International Conference on Silicon Epitaxy and Heterostructures, Montreal, Canada (May 2015)<\/p>\n\n\n\n<p>Rai Moriya, Kentarou Sawano, Yusuke Hoshi, Satoru Masubuchi, Yasuhiro Shiraki, Takaaki Koga, and Tomoki Machida<br>\u201cCubic Rashba Spin-Orbit Interaction of a Two-Dimensional Hole Gas in a Ge\/SiGe Quantum Well\u201d<br>21st International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS-21), July 26-31, 2015, Sendai, Japan<\/p>\n\n\n\n<p>Christian Neumann, Johannes Kierig, Florian Forster, Andreas Wild, J. W. Ager, E. E. Haller, Gerhard Abstreiter, Kentarou Sawano, Stefan Ludwig, and Dominique Bougeard<br>Robust quantum dot devices for qubits in isotopically purified 28Si<br>21st International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS-21), July 26-31, 2015, Sendai, Japan<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2014<\/strong><\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cAnisotropic Strain Engineering in Si\/Ge Heterostructures\u201d (Invited)<br>The Collaborative Conference on Crystal Growth (3CG 2014), Phuket, Thailand (November 4-7, 2014)<\/p>\n\n\n\n<p>Michihiro Yamada, Kentarou Sawano and Kohei. M. Itoh<br>\u201cFormation of ultrashallow Ohmic contacts for n-type Ge by P delta-doping\u201d<br>7th International Silicon-Germanium Technology and Device Meeting, 2014 ISTDM, Singapore, (June 2-4, 2014) .<\/p>\n\n\n\n<p>Eisuke Yonekura, Junji Yamanaka, Keisuke Arimoto, Kiyokazu Nakagawa, Yasuhiro Shiraki and Kentarou Sawano<br>\u201cFormation of Uniaxially Strained SiGe with High Ge Concentrations by Selective Ion Implantation\u201d<br>7th International Silicon-Germanium Technology and Device Meeting, 2014 ISTDM, Singapore, (June 2-4, 2014) .<\/p>\n\n\n\n<p>Tomonori Nagashima, Hironori Katsumata, Kohei Hamaya, Masanobu Miyao, Yasuhiro Shiraki, Kentarou Sawano<br>\u201cElectrical properties of strained Ge(111)-on-Insulator (GOI) fabricated by Ge epitaxy on Si and layer transfer\u201d<br>7th International Silicon-Germanium Technology and Device Meeting, 2014 ISTDM, Singapore, (June 2-4, 2014) .<\/p>\n\n\n\n<p>Kentarou Sawano, Tatsuya Nakama, Xuejun Xu, Yasuhiro Shiraki, Takuya Maruizumi<br>\u201cEnhancement of Photoluminescence from Si\/Ge Quantum Dots by Phosphorus \uf064-doping\u201d<br>18th International Conference on Molecular Beam Epitaxy, Flagstaff, USA (September 7-12, 2014)<\/p>\n\n\n\n<p>Michihiro Yamada, Kentarou Sawano and Kohei. M. Itoh<br>\u201cSuppression of segregation in P delta doping for ultrashallow Ohmic contact on n-type Ge\u201d<br>18th International Conference on Molecular Beam Epitaxy, Flagstaff, USA (September 7-12, 2014)<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2013<\/strong><\/p>\n\n\n\n<p>K. Sawano<br>\u201cStrain engineered Si\/Ge heterostructures\u201d (Invited)<br>The International Conference on Small Science (ICSS 2013), Workshop on Nano\/Micro Structure, Las Vegas, USA, December 15-18, 2013<\/p>\n\n\n\n<p>K. Sawano, Y. Shoji, N. Funabashi, E. Yonekura, K. Nakagawa, Y. Shiraki<br>\u201cUniaxially strained Si\/Ge heterostructures grown on selectively ion-implanted substrates\u201d<br>17th International Conference on Crystal Growth and Epitaxy (ICCGE-17), Warsaw, Poland, August 11-16, 2013<\/p>\n\n\n\n<p>K. Sawano, Y. Hoshi, S. Endo, H. Katsumata, T. Nagashima, K. Arimoto, J. Yamanaka, K. Nakagawa, K. Hamaya, M. Miyao and Y. Shiraki<br>\u201cFormation of Ge(111) on Insulator by Ge epitaxy on Si(111) and layer transfer\u201d<br>The 8th Int. Conf. on Si Epitaxy and Heterostructures (ICSI-8), Fukuoka, Japan, June 2-7, 2013<\/p>\n\n\n\n<p>Keisuke Nishida, Xuejun Xu, Kentarou Sawano, Takuya Maruizumi, Yasuhiro Shiraki<br>\u201cHighly n-doped, tensile-strained Ge grown on Si by molecular beam epitaxy\u201d<br>The 8th Int. Conf. on Si Epitaxy and Heterostructures (ICSI-8), Fukuoka, Japan, June 2-7, 2013<\/p>\n\n\n\n<p>K. Sawano, Y. Shoji, E. Yonekura, K. Nakagawa, and Y. Shiraki<br>\u201cFormation of Uniaxially Strained Ge by Selective Ion Implantation\u201d<br>E-MRS 2013 Spring Meeting, Symposium I: Strasbourg, France, May 30, 2013<\/p>\n\n\n\n<p>Shinya Yamada, Makoto Kawano, Kohei Tanikawa, Kentarou Sawano, Masanobu Miyao, Kohei Hamaya<br>\u201cEpitaxial Ge\/Metallic Silicide Grown on Si with Atomically Smooth Heterointerfaces\u201d<br>The 8th Int. Conf. on Si Epitaxy and Heterostructures (ICSI-8), Fukuoka, Japan, June 2-7, 2013<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2012<\/strong><\/p>\n\n\n\n<p>K. Sawano, Y. Hoshi, S. Nagakura, K. Arimoto, K. Nakagawa, N. Usami, Y. Shiraki<br>\u201cOn the origin of the uniaxial strain induced in Si\/Ge heterostructures with selective ion implantation technique\u201d<br>The 17th International Conference on Molecular Beam Epitaxy, Nara, Japan, September 26, 2012<\/p>\n\n\n\n<p>Y. Hoshi, S. Kubo, K. Sawano, K. Arimoto, J. Yamanaka, K. Nakagawa, K. Hamaya, M. Miyao and Y. Shiraki<br>\u201cFormation of high-quality Ge(111) layers on Si (111) substrates\u201d<br>The 17th International Conference on Molecular Beam Epitaxy, Nara, Japan, September 27, 2012<\/p>\n\n\n\n<p>K. Sawano, Y. Hoshi, S. Nagakura, K. Arimoto, K. Nakagawa, N. Usami, and Y. Shiraki<br>\u201cFormation of Uniaxially Strained Si\/Ge Channels on SiGe Buffers Strain-controlled with Selective Ion Implantation\u201d<br>Pacific Rim Meeting (PRiME) 2012, Symposium:E17 &#8211; SiGe, Ge, and Related Compounds: Materials, Processing, and Devices 5, Honolulu, USA, October 10, 2012<\/p>\n\n\n\n<p>Y. Hoshi, R. Moriya, K. Sawano, N. Usami, T. Machida and Y. Shiraki<br>\u201cMagnetotransport properties of 20-nm-thick strained Ge with various compressive stresses\u201d<br>2012 International Conference on Solid State Devices and Materials (SSDM 2012), Kyoto, Japan, September 25-27, 2012<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2011<\/strong><\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cIon Implantation for Strain Engineering of Si-based Semiconductor\u201d invited<br>BIT\u2019s 1st Annual World Congress of Nano-S&amp;T 2011, Dalian, China, October 26, 2011<\/p>\n\n\n\n<p>Yusuke Hoshi, Kentarou Sawano, Kohei Hamaya, Masanobu Miyao, and Yasuhiro Shiraki<br>&#8220;Fabrication of strained thin-film GOI based on wafer bonding&#8221;<br>ICSi-7 2011 (International Conference on Si Epitaxy and Heterostructures), Leuven, Belgium, Aug. 30, 2011<\/p>\n\n\n\n<p>Shigenori Inoue, Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa Kentarou Sawano, Yasuhiro Shiraki, Atsushi Moriya, Yasuhiro Inokuchi, and Yasuo Kunii<br>&#8220;Microstructure Change of Si0.99C0.01 Thin Films Caused by Arsenic-Ion-, Boron-Ion-, and Silicon-Ion-Implantation and Successive Rapid Thermal Annealing Treatment&#8221;<br>ICSi-7 2011 (International Conference on Si Epitaxy and Heterostructures), Leuven, Belgium, Aug. 30, 2011<\/p>\n\n\n\n<p>Takuya Maruizumi, Jiro Ushio, Shotaro Abe, Kentarou Sawano, and Yasuhiro Shiraki<br>&#8220;Surface segregation behavior of B, Ga, Sb, and As dopant atoms on Ge(100) and Ge(111) examined with a first-principles method&#8221;<br>ICSi-7 2011 (International Conference on Si Epitaxy and Heterostructures), Leuven, Belgium, Aug. 30, 2011<\/p>\n\n\n\n<p>E. S. Kannan, I. Bisotto, R. Murali, T. J. Beck, L. Jalabert, K. Sawano, H. Fujita, and J.-C. Portal<br>&#8220;Electron-antidot interaction in antidot lattice with different etching parameter&#8221;<br>The 19th international conference on Electronic Properties of Two-Dimensional Systems (EP2DS19), Florida, USA, July 25, 2011<\/p>\n\n\n\n<p>I. Bisotto, E. S. Kannan, R. Murali, T. J. Beck, L. Jalabert, K. Sawano, H. Fujita, and J.-C. Portal<br>&#8220;Ratchet photovoltage in Si\/SiGe heterostructure for different antidot lattice parameters&#8221;<br>The 19th international conference on Electronic Properties of Two-Dimensional Systems (EP2DS19), Florida, USA, July 25, 2011<\/p>\n\n\n\n<p>T. Tanaka, K. Sawano , Y. Hoshi, Y. Shiraki, and K. M. Itoh<br>&#8220;Temperature dependence of two-dimensional hole gas mobility in a strained Ge quantum well&#8221;<br>The 19th international conference on Electronic Properties of Two-Dimensional Systems (EP2DS19), Florida, USA, July 25, 2011<\/p>\n\n\n\n<p>Y. Hoshi, K. Sawano, N. Usami, K. Arimoto, K. Nakagawa, and Y. Shiraki<br>\u201cStripe line width dependence of anisotorpic strain states induced into SiGe films by selective ion implantation technique\u201c<br>European Materials Research Society (E-MRS) 2011 Spring Meeting, Symposium I, France, 9 May, 2011<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2010<\/strong><\/p>\n\n\n\n<p>K. Sawano, Y. Hoshi, K. Kasahara, K. Yamane, K. Hamaya, M. Miyao, and Y. Shiraki<br>\u201cFormation of ultra-shallow Ohmic contacts on n-Ge by Sb \u03b4-doping\u201d<br>MRS 2010 Fall Meeting, Symposium AA: Group IV Semiconductor Nanostructures and Applications, Boston, USA, Dec. 2, 2010<\/p>\n\n\n\n<p>Y. Hoshi, K. Sawano, A. Yamada, N. Usami, K. Arimoto, K. Nakagawa, and Y. Shiraki<br>\u201cEffect of line width on uniaxial strain states of SiGe layers fabricated by selective ion implantation\u201d<br>5th International SiGe Technology and Device Meeting (ISTDM) 2010, Stockholm, Sweden, May 24, 2010<\/p>\n\n\n\n<p>K. Sawano, K. Toyama, R. Masutomi, T. Okamoto, N. Usami, K. Arimoto, K. Nakagawa, and Y. Shiraki<br>\u201cEffects of increased compressive strain on hole effective mass and scattering mechanisms in strained Ge channels\u201d<br>E-MRS 2010 Spring Meeting, Symposium H : Post-Si CMOS electronic devices: the role of Ge and III-V materials Strasbourg, France, June 10, 2010<\/p>\n\n\n\n<p>K. Kasahara, Y. Ando, K.Yamane, Y. Enomoto, K. Sawano, K. Hamaya and M. Miyao,<br>&#8220;Fe3Si\/Ge(111) Schottky contacts for spin injection into a Ge channel&#8221;,<br>11th Joint MMM-Intermag Conference (2010\/1\/20). Washington DC, USA<\/p>\n\n\n\n<p>Y. Ando, K. Kasahara, Y. Enomoto, K.Yamane, K. Hamaya, K. Sawano, T. Kimura and M. Miyao,<br>&#8220;Nonlocal voltage detection of spin transport in silicon using Fe3Si\/Si Schottky tunnel contacts &#8220;,<br>11th Joint MMM-Intermag Conference (2010\/1\/19). Washington DC, USA<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2009<\/strong><\/p>\n\n\n\n<p>Y. Ando, K. Kasahara, Y. Enomoto, K. Yamane, K. Hamaya, K. Sawano, T. Kimura, and M. Miyao,<br>&#8220;Nonlocal voltage detection of spin transport in silicon using Fe3Si\/Si Schottky tunnel contacts&#8221;,<br>International IMR Workshop on Group IV Spintronics (2009\/10\/4).<\/p>\n\n\n\n<p>\u201cRoom-temperature observation of quantum size effects in photoluminescence of Si\/Si0.8Ge0.2 nanocolumns prepared by neutral beam etching\u201d<br>R. Hirano, S. Miyamoto, M. Yonemoto, S. Samukawa, K. Sawano, Y. Shiraki, and K. M. Itoh<br>International Symposium on Quantum Nanophotonics and Nanoelectronics 2009, Tokyo, Japan, November 18-20, 2009<\/p>\n\n\n\n<p>Kentarou Sawano, Yusuke Hoshi, Atsunori Yamada, Yoshiyasu Hiraoka, Noritaka Usami, Keisuke Arimoto, Kiyokazu Nakagawa, and Yasuhiro Shiraki<br>\u201cFormation of Uniaxially Strained SiGe by Selective Ion Implantation Technique\u201d<br>E-MRS 2009 Spring Meeting, Symposium I : Silicon and Germanium issues for future CMOS devices, Strasbourg, France, June 8-12. 2009<\/p>\n\n\n\n<p>Kentarou Sawano<br>\u201cCMP for high mobility strained Si\/Ge Channels\u201d Invited<br>2009 MRS (Materials Research Society) Spring Meeting, Symposium E : Science and Technology of Chemical Mechanical Planarization (CMP), San Francisco, USA, April 16, 2009<\/p>\n\n\n\n<p>\u201cProbing the Behaviors of Point Defects in Silicon and Germanium Using Isotope Superlattices\u201d<br>Masashi Uematsu, Miki Naganawa, Yasuo Shimizu, Kohei M. Itoh, Kentarou Sawano, Yasuhiro Shiraki, and Eugene E. Haller<br>The 216th Meeting of the Electrochemical Society, Analytical Techniques for Semiconductor Materials and Process Characterization 6, Wien, Austria, October 4-9 (2009)<\/p>\n\n\n\n<p>\u201cDeactivation Mechanism of Ion-Implanted Arsenic in Germanium\u201d<br>Masashi Uematsu, Miki Naganawa, Yasuo Shimizu, Kohei M. Itoh, Kentarou Sawano, Yasuhiro Shiraki, and Eugene E. Haller<br>The 25th International Conference on Defects in Semiconductors (ICDS-25). St Petersburg, Russia, July 20-24 (2009)<\/p>\n\n\n\n<p>\u201cIdentification of scattering mechanisms limiting the mobility of two-dimensional electron gas in Si\/SiGe heterostructures\u201d<br>G. Tsuchiya, K. Sawano, Y. Shiraki, K. M. Itoh<br>The 18th International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS-18), Kobe, July 19-24 (2009)<\/p>\n\n\n\n<p>\u201cLandau level crossing and pseudospin phase transitions in Si quantum wells\u201d<br>Kohei Sasaki, Ryuichi Masutomi, Kiyohiko Toyama, Kentarou Sawano, Yasuhiro Shiraki and Tohru Okamoto<br>The 18th International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS-18), Kobe, July 19-24 (2009)<\/p>\n\n\n\n<p>\u201cCyclotron resonance of two-dimensional electrons in a Si quantum well\u201d<br>R. Masutomi, A. Sekine, K. Sasaki, K. Sawano, Y. Shiraki and T. Okamoto<br>The 18th International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS-18), Kobe, July 19-24 (2009)<\/p>\n\n\n\n<p>\u201cAbsence of Transient Enhanced Diffusion in Ion-Implanted Ge Investigated by Isotope Superlattices\u201d<br>Masashi Uematsu, Miki Naganawa, Yasuo Shimizu, Kohei M. Itoh, Kentarou Sawano, Yasuhiro Shiraki, and Eugene E. Haller<br>E-MRS 2009 Spring Meeting, Symposium I : Silicon and Germanium issues for future CMOS devices, Strasbourg, France, June 8-12. 2009<\/p>\n\n\n\n<p>\u201cIon dose and species dependence of strain relaxation of SiGe buffer layers formed by ion-implantation technique\u201d<br>Y.Hoshi, K.Sawano, Y.Hiraoka, A.Yamada, K.Arimoto, N.Usami,K.Nakagawa, Y.Shiraki<br>6th International Conference on Silicon Epitaxy and Heterostructures, Los Angeles, California, USA, May 17-22 (2009)<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2008<\/strong><\/p>\n\n\n\n<p>\u201cLocal Control of Strain in SiGe by Ion Implantation Technique\u201d<br>K. Sawano, Y. Hoshi, Y. Hiraoka, N. Usami, K. Nakagawa, Y. Shiraki<br>4th Asian Conference on Crystal Growth and Crystal Technology (CGCT-4), Sendai, May 21-24, 2008<\/p>\n\n\n\n<p>\u201cCrystalline morphology of step-graded SiGe layers grown on exact and vicinal (110) Si substrates\u201d<br>K. Arimoto, M. Watanabe, J. Yamanaka, K. Nakagawa, K. Sawano, Y. Shiraki, N. Usami, and K. Nakajima<br>4th Asian Conference on Crystal Growth and Crystal Technology (CGCT-4), Sendai, May 21-24, 2008<\/p>\n\n\n\n<p>\u201cFabrication of thin strain-relaxed SiGe buffer layers with high-Ge composition by ion implantation method\u201d<br>Y. Hoshi, K. Sawano, Y. Hiraoka, N. Usami, K. Nakagawa, and Y. Shiraki<br>4th Asian Conference on Crystal Growth and Crystal Technology (CGCT-4), Sendai, May 21-24, 2008<\/p>\n\n\n\n<p>\u201cStrain relaxation mechanism in step-graded SiGe\/Si(110) structure grown at 650 \u2013 800 \u00b0C\u201d<br>M. Watanabe, K. Arimoto, J. Yamanaka, K. Nakagawa, N. Usami, K. Nakajima, K. Sawano, and Y. Shiraki<br>4th Asian Conference on Crystal Growth and Crystal Technology (CGCT-4), Sendai, May 21-24, 2008<\/p>\n\n\n\n<p>\u201cStructural and transport properties of strained Ge and SiGe grown on patterned substrates\u201d<br>G. Kawaguchi, K. Shimizu, K. Arimoto, M. Watanabe, K. Nakagawa, J. Yamanaka, N. Usami, K. Nakajima, K. Sawano, and Y. Shiraki<br>4th Asian Conference on Crystal Growth and Crystal Technology (CGCT-4), Sendai, May 21-24, 2008<\/p>\n\n\n\n<p>\u201cLocal Strain Control of SiGe by Selective Ion Implantation Technique\u201d<br>K. Sawano, Y. Hoshi, Y. Hiraoka, S. Kannan, Y. Shiraki, N. Usami, and K. Nakagawa<br>4th International SiGe Technology and Device Meeting (ISTDM) 2008, Taiwan, May 11-14, 2008<\/p>\n\n\n\n<p>\u201cDevelopment of Thin SiGe Virtual Substrate with High Ge Composition by Ion Implantation Method\u201d<br>Yusuke Hoshi, Kentarou Sawano, Yoshiyasu Hiraoka, Yuu Satoh, Atsunori Yamada, Yuta Ogawa, Yasuhiro Shiraki, Noritaka Usami, and Kiyokazu Nakagawa<br>4th International SiGe Technology and Device Meeting (ISTDM) 2008, Taiwan, May 11-14, 2008<\/p>\n\n\n\n<p>\u201cObservation of Pronounced Effect of Compressive Strain on Room-Temperature Transport Properties of 2DHG Confined in Ge Quantum Wells\u201d<br>Maksym Myronov, K. Sawano, Y. Shiraki, and K.M. Itoh<br>4th International SiGe Technology and Device Meeting (ISTDM) 2008, Taiwan, May 11-14, 2008<\/p>\n\n\n\n<p>\u201cStrain Relaxation Mechanisms in Compositionally Uniform and Step-Graded SiGe Films Grown on Si(110) Substrates\u201d<br>Keisuke Arimoto, Masato Watanabe, Junji Yamanaka, Kiyokazu Nakagawa, Kentarou Sawano, Yasuhiro Shiraki, Noritaka Usami, and Kazuo Nakajima<br>4th International SiGe Technology and Device Meeting (ISTDM) 2008, Taiwan, May 11-14, 2008<\/p>\n\n\n\n<p>\u201cSelective and Rapid Heating Method for Polycrystallization of Amorphous Si Using Microwave Plasma Irradiation\u201d<br>S. Ashizawa, S. Ariizumi, M. Mitsui, K. Arimoto, J. Yamanaka, K. Nakagawa, T. Arai, T. Takamatsu, K. Sawano, and Y. Shiraki<br>4th International SiGe Technology and Device Meeting (ISTDM) 2008, Taiwan, May 11-14, 2008<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2007<\/strong><\/p>\n\n\n\n<p>\u201cFabrication of SiGe Virtual Substrates by Ion Implantation Technique\u201d<br>K. Sawano, Y. Shiraki, and K. Nakagawa<br>212th ECS Meeting, Washington, D.C., October 7-12. 2007<\/p>\n\n\n\n<p>\u201cHole density and strain dependencies of hole effective mass in compressively strained Ge channel structures\u201d<br>K. Sawano, Y. Kunishi, K. Toyama, T. Okamoto, N. Usami, K. Nakagawa and Y. Shiraki<br>The 13th International Conference on Modulated Semiconductor structures (MSS-13), Genova, Italy, July 15-20, 2007<\/p>\n\n\n\n<p>\u201cObservation of high mobility 2DHG with very high hole density in the modulation doped strained Ge quantum well at room temperature\u201d<br>M. Myronov, K. Sawano, K. M. Itoh and Y. Shiraki<br>The 13th International Conference on Modulated Semiconductor structures (MSS-13), Genova, Italy, July 15-20, 2007<\/p>\n\n\n\n<p>\u201cStrained-Si nMOSFET formed on very thin SiGe buffer layer fabricated by ion implantation technique\u201d<br>K. Sawano, A. Fukumoto, Y. Hoshi, J. Yamanaka, K. Arimoto, K. Nakagawa and Y. Shiraki<br>5th International Conference on Silicon Epitaxy and Heterostructures (ICSi-5), Marseille, France, May 20-25, 2007<\/p>\n\n\n\n<p>\u201cFabrication of high quality SiGe relaxed thin layers by ion implantation technique with Ar, Si and Ge ions\u201d<br>K. Sawano, A. Fukumoto, Y. Hoshi, J. Yamanaka, K. Nakagawa, and Y. Shiraki<br>5th International Conference on Silicon Epitaxy and Heterostructures (ICSi-5), Marseille, France, May 20-25, 2007<\/p>\n\n\n\n<p>\u201cInvestigations of strain states and improvements of thermal stability in strained-Si-on-Insulator (sSOI) structures\u201d<br>Y. Hoshi, A. Fukumoto, K. Sawano, I. Cayrefourcq, M. Yoshimi and Y. Shiraki<br>5th International Conference on Silicon Epitaxy and Heterostructures (ICSi-5), Marseille, France, May 20-25, 2007<\/p>\n\n\n\n<p>\u201cMicrostructure difference of Ni induced poly-crystallized SiGe by changing annealing atmosphere, and enhancement of Ni induced poly-crystallization of Si by Ar ion-implantation\u201d<br>J. Yamanaka, T. Horie, M. Mitsui, K. Arimoto, K. Nakagawa, T. Sato, K. Sawano, Y. Shiraki, T. Moritani and M. Doi<br>5th International Conference on Silicon Epitaxy and Heterostructures (ICSi-5), Marseille, France, May 20-25, 2007<\/p>\n\n\n\n<p>\u201cGrowth temperature dependence of the defect morphology in SiGe films grown on Si(110) substrates with step-graded buffer being employed\u201d<br>Keisuke Arimoto, Masato Watanabe, Junji Yamanaka, Kiyokazu Nakagawa, Kentarou Sawano, Yasuhiro Shiraki, Noritaka Usami and Kazuo Nakajima<br>5th International Conference on Silicon Epitaxy and Heterostructures (ICSi-5), Marseille, France, May 20-25, 2007<\/p>\n\n\n\n<p>\u201cCharacterizations of Polycrystalline SiGe Films on SiO2 Grown by Gas-Source Molecular Beam Deposition\u201d<br>M. Mitsui, M. Tamoto, K. Arimoto, J. Yamanaka, K. Nakagawa, T. Sato, N. Usami, K. Sawano and Y. Shiraki<br>5th International Conference on Silicon Epitaxy and Heterostructures (ICSi-5), Marseille, France, May 20-25, 2007<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2006<\/strong><\/p>\n\n\n\n<p>\u201cFabrication of Ge channels with extremely high compressive strain and their magnetotransport properties\u201d<br>K. Sawano, K. Toyama, T. Okamoto, N. Usami, K. Nakagawa, and Y. Shiraki<br>The 14th International Conference on Molecular Beam Epitaxy (MBE2006), Tokyo, Japan, September 3-8, 2006<\/p>\n\n\n\n<p>\u201cGrowth temperature dependence of the lattice structures of SiGe films grown on Si(110) substrates by gas source MBE\u201d<br>Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa, Kentarou Sawano, Yasuhiro Shiraki, and Noritaka Usami<br>The 14th International Conference on Molecular Beam Epitaxy (MBE2006), Tokyo, Japan, September 3-8, 2006<\/p>\n\n\n\n<p>\u201cThe carrier density dependence of hole mobility in strained Ge channel modulation-doped structures\u201d\u3000<br>K. Sawano, Y. Kunishi, H. Satoh K. Nakagawa and Y. Shiraki<br>28th International conference on the Physics of Semiconductors (ICPS-28), Vienna, Austria, July 24-28 2006<\/p>\n\n\n\n<p>\u201cStrain and hole-density dependence of hole mobility in strained-Ge modulation-doped structures\u201d<br>K. Sawano, H. Satoh, Y. Kunishi, K. Nakagawa, and Y. Shiraki<br>3rd International SiGe Technology and Device Meeting (ISTDM) 2006, Princeton, May 2006<\/p>\n\n\n\n<p>\u201cInvestigations of Thermal Stability of strained-SOI (sSOI)\u201d<br>A. Fukumoto, K. Sawano,Y. Hoshi, M. Yoshimi and Y. Shiraki,<br>3rd International SiGe Technology and Device Meeting (ISTDM) 2006, Princeton, May 2006<\/p>\n\n\n\n<p>\u201cEnhancement of Hole Mobility and Carrier Density in Ge Quantum Well SiGe Heterostructure via Implementation of Double-Sides Doping\u201d<br>M. Myronov, K. Sawano and Y. Shiraki<br>3rd International SiGe Technology and Device Meeting (ISTDM) 2006, Princeton, May 2006<\/p>\n\n\n\n<p>\u201cThe hole density dependence of hole mobility in compressively strained Ge channel modulation-doped structures\u201d<br>K. Sawano, Y. Kunishi, H. Satoh, K. Nakagawa and Y. Shiraki<br>2nd International WorkShop on New Group \u2163 Semiconductor Nanoelectronics, Sendai, Japan, October 2006<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2005<\/strong><\/p>\n\n\n\n<p>\u201cMobility enhancement in strained-Ge modulation-doped structures by planarization of SiGe buffer layers\u201d<br>K. Sawano, Y. Abe, H. Satoh, K. Nakagawa, and Y. Shiraki<br>12th International Conference on Modulated Semiconductor Structures (MSS12), Albuquerque, July 2005<\/p>\n\n\n\n<p>\u201cStrain field distribution in strained-Si \/ SiGe virtual substrates and its influence on roughness formation\u201d<br>K. Sawano, N. Usami, K. Nakagawa, and Y. Shiraki<br>First International WorkShop on New Group \u2163 Semiconductor Nanoelectronics, Sendai, Japan, May 2005<\/p>\n\n\n\n<p>\u201cStrain field and related roughness formation in SiGe relaxed buffer layers\u201d<br>K. Sawano, N. Usami, K. Nakagawa, and Y. Shiraki<br>Forth International Conference on Silicon Epitaxy and Heterostructures (ICSI-4), Awaji, May 2005<\/p>\n\n\n\n<p>\u201cStrain Relaxation Mechanism of a SiGe Thin Film Grown on an Ion-Implanted Si substrate\u201d<br>Junji Yamanaka, Kentarou Sawano, Kumiko Suzuk, Kiyokazu Nakagawa, Yusuke Ozawa, Takeo Hattori, and Yasuhiro Shiraki<br>Forth International Conference on Silicon Epitaxy and Heterostructures (ICSI-4), Awaji, May 2005<\/p>\n\n\n\n<p>\u201cDetermination of Lattice Parameters of Strained-Si\/SiGe Heterostructures Grown on Si(110) Substrates\u201d<br>Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa, Kentarou Sawano, Yasuhiro Shiraki, Shinji Koh, and Noritaka Usami<br>Forth International Conference on Silicon Epitaxy and Heterostructures (ICSI-4), Awaji, May 2005<\/p>\n\n\n\n<p>\u201cTransport Properties of SPC-Poly SiGe Crystallized at 700\u00b0C and GSMBE-Poly SiGe Grown at 600\u00b0C\u201d<br>M. Mitsui, K. Arimoto, J. Yamanaka, K. Nakagawa, K. Sawano, N. Usami, Y. Shiraki<br>Forth International Conference on Silicon Epitaxy and Heterostructures (ICSI-4), Awaji, May 2005<\/p>\n\n\n\n<p>\u201cStrain field fluctuation in SiGe buffer layers and its reduction by ion implantation technique\u201d<br>K. Sawano, N. Usami, K. Nakagawa, and Y. Shiraki<br>Seventh International Conference on New Phenomena in Mesoscopic Structures, Hawaii, USA, November 2005<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2004<\/strong><\/p>\n\n\n\n<p>\u201cHigh-Quality Thin SiGe Virtual Substrates Formed on Ion-Implanted Si Substrates\u201d<br>K. Sawano, J. Yamanaka, Y. Ozawa, K. Suzuki, S. Koh, K. Nakagawa, T. Hattori, and Y. Shiraki<br>Second International SiGe Technology and Device Meeting (ISTDM) 2004, Frankfurt, May 2004<\/p>\n\n\n\n<p>\u201cObservation of Strain Field Fluctuation in SiGe Relaxed Buffer Layers and its Influence on Overgrown Structures\u201d<br>K. Sawano, N. Usami, K. Arimoto, S. Koh, K. Nakagawa, and Y. Shiraki<br>Second International SiGe Technology and Device Meeting (ISTDM) 2004, Frankfurt, May 2004<\/p>\n\n\n\n<p>\u201cChanges in Elastic Deformation of Strained Si by Micro-Fabrication\u201d<br>Keisuke Arimoto, Daisuke Furukawa, Junji Yamanaka, Kiyokazu Nakagawa, Kentarou Sawano, Shinji Koh, Yasuhiro Shiraki, and Noritaka Usami<br>Second International SiGe Technology and Device Meeting (ISTDM) 2004, Frankfurt, Germany, May (2004)<\/p>\n\n\n\n<p>\u201cObservation of Dislocations in Strain-Relaxed Silicon-Germanium Thin Films with Flat Surfaces Grown on Ion-Implanted Silicon Substrates\u201d<br>J. Yamanaka, K. Sawano, K. Nakagawa, K. Suzuki, Y. Ozawa, S. Koh, T. Hattori, and Y. Shiraki\u3001<br>European Material Research Society (E-MRS) Meeting, Strasbourg, France, May 2004<\/p>\n\n\n\n<p>\u201cGrowth of Functional Structures on SiGe-on-Insulator Substrates with High Ge Content\u201d<br>S. Koh, K. Sawano, Y. Shiraki, X. Huang, S. Uda<br>14th International Conference on Crystal Growth (Grenoble, France, August 2004)<\/p>\n\n\n\n<p>\u201cFabrication of p-i-n Si0.5Ge0.5 Photodetectors on SiGe-on-Insulator Substrates\u201d<br>S. Koh, K. Sawano, Y. Shiraki, N. Usami, K. Nakajima, X. Huang, and S. Uda<br>1st International Conference on Group IV Photonics (Hong Kong, China, September 2004)<\/p>\n\n\n\n<p>\u201cObservation of strain field fluctuation in SiGe relaxed buffer layers and its influence on overgrown structures\u201d<br>K. Sawano, N. Usami, K. Nakagawa, and Y. Shiraki<br>7th China-Japan Symposium on Thin Films (Chengdu, China, September 2004)<\/p>\n\n\n\n<p>\u201cFabrication of strained Ge channel structures with extremely high hole mobility\u201d<br>T. Irisawa, K. Sawano, S. Koh, K. Nakagawa, and Y. Shiraki<br>Third international Workshop on new group-IV (Si-Ge-C) semiconductors, Sendai, Japan, October 12-13 (2004)<\/p>\n\n\n\n<p>\u201cElastic strain distribution in narrow strained Si channels\u201d<br>K. Arimoto, D. Furukawa, J. Yamanaka, K. Nakagawa, K. Sawano, S. Koh, Y. Shiraki, and N. Usami<br>Third international Workshop on new group-IV (Si-Ge-C) semiconductors, Sendai, Japan, October 12-13 (2004)<\/p>\n\n\n\n<p>\u201cFormation of high-quality thin straine-relaxed SiGe buffer layers by ion implantation\u201d<br>Y. Ozawa, K. Sawano, J. Yamanaka, N. Usami, K. Suzuki, K. Arimoto, S. Koh, K. Nakagawa, T. Hattori, and Y. Shiraki<br>Third international Workshop on new group-IV (Si-Ge-C) semiconductors, Sendai, Japan, October 12-13 (2004)<\/p>\n\n\n\n<p>\u201cFabrication of p-i-n Si0.5Ge0.5 photodetectors on SiGe-on insulator substrates\u201d<br>S. Koh, K. Sawano, N. Usami, J. Yamanaka, K. Nakagawa, K. Nakajima, X. Huang, S. Uda, and Y. Shiraki<br>Third international Workshop on new group-IV (Si-Ge-C) semiconductors, Sendai, Japan, October 12-13 (2004)<\/p>\n\n\n\n<p>\u201cStrain field fluctuation in strained-Si\/SiGe heterostructures\u201d<br>K. Sawano, N. Usami, K. Arimoto, S. Koh, K. Nakagawa, and Y. Shiraki<br>Third international Workshop on new group-IV (Si-Ge-C) semiconductors, Sendai, Japan, October 12-13 (2004)<\/p>\n\n\n\n<p>\u201cTransport Properties of Polycrystalline SiGe Thin Films Grown on SiO2\u201d<br>M. Mitsui, K. Arimoto, J. Yamanaka, K. Nakagawa, K. Sawano and Y. Shiraki<br>Materials Research Society 2004 Fall Meeting, Boston, USA, November (2004)<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2003<\/strong><\/p>\n\n\n\n<p>\u201cFormation of thin SiGe virtual substrates by ion implantation into Si substrates\u201d<br>K. Sawano, Y. Hirose, S. Koh, K. Nakagawa, T. Hattori, and Y. Shiraki<br>First International SiGe Technology and Device Meeting (ISTDM) 2003, Nagoya, January 2003<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2002<\/strong><\/p>\n\n\n\n<p>K. Sawano, Y. Hirose, S. Koh, K. Nakagawa, T. Hattori, and Y. Shiraki<br>\u201cRelaxation enhancement of SiGe thin layers by ion implantation into Si substrates\u201d<br>MBE XII 2002 Conference, San Francisco, September 2002<\/p>\n\n\n\n<p>K. Sawano, K. Arimoto, Y. Hirose, S. Koh, N. Usami, K. Nakagawa, T. Hattori, and Y. Shiraki<br>\u201cPlanarization of SiGe virtual substrates by CMP and its application to strained Si modulation-doped structures\u201d<br>MBE XII 2002 Conference, San Francisco, September 2002<\/p>\n\n\n\n<p>K. Sawano, K. Kawaguchi, Y. Hirose, S. Koh, K. Nakagawa, T. Hattori, and Y. Shiraki<br>\u201cFabrication of Ultrasmooth SiGe Virtual Substrates by CMP and their Application to Strained Si Modulation-Doped Structures\u201d<br>Second International Workshop on New Group IV (Si-Ge-C) Semiconductors, Kofu, June 2002<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2001<\/strong><\/p>\n\n\n\n<p>K. Sawano, K. Kawaguchi, T. Ueno, S. Koh, K. Nakagawa, and Y. Shiraki<br>\u201cSurface Smoothing of SiGe Strain-relaxed Buffer Layers by Chemical Mechanical Polishing\u201d<br>E-MRS Spring Meeting 2001 Second International Conference on Silicon Epitaxy and Heterostructures, France, June 2001<\/p>\n\n\n\n<div style=\"height:40px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>2000<\/strong><\/p>\n\n\n\n<p>K. Sawano, M. Ikeda, K. Ohdaira, K. Arimoto, N. Usami and Y. Shiraki<br>\u201cOn the origin of drastic enhancement of the no-phonon transition in GaAsP\/GaP indirect quantum wells with an ultrathin AlP layer\u201d<br>International Conference on Superlattices, Microstructures, and Microdevices 2000 (ICSMM-2000), Korea, September 2000<\/p>\n","protected":false},"excerpt":{"rendered":"International conference(\uff5e2025, 6) 2025 R. Yokoki, S. Sano, M. Aikawa, H. Imai, S. Kikuoka, K. 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