{"id":415,"date":"2023-05-30T16:31:59","date_gmt":"2023-05-30T07:31:59","guid":{"rendered":"http:\/\/www.comm.tcu.ac.jp\/nano_slabo\/wordpress\/?page_id=415"},"modified":"2025-06-27T10:17:16","modified_gmt":"2025-06-27T01:17:16","slug":"domestic","status":"publish","type":"page","link":"https:\/\/www.comm.tcu.ac.jp\/nano_slabo\/domestic\/","title":{"rendered":"\u56fd\u5185\u4f1a\u8b70"},"content":{"rendered":"\n

\u56fd\u5185\u4f1a\u8b70 (\uff5e2025, 3)<\/h2>\n\n\n\n
<\/div>\n\n\n\n

\u7b2c 72 \u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a \u6771\u4eac\u7406\u79d1\u5927\u5b66 2025 \u5e74 3 \u6708<\/strong><\/p>\n\n\n\n

[16a-K305-8]
\u5e45\u5e83\u3044\u5c0e\u6ce2\u8def\u3092\u7528\u3044\u305f\u4e2d\u8d64\u5916\u975e\u7dda\u5f62\u5149\u5b66\u30c7\u30d0\u30a4\u30b9\u7528\u306e\u9ad8 Q \u5024 Si \u30de\u30a4\u30af\u30ed\u30ea\u30f3\u30b0\u5171\u632f\u5668
\u95a2 \u7965\u771f\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u771e\u7530 \u6cbb\u6a39<\/p>\n\n\n\n

[16p-P13-4]
\u6c34\u7d20\u30e9\u30b8\u30ab\u30eb\u51e6\u7406\u3068 Ge \u30a8\u30d4\u819c\u633f\u5165\u306b\u3088\u308b Al2O3\/Ge \u754c\u9762\u306e\u7279\u6027\u5411\u4e0a
\u5c45\u85e4 \u667a\u9df9\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u5ddd \u6e05\u548c<\/p>\n\n\n\n

[16p-K302-2]
\u78c1\u6027\u4f53\u96fb\u6975\u3092\u6709\u3059\u308b Ge(111)\u30b9\u30d4\u30f3 LED \u306e\u4f5c\u88fd\u3068\u767a\u5149\u7279\u6027\u8a55\u4fa1
\u9752\u6728 \u5b87\u5b99\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u76f8\u5ddd \u8309\u7531\u3001\u90a3\u548c \u5927\u6c17\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[15p-K310-9]
\u8cbc\u308a\u5408\u308f\u305b\u6cd5\u3092\u7528\u3044\u305f GOI \u57fa\u677f\u4e0a LED \u306e\u4f5c\u88fd\u3068\u767a\u5149\u7279\u6027\u8a55\u4fa1
\u6a2a\u6728 \u4eae\u6cb3\u3001\u76f8\u5ddd \u8309\u7531\u3001\u4eca\u4e95 \u5e83\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[16p-P07-4]
\u6b6a\u307f Ge \u30de\u30a4\u30af\u30ed\u6d6e\u904a\u69cb\u9020\u306e\u5f62\u6210\u3068\u96fb\u6c17\u7279\u6027\u8a55\u4fa1
\u5965\u8c37 \u60c7\u3001\u6b66\u4e95 \u723d\u4e00\u90ce\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u77f3\u6a4b \u8129\u609f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[16p-P07-5]
\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308a\u30af\u30e9\u30c3\u30af\u767a\u751f\u3092\u6291\u5236\u3057\u305f P \u30c9\u30fc\u30d7\u6b6a\u307f SiGe\/Ge \u306e\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u6e9d\u53e3 \u7a1c\u592a\u3001\u9577\u5c3e \u512a\u5e0c\u3001\u6b66\u4e95 \u723d\u4e00\u90ce\u3001\u5965\u8c37 \u60c7\u3001\u77f3\u6a4b \u8129\u609f\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[16p-P07-8]
\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0 Si(111)\u57fa\u677f\u4e0a\u306b\u6210\u9577\u3057\u305f\u7de9\u548c SiGe \u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306e\u7d50\u6676\u8a55\u4fa1\u3068\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u5409\u7530 \u96c4\u4e00\u3001\u6b66\u4e95 \u723d\u4e00\u90ce\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n \n\n

[15a-K501-2]
SiGe \u8d85\u8584\u819c\u754c\u9762\u5c64\u306b\u3088\u308b Si \u8584\u819c\u306e\u71b1\u4f1d\u5c0e\u7387\u4f4e\u6e1b
\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u67f3\u6fa4 \u4eae\u4eba\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u91ce\u6751 \u653f\u5b8f<\/p>\n\n\n\n

\u7b2c85\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a \u65b0\u6f5f \u6731\u9dfa\u30e1\u30c3\u30bb 2024\u5e749\u6708<\/strong><\/p>\n\n\n\n

[16a-A25-8]
Ge-on-Si \u3092\u7528\u3044\u305f\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u4e0a\u306e\u91d1\u5c5e\u8584\u819c\u5806\u7a4d\u306b\u3088\u308b\u52b9\u679c
\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u77f3\u5ddd \u9678\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[19a-P07-4]
SiGe\/Ge \u591a\u91cd\u91cf\u5b50\u4e95\u6238 LED \u306b\u304a\u3051\u308b EL \u767a\u5149\u7279\u6027\u306e\u969c\u58c1\u5c64\u539a\u4f9d\u5b58\u6027
\u76f8\u5ddd \u8309\u7531\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[20p-C43-7]
\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u3057\u305f Si(111)\u57fa\u677f\u4e0a\u306b\u6210\u9577\u3057\u305f P \u30c9\u30fc\u30d7\u6b6a\u307f SiGe\/Ge \u306e\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u6b66\u4e95 \u723d\u4e00\u90ce\u3001\u83ca\u5ca1 \u67ca\u3001\u5965\u8c37 \u60c7\u3001\u77f3\u6a4b \u8129\u609f\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[19p-B5-1]
Ge-on-Si(111)\u3078\u306e\u30af\u30e9\u30c3\u30af\u767a\u751f\u306e\u89b3\u6e2c\u3068\u305d\u306e\u6291\u5236
\u829d\u539f \u5915\u590f\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u9577\u5c3e \u512a\u5e0c\u3001\u6e9d\u53e3 \u7a1c\u592a\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[19p-B5-2]
\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u306b\u3088\u308b Si(111)\u4e0a\u306e\u6b6a\u307f SiGe\/Ge \u3078\u306e\u30af\u30e9\u30c3\u30af\u4f1d\u642c\u6291\u5236
\u6e9d\u53e3 \u7a1c\u592a\u3001\u9577\u5c3e \u512a\u5e0c\u3001\u829d\u539f \u5915\u590f\u3001\u76f8\u5ddd \u8309\u7531\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[19p-B5-3]
Ge-on-Insulator \u4e0a\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u306e\u4f5c\u88fd\u3068\u5171\u632f\u767a\u5149\u306e\u89b3\u6e2c
\u5409\u5ddd \u4fee\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u77f3\u5ddd \u9678\u3001\u6a2a\u6728 \u4eae\u6cb3\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[19p-B5-4]
Si \u4e0a Ge p-i-n LED \u306e\u4f5c\u88fd\u3068\u5ba4\u6e29 EL \u767a\u5149\u7279\u6027
\u4eca\u4e95 \u5e83\u3001\u9752\u6728 \u5b87\u5b99\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[19p-B5-5]
Ge on insulator \u69cb\u9020\u3092\u7528\u3044\u305f\u6a2a\u578b SiGe \u30b9\u30d4\u30f3\u4f1d\u5c0e\u7d20\u5b50\u306e\u4f5c\u88fd
\u5927\u6728 \u5065\u53f8\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u5409\u5ddd \u4fee\u3001\u936c\u91e3 \u4e00\u3001\u68ee\u672c \u6566\u5df1\u3001\u5c71\u672c \u572d\u4ecb\u3001\u5b87\u4f50\u898b \u55ac\u653f\u3001\u670d\u90e8 \u6893\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6d5c\u5c4b \u5b8f\u5e73<\/p>\n\n\n\n

[19p-B5-6]
Co2FeAl0.5Si0.5\/Ge-pn \u63a5\u5408\u3092\u4ecb\u3057\u305f\u5ba4\u6e29\u30b9\u30d4\u30f3\u4fe1\u53f7\u306e\u89b3\u6e2c
\u5927\u6728 \u5065\u53f8\u3001\u4e0a\u7530 \u4fe1\u4e4b\u4ecb\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u85e4\u4e95 \u7ae3\u5e73\u3001\u5b87\u4f50\u898b \u55ac\u653f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6d5c\u5c4b \u5b8f\u5e73<\/p>\n\n \n\n

[18a-C301-1]
SiGe \u754c\u9762\u3068\u77ed\u5468\u671f\u30d5\u30a9\u30ce\u30cb\u30c3\u30af\u7d50\u6676\u30ca\u30ce\u69cb\u9020\u306b\u3088\u308b Si \u8584\u819c\u306e\u03c3\/\u03ba\u6bd4\u306e\u5411\u4e0a
\u67f3\u6fa4 \u4eae\u4eba\u3001\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u91ce\u6751 \u653f\u5b8f<\/p>\n\n\n\n

\u7b2c71\u56de\u3000\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a \u6771\u4eac\u90fd\u5e02\u5927\u5b66\u30002024\u5e743\u6708<\/strong><\/p>\n\n\n\n

[23a-1BJ-1]
\u8fd1\u30fb\u4e2d\u8d64\u5916\u9818\u57df\u306b\u304a\u3051\u308bSi\u30de\u30a4\u30af\u30ed\u30ea\u30f3\u30b0\u5171\u632f\u5668\u306eQ\u5024\u306e\u6ce2\u9577\u4f9d\u5b58\u6027
\u95a2 \u7965\u771f\u3001\u4e09\u5b85 \u62d3\u78e8\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u771e\u7530 \u6cbb\u6a39<\/p>\n\n\n\n

[23p-12J-4]
Si0.1Ge0.9\u306b\u304a\u3051\u308b\u5ba4\u6e29\u30b9\u30d4\u30f3\u4f1d\u5c0e\u306e\u6b6a\u307f\u52b9\u679c
\u5185\u85e4 \u8cb4\u5927\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6d5c\u5c4b \u5b8f\u5e73<\/p>\n\n\n\n

[23a-22A-6]
\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u306b\u3088\u308bGe-on-Si(111)\u4e0a\u6b6a\u307fSiGe\u3078\u306e\u30af\u30e9\u30c3\u30af\u767a\u751f\u306e\u6291\u5236
\u9577\u5c3e \u512a\u5e0c\u3001\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[24a-P12-2]
\u9ad8\u79fb\u52d5\u5ea6\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u306b\u5411\u3051\u305fSi(111)\u4e0aSiGe\u30d0\u30c3\u30d5\u30a1\u30fc\u306e\u5f62\u6210\u3068\u30af\u30e9\u30c3\u30af\u767a\u751f\u6291\u5236
\u5409\u7530 \u96c4\u4e00\u3001\u6b66\u4e95 \u723d\u4e00\u90ce\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[24a-P12-3]
\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u624b\u6cd5\u306b\u3088\u3063\u3066\u5f62\u6210\u3057\u305f\u6b6a\u307f SiGe \u5c64\u5185\u3078\u306e\u30af\u30e9\u30c3\u30af\u767a\u751f\u306b\u5bfe\u3059\u308b\u71b1\u51e6\u7406\u306e\u5f71\u97ff
\u65b0\u4e95 \u8056\u96c5\u3001\u9577\u5c3e \u512a\u5e0c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[24p-21B-5]
SiGe\u8d85\u8584\u819c\u754c\u9762\u3068\u30d5\u30a9\u30ce\u30cb\u30c3\u30af\u7d50\u6676\u30ca\u30ce\u69cb\u9020\u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u306e\u4f4e\u71b1\u4f1d\u5c0e\u7387\u5316
\u67f3\u6fa4 \u4eae\u4eba\u3001\u5c0f\u6c60 \u58ee\u592a\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u91ce\u6751 \u653f\u5b8f<\/p>\n\n\n\n

\u7b2c84\u56de\u3000\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a \u718a\u672c\u57ce\u30db\u30fc\u30eb \u30002023\u5e749\u6708<\/strong><\/p>\n\n\n\n

[22p-P03-2]
Ge-on-SOI\u3092\u7528\u3044\u305f\u5b8c\u5168\u6d6e\u904a\u578b\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u306e\u4f5c\u88fd
\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u9577\u5c3e \u512a\u5e0c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[22p-P03-4]
\u30ec\u30fc\u30b6\u30fc\u30de\u30fc\u30ab\u3092\u7528\u3044\u305fGe-on-Insulator(111)\u306e\u4f5c\u88fd\u3068\u6b6a\u307fSiGe\u518d\u6210\u9577
\u6afb\u4e95 \u512a\u4e00\u3001\u9ad8\u677e \u6d77\u5915\u3001\u4f50\u91ce \u6c50\u3001\u91d1\u6fa4 \u4f36\u59481\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[22p-P03-5]
Ge-on-Insulator (100)\u4e0a\u306eSiGe\/Ge\u591a\u91cd\u91cf\u5b50\u4e95\u6238\u306e\u4f5c\u88fd\u3068\u7d50\u6676\u6027\u304a\u3088\u3073\u5149\u5b66\u7279\u6027\u8a55\u4fa1
\u4f50\u91ce \u6c50\u97f3\u3001\u91d1\u6fa4 \u601c\u5948\u3001\u6afb\u4e95 \u512a\u4e00\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[23p-A602-5]
Al2O3\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u306b\u3088\u308bGe\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u304b\u3089\u306e\u767a\u5149\u5f37\u5ea6\u5897\u5927
\u4e95\u4e0a \u8cb4\u88d5\u3001\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u9577\u5c3e \u512a\u5e0c\u3001\u5c45\u85e4 \u667a\u9df9\u3001\u5409\u5ddd \u4fee\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[23p-A602-6]
Ge-on-Si(111)\u4e0a\u306e\u6b6a\u307fSiGe\/Ge\u591a\u91cd\u91cf\u5b50\u4e95\u6238\u5f62\u6210\u306b\u304a\u3051\u308b\u81e8\u754c\u819c\u539a\u306e\u5897\u52a0\u3068\u30af\u30e9\u30c3\u30af\u767a\u751f\u306e\u6291\u5236
\u91d1\u6fa4 \u4f36\u5948\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u829d\u539f \u5915\u590f\u3001\u6211\u59bb \u52c7\u54c9\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[23p-A602-8]
\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u3092\u65bd\u3057\u305f Si(111)\u4e0a\u3078\u306e\u6b6a\u307f SiGe\/Ge \u306e\u4f5c\u88fd\u3068\u8a55\u4fa1
\u9577\u5c3e \u512a\u5e0c\u3001\u6211\u59bb \u52c7\u54c9\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u829d\u539f \u5915\u590f\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[22p-P03-3]
\u8d85\u97f3\u6ce2\u306b\u3088\u308b\u6b6a\u307fSiGe\/Ge-on-Si(111)\u3078\u306e\u30af\u30e9\u30c3\u30af\u767a\u751f
\u829d\u539f \u5915\u590f\u3001\u91d1\u6fa4 \u601c\u5948\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u9577\u5c3e \u512a\u5e0c\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

\u7b2c70\u56de\u3000\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a \u4e0a\u667a\u5927\u5b66\u30002023\u5e743\u6708<\/strong><\/p>\n\n\n\n

[15p-PA06-3]
Ge-on-Si(111)\u4e0a\u306e\u6b6a\u307fSiGe\/Ge\u591a\u91cd\u91cf\u5b50\u4e95\u6238\u5f62\u6210\u306b\u304a\u3051\u308b\u30af\u30e9\u30c3\u30af\u767a\u751f\u306e\u6291\u5236
\u91d1\u6fa4 \u4f36\u5948\u3001\u6211\u59bb \u52c7\u54c9\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u6749\u6d66 \u7531\u548c\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[15p-PA06-4]
Gd2O3-on-Si(111)\u4e0a\u3078\u306eSiGe\/Ge\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u5f62\u6210\u3068\u8a55\u4fa1
\u6749\u672c \u7fd4\u609f\u3001\u6211\u59bb \u52c7\u54c9\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[15a-A502-3]
\u9ad8Q\u5024\u4e2d\u8d64\u5916Si\u30de\u30a4\u30af\u30ed\u30ea\u30f3\u30b0\u5171\u632f\u5668
\u4e09\u5b85 \u62d3\u78e8\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5c0f\u6817 \u514b\u5f25\u3001\u771e\u7530 \u6cbb\u6a39<\/p>\n\n\n\n

[16p-D511-8]
\u6b6a\u307fSiGe\/Ge\u91cf\u5b50\u4e95\u6238LED\u306e\u30c0\u30a4\u30aa\u30fc\u30c9\u7279\u6027\u3068\u5ba4\u6e29EL\u767a\u5149
\u83ca\u5ca1 \u67ca\u4e5f\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6749\u6d66 \u7531\u548c\u3001\u91d1\u6fa4 \u4f36\u5948\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[16p-D511-9]
Ge-on-Insulator(111)\u69cb\u9020\u306e\u4f5c\u88fd\u306b\u304a\u3051\u308b\u30ec\u30fc\u30b6\u30fc\u30de\u30fc\u30ab\u3092\u7528\u3044\u305f\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8\u5411\u4e0a\u306e\u52b9\u679c
\u9ad8\u677e \u6d77\u5915\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6afb\u4e95 \u512a\u4e00\u3001\u4f50\u91ce \u6c50\u97f3\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[16p-D511-4]
\u5f37\u78c1\u6027\u30db\u30a4\u30b9\u30e9\u30fc\u5408\u91d1Co2FeSi\u4e0a\u3078\u306eGe\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u306b\u304a\u3051\u308bSn\u6dfb\u52a0\u306e\u52b9\u679c
\u6960\u672c \u4fee\u5e73\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u5c71\u7530 \u6566\u4e5f\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6d5c\u5c4b \u5b8f\u5e73<\/p>\n\n\n\n

\u7b2c83\u56de\u3000\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u6771\u5317\u5b66\u9662\u30002022\u5e749\u6708<\/strong><\/p>\n\n\n\n

[22p-P06-1]
Ge-on-SOI\u4e0a\u306e\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u306e\u4f5c\u88fd\u3068\u5f37\u3044\u5171\u632f\u767a\u5149\u306e\u89b3\u6e2c
\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6c60\u30f6\u8c37 \u73b2\u96c4\u3001\u9577\u5c3e \u512a\u5e0c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[21p-A106-4]
\u6b6a\u307f SiGe\/Ge(111)\u306b\u767a\u751f\u3057\u305f\u30af\u30e9\u30c3\u30af\u306e TEM \u89b3\u5bdf
\u7530\u5cf6 \u6ec9\u592a\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u6709\u5143 \u572d\u4ecb\u3001\u539f \u5eb7\u7950\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[21p-A106-5]
\u6b6a\u307fSiGe\/Ge(111)\u306b\u304a\u3051\u308b\u30af\u30e9\u30c3\u30af\u4f1d\u642c\u306b\u4e0e\u3048\u308b\u30e1\u30b5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0\u6df1\u3055\u306e\u5f71\u97ff
\u6211\u59bb \u52c7\u54c9\u3001\u91d1\u6fa4 \u4f36\u5948\u3001Md. Mahfuz Alam\u3001\u5ca1\u7530 \u548c\u4e5f\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[21p-A106-6]
Ge-on-Si(111)\u4e0a\u306b\u6210\u9577\u3057\u305f\u6b6a\u307fSiGe\u5c64\u306e\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027\u306b\u4e0e\u3048\u308b\u30af\u30e9\u30c3\u30af\u767a\u751f\u306e\u5f71\u97ff
\u5e02\u5ddd \u5927\u609f\u3001\u6211\u59bb \u52c7\u54c9\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[21p-A106-8]
Ge-on-Si (110)\u3092\u7528\u3044\u305f\u679d\u578b\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u4f5c\u88fd\u306b\u3088\u308b\u5171\u632f\u767a\u5149\u306e\u89b3\u6e2c
\u4e95\u4e0a \u8cb4\u88d5\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6c60\u30f6\u8c37 \u73b2\u96c4\u3001\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u9577\u5c3e \u512a\u5e0c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[21p-A106-9]
\u4e8c\u8ef8\u6b6a\u307fGe\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u306e\u767a\u5149\u7279\u6027\u306b\u304a\u3051\u308b\u30b9\u30ea\u30c3\u30c8\u5c0e\u5165\u306e\u52b9\u679c
\u99d2\u6fa4 \u5353\u54c9\u3001\u6c60\u30f6\u8c37 \u73b2\u96c4\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[21p-A106-10]
\u6b6a\u307fSiGe\/Ge-on-Si(111)LED\u304b\u3089\u306e\u5f37\u3044\u5ba4\u6e29EL\u767a\u5149\u306e\u89b3\u6e2c
\u83ca\u5ca1 \u67ca\u4e5f\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6749\u6d66 \u7531\u548c\u3001\u91d1\u6fa4 \u4f36\u5948\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[21p-A106-11]
Ge-on-Si(100)\u4e0a\u306eSiGe\/Ge\u591a\u91cd\u91cf\u5b50\u4e95\u6238\u306e\u4f5c\u88fd\u3068\u305d\u306e\u5149\u5b66\u7279\u6027
\u91d1\u6fa4 \u4f36\u5948\u3001\u6211\u59bb \u52c7\u54c9\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u6749\u6d66 \u7531\u548c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[22p-P11-1]
\u968e\u5c64\u7684\u30ca\u30ce\u591a\u5b54\u5c64\u30ac\u30e9\u30b9\u57fa\u677f\u3092\u7528\u3044\u305fP\u30c9\u30fc\u30d7Ge\u30ca\u30ce\u7d50\u6676\u306e\u5f62\u6210\u3068\u767a\u5149\u7279\u6027
\u9577\u5c3e \u512a\u5e0c\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u5c0f\u7530\u5cf6 \u7dbe\u83ef\u3001\u6211\u59bb \u52c7\u54c9\u3001\u85e4\u9593 \u5353\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[22p-P11-2]
\u30e1\u30c3\u30b7\u30e5\u578b\u30d1\u30c3\u30c9\u3092\u6709\u3059\u308b\u6b6a\u307fGe\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u306e\u767a\u5149\u7279\u6027\u306b\u30db\u30fc\u30eb\u30b5\u30a4\u30ba\u304c\u4e0e\u3048\u308b\u5f71\u97ff
\u6c60\u30f6\u8c37 \u73b2\u96c4\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u99d2\u6fa4 \u5353\u54c9\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[22p-P11-3]
Ge-on-Si(111) LED\u304b\u3089\u306e\u5ba4\u6e29EL\u767a\u5149\u30d4\u30fc\u30af\u306b\u6ce8\u5165\u96fb\u6d41\u304c\u4e0e\u3048\u308b\u5f71\u97ff
\u6749\u6d66 \u7531\u548c\u3001\u83ca\u5ca1 \u67ca\u4e5f\u3001\u6211\u59bb \u52c7\u54c9\u3001\u91d1\u6fa4 \u73b2\u5948\u3001\u661f \u88d5\u4ecb\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[20a-C202-3]
\u6b6a\u307f\u5370\u52a0\u534a\u5c0e\u4f53\u8584\u819c\u306e\u30d8\u30c6\u30ed\u6210\u9577\u306b\u304a\u3051\u308b\u30af\u30e9\u30c3\u30af\u767a\u751f\u3068\u305d\u306e\u6291\u5236\u30e1\u30ab\u30cb\u30ba\u30e0
\u6211\u59bb \u52c7\u54c9\u3001\u91d1\u6fa4 \u4f36\u5948\u3001Md. Mahfuz Alam\u3001\u5ca1\u7530 \u548c\u4e5f\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

\u7b2c69\u56de\u3000\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u9752\u5c71\u5b66\u9662\u30002022\u5e743\u6708<\/strong><\/p>\n\n\n\n

[26a-P05-3]
\u30e1\u30b5\u30d1\u30bf\u30fc\u30f3\u4e0a\u306e\u6b6a\u307fSiGe\u819c\u3078\u306e\u30af\u30e9\u30c3\u30af\u767a\u751f\u306b\u304a\u3051\u308b\u30a8\u30c3\u30c1\u30f3\u30b0\u6df1\u3055\u306e\u5f71\u97ff
\u6211\u59bb \u52c7\u54c9\u3001Md. Mahfuz Alam\u3001\u5ca1\u7530 \u548c\u4e5f\u3001\u91d1\u6fa4\u4f36\u5948\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[26a-P05-4]
Ge\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u4e0a\u3078\u306e\u6b6a\u307fSiGe\u6210\u9577\u3068\u767a\u5149\u7279\u6027
\u4e95\u4e0a \u8cb4\u88d5\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6c60\u30f6\u8c37 \u73b2\u96c4\u3001\u5ca1\u7530 \u548c\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[23p-E205-10]
Long-distance spin-drift transport in strained SiGe
Takahiro Naito\u3001Kazuaki Kawashima\u3001Michihiro Yamada\u3001Youya Wagatsuma\u3001Shinya Yamada\u3001Kentarou Sawano\u3001Kohei Hamaya<\/p>\n\n\n\n

[22a-E203-4]
hBN\/MoS2\u7a4d\u5c64\u69cb\u9020\u3092\u5229\u7528\u3057\u305f\u30ca\u30ce\u6a5f\u68b0\u5171\u632f\u5668\u306e\u96fb\u6c17\u6a5f\u68b0\u7279\u6027
\u5343\u8449 \u30ab\u30eb\u30d3\u30f3 \u5065\u4eba\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6e21\u908a \u8ce2\u53f8\u3001\u8c37\u53e3 \u5c1a\u3001\u85e4\u7530 \u535a\u4e4b\u3001\u661f \u88d5\u4ecb<\/p>\n\n\n\n

[25p-D114-1]
\u7e26\u578b\u534a\u5c0e\u4f53\u30b9\u30d4\u30f3\u7d20\u5b50\u3092\u76ee\u6307\u3057\u305fCo2FeSi\u4e0a\u306e\u9ad8\u54c1\u8ceaGe\u6210\u9577\u3068\u5ba4\u6e29\u78c1\u6c17\u62b5\u6297\u6bd4\u306e\u5897\u5927
\u5c71\u7530 \u6566\u4e5f\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u5c71\u7530 \u664b\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6d5c\u5c4b \u5b8f\u5e73
[25p-D114-16]
\u6b6a\u307fSi\/\u7de9\u548c SiGe\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020p-MOSFET\u306e\u9ad8\u6b63\u5b54\u79fb\u52d5\u5ea6\u5316\u3068\u30ea\u30fc\u30af\u96fb\u6d41\u306e\u4f4e\u6e1b
\u85e4\u6fa4 \u6cf0\u8f14\u3001\u5404\u5ddd \u6566\u53f2\u3001\u5800\u5185 \u672a\u5e0c\u3001\u5742\u7530 \u5343\u5c0b\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u539f \u5eb7\u7950\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u6709\u5143 \u572d\u4ecb<\/p>\n\n\n\n

\u7b2c82\u56de\u3000\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u30aa\u30f3\u30e9\u30a4\u30f3\u958b\u50ac\u30002021\u5e749\u6708<\/strong><\/p>\n\n\n\n

[10p-N202-3]
\u6b6a\u307fSiGe\/Ge(111)\u306b\u304a\u3051\u308b\u30af\u30e9\u30c3\u30af\u5f62\u6210\u3068\u4f1d\u642c\u65b9\u5411\u5236\u5fa1
\u6211\u59bb \u52c7\u54c9\u3001Md. Mahfuz Alam\u3001\u5ca1\u7530 \u548c\u4e5f\u3001\u91d1\u6fa4\u4f36\u5948\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[10p-N202-9]
\u6b6a\u307f\u7de9\u548cSiGe\/Si(111)\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306e\u4f5c\u88fd\u3068\u30a2\u30cb\u30fc\u30eb\u306e\u52b9\u679c
\u5ca1\u7530 \u548c\u4e5f\u3001\u6211\u59bb \u52c7\u54c9\u3001\u5c71\u7530 \u822a\u5927\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[10p-N202-12]
\u6b6a\u307fGe\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u306b\u304a\u3051\u308b\u7aef\u9762\u5171\u632f\u767a\u5149\u306e\u89b3\u6e2c
\u4e95\u4e0a \u8cb4\u88d5\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6c60\u30f6\u8c37 \u73b2\u96c4\u3001\u5ca1\u7530 \u548c\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[10p-N202-5]
Ge-on-Si(111)LED\u306e\u71b1\u51e6\u7406\u306b\u3088\u308b\u5ba4\u6e29EL\u767a\u5149\u5f37\u5ea6\u5897\u5927
\u6749\u6d66 \u7531\u548c \u3001\u4f50\u3005\u6728 \u96c5\u81f3\u3001\u6211\u59bb \u52c7\u54c9\u3001\u5c71\u7530 \u822a\u5927 \u3001\u661f \u88d5\u4ecb\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[10p-N202-6]
Ge-on-Si(100) p-i-n\u30c0\u30a4\u30aa\u30fc\u30c9\u306e\u5ba4\u6e29 EL \u767a\u5149\u306b\u304a\u3051\u308b i-Ge \u5c64\u819c\u539a\u306e\u5f71\u97ff
\u4f50\u3005\u6728 \u96c5\u81f3\u3001\u6749\u6d66 \u7531\u548c\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5c71\u7530 \u822a\u5927<\/p>\n\n\n\n

[10p-N202-13]
\u30e1\u30c3\u30b7\u30e5\u578b\u30d1\u30c3\u30c9\u3092\u6709\u3059\u308b\u6b6a\u307fGe\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u69cb\u9020\u306e\u4f5c\u88fd\u3068\u767a\u5149\u7279\u6027
\u6c60\u30f6\u8c37 \u73b2\u96c4\u3001\u4e95\u4e0a \u8cb4\u88d5\u3001\u4f50\u3005\u6728\u96c5\u81f3\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[10p-N202-17]
\u7e26\u578b\u534a\u5c0e\u4f53\u30b9\u30d4\u30f3\u7d20\u5b50\u306e\u305f\u3081\u306e\u5358\u7d50\u6676Co2FeSi\u4e0aGe \u8584\u819c\u306e\u9ad8\u54c1\u8cea\u5316
\u5c71\u7530 \u6566\u4e5f\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u5c71\u7530 \u664b\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6d5c\u5c4b \u5b8f\u5e73<\/p>\n\n\n\n

\u7b2c68\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u30aa\u30f3\u30e9\u30a4\u30f3 2021\u5e74 3\u6708<\/p>\n\n\n\n

[17p-Z33-1]
n-situ\u30c9\u30fc\u30d4\u30f3\u30b0\u5236\u5fa1\u306b\u3088\u308bGe-on-Si\u304b\u3089\u306e\u5ba4\u6e29EL\u767a\u5149
\u5c71\u7530 \u822a\u5927\u3001\u661f \u88d5\u4ecb\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[17a-Z17-6]
\u6b6a\u30fb\u7d44\u6210\u5236\u5fa1\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30ebSiGe\u8584\u819c\u306e\u71b1\u96fb\u7279\u6027
\u8c37\u53e3 \u9054\u5f66\u3001\u77f3\u90e8 \u8cb4\u53f2\u3001\u6211\u59bb \u52c7\u54c9\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5c71\u4e0b \u96c4\u4e00\u90ce\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[16a-Z10-9]
\u9ad8Q\u5024\u4e2d\u8d64\u5916Si\u30de\u30a4\u30af\u30ed\u30c7\u30a3\u30b9\u30af\u5171\u632f\u5668
\u4e09\u5b85 \u62d3\u78e8\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f\u3001\u4ff5 \u6bc5\u5f66\u3001\u5f8c\u85e4 \u79c0\u6a39<\/p>\n\n\n\n

[16p-P02-2]
\u6b6a\u307fGe\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u69cb\u9020\u306e\u767a\u5149\u7279\u6027\u306b\u53ca\u307c\u3059\u4e00\u8ef8\u6b6a\u307f\u65b9\u5411\u306e\u5f71\u97ff
\u4e95\u4e0a \u8cb4\u88d5\u3001\u6211\u59bb \u52c7\u54c9\u3001\u5c71\u7530 \u822a\u5927\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[18p-Z31-13]
\u4e8c\u30c6\u30eb\u30eb\u5316\u30e2\u30ea\u30d6\u30c7\u30f3\u306ehBN\u5c01\u6b62\u69cb\u9020\u306b\u304a\u3051\u308b\u71b1\u5b89\u5b9a\u6027
\u6797\u7530 \u96bc\u5f25\u3001\u91ce\u4e0a\u7530 \u8056\u3001\u6e21\u908a \u8ce2\u53f8\u3001\u8c37\u53e3 \u5c1a\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u661f \u88d5\u4ecb<\/p>\n\n\n\n

[16p-P02-4]
Ge\u57fa\u677f\u306b\u66ff\u308f\u308aGe-on-Si\u3092\u7528\u3044\u308b\u3053\u3068\u306b\u3088\u308b\u6b6a\u307fSiGe\u3078\u306e\u30af\u30e9\u30c3\u30af\u767a\u751f\u6291\u5236
\u6211\u59bb \u52c7\u54c9\u3001Md. Mahfuz Alam\u3001\u5ca1\u7530 \u548c\u4e5f\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[16p-P02-3]
\u6b6a\u307fGe-on-Si(111)\u30c0\u30a4\u30aa\u30fc\u30c9\u69cb\u9020\u304b\u3089\u306e\u5ba4\u6e29EL\u767a\u5149
\u6749\u6d66 \u7531\u548c\u3001\u6211\u59bb \u52c7\u54c9\u3001\u5c71\u7530 \u822a\u5927\u3001\u661f \u7950\u4ecb\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

\u7b2c81\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u30aa\u30f3\u30e9\u30a4\u30f3\u30002020\u5e749\u6708<\/strong><\/p>\n\n\n\n

[9p-Z12-17]
In-situ\u30c9\u30fc\u30d4\u30f3\u30b0\u5236\u5fa1\u306b\u3088\u308bGe-on-Si\u304b\u3089\u306e\u5ba4\u6e29EL\u767a\u5149
\u5c71\u7530 \u822a\u5927\u3001\u661f \u88d5\u4ecb\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[10a-Z29-9]
\u30a4\u30aa\u30f3\u6ce8\u5165\u3068\u71b1\u51e6\u7406\u306b\u3088\u308b\u91d1\u5c5e\u76f8MoTe2\u306e\u5f62\u6210
\u91ce\u4e0a\u7530 \u8056\u3001\u6797\u7530 \u96bc\u5f25\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u661f \u88d5\u4ecb<\/p>\n\n\n\n

[8p-Z18-7]
\u71b1\u96fb\u51fa\u529b\u56e0\u5b50\u5897\u5927\u306b\u5411\u3051\u305f\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30ebCoSi2\u30ca\u30ce\u30c9\u30c3\u30c8\u542b\u6709SiGe\u8584\u819c\u306e\u958b\u767a
\u7d30\u7530 \u51cc\u77e2\u3001\u6c34\u7530 \u5149\u661f\u3001\u77f3\u90e8 \u8cb4\u53f2\u3001Md. Mahfuz Alam\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[11a-Z29-6]
\u71b1\u51e6\u7406\u306b\u3088\u308bhBN\/\u5358\u5c64MoTe2\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u754c\u9762\u4e0d\u7d14\u7269\u9664\u53bb
\u6797\u7530 \u96bc\u5f25\u3001\u6e21\u908a \u8ce2\u53f8\u3001\u8c37\u53e3 \u5c1a\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u661f \u88d5\u4ecb<\/p>\n\n\n\n

[9p-Z12-14]
\u9078\u629e\u6210\u9577\u3092\u7528\u3044\u305fGe-on-Si(111)\u57fa\u677f\u4e0a\u3078\u306e\u9ad8\u54c1\u8cea\u306a\u6b6a\u307fSiGe\u5c64\u306e\u4f5c\u88fd
\u6211\u59bb \u52c7\u54c9\u3001Md. Mahfuz Alam\u3001\u5ca1\u7530 \u548c\u4e5f\u3001\u661f \u88d5\u4ecb\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[9p-Z12-18]
\u6b6a\u307fSi\/\u7de9\u548cSiGe\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020p-MOSFET\u306b\u304a\u3051\u308b\u6b63\u5b54\u79fb\u52d5\u5ea6\u306e\u30c1\u30e3\u30cd\u30eb\u65b9\u5411\u4f9d\u5b58\u6027
\u85e4\u6fa4 \u6cf0\u8f14\u3001\u5404\u5ddd \u6566\u53f2\u3001\u6d6a\u5185 \u5927\u5730\u3001\u4f50\u91ce \u96c4\u4e00\u3001\u6cc9 \u5927\u8f14\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u539f \u5eb7\u7950\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u6709\u5143 \u572d\u4ecb<\/p>\n\n\n\n

\u7b2c67\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u4e0a\u667a\u5927\u5b66\u3000\u6771\u4eac\u30002020\u5e74 3\u6708<\/strong><\/p>\n\n\n\n

[12p-D519-8]
GOI\u57fa\u677f\u4f5c\u88fd\u306b\u304a\u3051\u308b\u8cbc\u308a\u5408\u308f\u305b\u5f8c\u71b1\u51e6\u7406\u306e\u5f71\u97ff
\u67f4\u7530 \u7fd4\u543e\u3001\u77f3\u5ddd \u4eae\u4f51\u3001\u661f \u88d5\u4ecb\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[14a-A404-4]
\u5358\u5c64MoTe2\u306ehBN\u5c01\u6b62\u69cb\u9020\u306b\u304a\u3051\u308b\u71b1\u51e6\u7406\u306b\u3088\u308b\u5149\u5b66\u7279\u6027\u3078\u306e\u5f71\u97ff
\u6797\u7530 \u96bc\u5f25\u3001\u9f4b\u85e4 \u68a8\u6c99\u3001\u6e21\u908a \u8ce2\u53f8\u3001\u8c37\u53e3 \u5c1a\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u661f \u88d5\u4ecb<\/p>\n\n\n\n

[13a-D511-5]
Si-rich SiGe\/Si\u8d85\u683c\u5b50\u306b\u304a\u3051\u308b\u9ad8\u71b1\u96fb\u51fa\u529b\u56e0\u5b50\u306e\u8981\u56e0
\u8c37\u53e3 \u9054\u5f66\u3001\u77f3\u90e8 \u8cb4\u53f2\u3001Md. Mahfuz Alam\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[12p-D519-6]
Ge-on-Si\u57fa\u677f\u306e\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u306b\u3088\u308b\u6b6a\u307fSiGe\u5c64\u4e2d\u30af\u30e9\u30c3\u30af\u767a\u751f\u306e\u6291\u5236
\u6211\u59bb \u52c7\u54c9\u3001Md. Mahfuz Alam\u3001\u5ca1\u7530 \u548c\u4e5f\u3001\u661f \u88d5\u4ecb\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[13a-D511-6]
\u30ca\u30ce\u69cb\u9020\u5316Si\u8584\u819c\u306b\u304a\u3051\u308b\u69cb\u9020\u5236\u5fa1\u306b\u3088\u308b\u9ad8\u71b1\u96fb\u6027\u80fd\u5316
\u5742\u6839 \u99ff\u4e5f\u3001\u77f3\u90e8 \u8cb4\u53f2\u3001\u6210\u702c \u5ef6\u5eb7\u3001\u76ee\u826f \u88d5\u3001Alam Md. Mahfuz\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

\u7b2c80\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u5317\u6d77\u9053\u5927\u5b66\u3000\u672d\u5e4c\u30002019\u5e749\u6708<\/strong><\/p>\n\n\n\n

[19p-E313-7]
In-situ \u30c9\u30fc\u30d7\u306b\u3088\u308b Ge-on-Si(111)\u306e n \u578b\u4f1d\u5c0e\u5236\u5fa1
\u6c34\u53e3 \u4fca\u5e0c\u3001\u5927\u5cf6 \u4fee\u4e00\u90ce\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[19p-E313-6]
P \u30c9\u30fc\u30d7 Ge-on-Si \u306b\u304a\u3051\u308b\u62e1\u6563\u30b9\u30c8\u30c3\u30d7\u5c64\u633f\u5165\u306e\u52b9\u679c
\u5c71\u7530 \u822a\u5927\u3001\u718a\u6fa4 \u88d5\u592a\u3001\u4e38\u6cc9 \u7422\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[18p-PA2-1]
\u30ca\u30ce\u591a\u5b54\u5c64\u30ac\u30e9\u30b9\u57fa\u677f\u3092\u5229\u7528\u3057\u305fGe\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u4f5c\u88fd
\u77f3\u4e95 \u5927\u4ecb\u3001\u4e0b\u7530 \u9ebb\u7531\u3001\u4f0a\u85e4 \u5320\u3001\u661f \u88d5\u4ecb\u3001\u85e4\u9593 \u5353\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[18a-PA5-3]
\u30b5\u30d6\u6ce2\u9577\u683c\u5b50\u69cb\u9020\u3092\u6709\u3059\u308bSi\u4e2d\u8d64\u5916\u5c0e\u6ce2\u8def
\u5927\u8feb \u529b\u4eba\u3001\u5f90 \u5b66\u4fca\u3001\u5fe0\u6c38 \u4fee\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f\u3001\u4ff5 \u6bc5\u5f66\u3001\u5f8c\u85e4 \u79c0\u6a39<\/p>\n\n\n\n

[19p-E307-7]
\u6b20\u9665\u5236\u5fa1\u306b\u3088\u308b\u30ca\u30ce\u7d50\u6676\u542b\u6709Si\u8584\u819c\u306e\u71b1\u96fb\u7279\u6027\u6539\u5584
\u5742\u6839 \u99ff\u4e5f\u3001\u77f3\u90e8 \u8cb4\u53f2\u3001\u6210\u702c \u5ef6\u5eb7\u3001\u76ee\u826f \u88d5\u3001Md. Mahfuz Alam\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[21p-E201-7]
hBN\/1L-WSe2\/hBN\u69cb\u9020\u306e\u5149\u53d6\u308a\u51fa\u3057\u52b9\u7387\u306e\u6539\u5584
\u6797\u7530 \u96bc\u5f25\u3001\u6e21\u908a \u8ce2\u53f8\u3001\u8c37\u53e3 \u5c1a\u3001\u5897\u6e15 \u899a\u3001\u5b88\u8c37 \u983c\u3001\u753a\u7530 \u53cb\u6a39\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u661f \u88d5\u4ecb<\/p>\n\n\n\n

[19p-E313-4]
Ge-on-Si(111) \u53ca\u3073Ge(111) \u57fa\u677f\u4e0a\u306e\u6b6a\u307fSi1-xGex\u306e\u81e8\u754c\u819c\u539a
\u6211\u59bb \u52c7\u54c9\u3001Md. Mahfuz Alam\u3001\u5ca1\u7530 \u548c\u4e5f\u3001\u661f \u88d5\u4ecb\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[19p-E313-9]
\u6b6a\u307fSi\/\u7de9\u548cSiGe\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020p-MOSFET\u306b\u304a\u3051\u308b\u96fb\u754c\u52b9\u679c\u79fb\u52d5\u5ea6\u306e\u6b6a\u307fSi\u819c\u539a\u4f9d\u5b58\u6027
\u85e4\u6fa4 \u6cf0\u8f14\u3001\u5404\u5ddd \u6566\u53f2\u3001\u6d6a\u5185 \u5927\u5730\u3001\u658e\u85e4 \u614e\u543e\u3001\u4f50\u91ce \u96c4\u4e00\u3001\u6cc9 \u5927\u8f14\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u539f \u5eb7\u7950\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u6709\u5143 \u572d\u4ecb<\/p>\n\n\n\n

[19p-E313-8]
\u6b6a\u307fSi\/\u7de9\u548cSiGe\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u53cd\u8ee2\u30ad\u30e3\u30ea\u30a2\u306eHall\u79fb\u52d5\u5ea6\u8a55\u4fa1
\u6d6a\u5185 \u5927\u5730\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5404\u5ddd \u6566\u53f2\u3001\u4f50\u91ce \u96c4\u4e00\u3001\u6cc9 \u5927\u8f14\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u539f \u5eb7\u7950\u3001\u4e2d\u5ddd \u6e05\u548c<\/p>\n\n\n\n

\u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u6771\u4eac\u5de5\u696d\u5927\u5b66\u30002019\u5e743\u6708<\/strong><\/p>\n\n\n\n

[12p-M113-9]
\u30ac\u30e9\u30b9\u4e0a\u3078\u306eGe\u8cbc\u308a\u5408\u308f\u305b\u306b\u304a\u3051\u308b\u754c\u9762\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u5c64\u633f\u5165\u306e\u52b9\u679c
\u5c0f\u91ce \u8cb4\u53f21\u3001\u9ad8\u85e4 \u88d51\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[9p-W371-3]
\u6e29\u5ea6\u3068\u7d44\u6210\u306b\u4f9d\u5b58\u3059\u308bSi1-xGex\u30ca\u30ce\u30ef\u30a4\u30e4\u4e2d\u306e\u6e96\u5f3e\u9053\u7684\u71b1\u8f38\u9001
\u5ca1\u672c \u6602\u3001\u67f3\u6fa4 \u4eae\u4eba\u3001\u30de\u30cf\u30d5\u30fc\u30ba \u30a2\u30e9\u30e0\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u9ed2\u6fa4 \u660c\u5fd7\u3001\u91ce\u6751 \u653f\u5b8f<\/p>\n\n\n\n

[10a-W351-4]
\u9ad8\u51fa\u529b\u56e0\u5b50Si-rich SiGe\/Si\u8d85\u683c\u5b50\u306b\u304a\u3051\u308b\u66f4\u306a\u308b\u4f4e\u71b1\u4f1d\u5c0e\u7387\u5316
\u8c37\u53e3 \u9054\u5f66\u3001\u77f3\u90e8 \u8cb4\u53f2\u3001Md. Mahfuz Alam\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[12a-PB3-3]
\u6c34\u7d20\u30e9\u30b8\u30ab\u30eb\u52a0\u71b1\u3092\u7528\u3044\u305f\u30ac\u30e9\u30b9\u57fa\u677f\u4e0aPoly-Si\u5f62\u6210\u6280\u8853\u958b\u767a
\u4e2d\u5bb6 \u5927\u5e0c1\u3001\u658e\u85e4 \u614e\u543e1\u3001\u8352\u4e95 \u54f2\u53f81\u3001\u4e0a\u6751 \u548c\u8cb41\u3001\u6709\u5143 \u572d\u4ecb1\u3001\u539f \u5eb7\u79501\u3001\u5c71\u4e2d \u6df3\u4e8c1\u3001\u4e2d\u5ddd \u6e05\u548c1\u3001\u9ad8\u677e \u5229\u884c2\u3001\u6fa4\u91ce \u61b2\u592a\u90ce3<\/p>\n\n\n\n

\u7b2c79\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\u3000\u540d\u53e4\u5c4b\u30002018\u5e749\u6708<\/strong><\/p>\n\n\n\n

[20p-234B-6]
\u4f4e\u6e29\u306b\u304a\u3051\u308bSiGe\u30ca\u30ce\u30ef\u30a4\u30e4\u30fc\u4e2d\u306e\u71b1\u8f38\u9001\u306b\u95a2\u3059\u308b\u8003\u5bdf
\u5ca1\u672c \u6602\u3001\u67f3\u6fa4 \u4eae\u4eba\u3001\u30a2\u30e9\u30e0 \u30de\u30cf\u30d5\u30fc\u30ba\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u91ce\u6751 \u653f\u5b8f<\/p>\n\n\n\n

[19p-PB7-1]
\u9078\u629e\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u7528\u3044\u305f\u6b6a\u307fSiGe(111)-On-Insulator\u57fa\u677f\u306e\u4f5c\u88fd
\u5927\u5cf6 \u4fee\u4e00\u90ce\u3001\u5742\u672c \u512a\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[18p-235-9]
Ge\u91cf\u5b50\u30c9\u30c3\u30c8\u3092\u6709\u3059\u308b\u5186\u5f62DBR\u5fae\u5c0f\u5171\u632f\u5668\u69cb\u9020\u306e\u767a\u5149\u7279\u6027
\u77f3\u4e95 \u5927\u4ecb\u3001\u6c34\u8c37 \u6602\u5e73\u3001\u539f\u7530 \u6ce2\u5b50\u3001\u5f90 \u5b66\u4fca\u3001\u4e38\u6cc9 \u7422\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[18p-235-11]
\u30a6\u30a7\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u3088\u308b\u6b6a\u307fGe\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u306e\u4f5c\u88fd
\u7530\u6751 \u4eae\u8cb4\u3001\u5927\u4e45\u4fdd \u4eae\u592a\u3001\u5f90 \u5b66\u4fca\u3001\u4e38\u6cc9 \u7422\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[21p-131-1]
[\u512a\u79c0\u8ad6\u6587\u8cde\u53d7\u8cde\u8a18\u5ff5\u8b1b\u6f14] Room-temperature spin transport in n-Ge probed by four-terminal nonlocal measurements
\u5c71\u7530 \u9053\u6d0b\u3001\u585a\u539f \u8aa0\u4eba\u3001\u85e4\u7530 \u88d5\u4e00\u3001\u5185\u85e4 \u8cb4\u5927\u3001\u5c71\u7530 \u664b\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6d5c\u5c4b \u5b8f\u5e73<\/p>\n\n\n\n

[19p-PB7-3]
\u4f38\u5f35\u6b6a\u307fSi\/\u7de9\u548cSiGe\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u30b2\u30fc\u30c8\u96fb\u5727\u5370\u52a0Hall\u6e2c\u5b9a\u306b\u3088\u308b\u79fb\u52d5\u5ea6\u8a55\u4fa1
\u6d6a\u5185 \u5927\u5730\u3001\u4f50\u85e4 \u572d\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u539f \u5eb7\u7950\u3001\u4e2d\u5ddd \u6e05\u548c<\/p>\n\n\n\n

\u7b2c65\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u65e9\u7a32\u7530\u5927\u5b66\u30002018\u5e743\u6708<\/strong><\/p>\n\n\n\n

[19p-P10-1]
\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u69cb\u9020\u306b\u304a\u3051\u308bP\u30c9\u30fc\u30d7\u3092\u7528\u3044\u305f\u30d1\u30e9\u30ec\u30eb\u4f1d\u5c0e\u306e\u6291\u5236
\u6fa4\u7530 \u6d69\u4ecb\u3001\u9ad8\u58eb \u5b5d\u53f8\u3001\u30df\u30ed\u30ce\u30d5 \u30de\u30af\u30b7\u30e0\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[18a-D101-2]
\u30d8\u30c6\u30ed\u63a5\u5408\u578bSi\u592a\u967d\u96fb\u6c60\u306eElectroluminescence\u7279\u6027
\u8fd1\u85e4 \u5dba\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5e02\u5ddd \u5e78\u7f8e\u3001\u5c0f\u9577\u4e95 \u8aa0<\/p>\n\n\n\n

[20a-F214-5]
In-situ n\u578b\u30c9\u30fc\u30d7Ge-on-Si\u306b\u304a\u3051\u308b\u30dd\u30b9\u30c8\u30a2\u30cb\u30fc\u30eb\u306e\u5f71\u97ff
\u718a\u6fa4 \u7950\u592a\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[19a-B201-1]
Ge\u4e2d\u8d64\u5916\u5149\u30b0\u30ec\u30fc\u30c6\u30a3\u30f3\u30b0\u30ab\u30d7\u30e9
\u5927\u8feb \u529b\u4eba\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[19p-P10-5]
Ge(111)\u57fa\u677f\u4e0a\u306e\u6b6a\u307fSi1-xGex\u819c\u6210\u9577\u3068\u81e8\u754c\u819c\u539a\u306e\u8a55\u4fa1
\u5742\u672c \u512a\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[19p-P10-6]
MBE\u3068ALD\u306b\u3088\u308bAl2O3\/\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u69cb\u9020\u306e\u5f62\u6210\u3068\u96fb\u6c17\u7279\u6027\u8a55\u4fa1
\u4f50\u85e4 \u6176\u6b21\u90ce\u3001\u7e41\u6fa4 \u3048\u308a\u5b50\u3001\u5ca9\u6c38 \u6d0b\u6597\u3001\u30de\u30af\u30b7\u30e0 \u30df\u30ed\u30ce\u30d5\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[20p-C304-8]
SiGe\u30ca\u30ce\u30ef\u30a4\u30e4\u30fc\u306b\u304a\u3051\u308b\u5f3e\u9053\u7684\u71b1\u8f38\u9001
\u5ca1\u672c \u6602\u3001\u67f3\u6fa4 \u4eae\u4eba\u3001\u30a2\u30e9\u30e0 \u30de\u30cf\u30d5\u30fc\u30ba\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u91ce\u6751 \u653f\u5b8f<\/p>\n\n\n\n

[19a-G203-6]
Room-temperature spin transport in n-Ge probed by four-terminal nonlocal measurements
\u5c71\u7530 \u9053\u6d0b\u3001\u585a\u539f \u8aa0\u4eba\u3001\u85e4\u7530 \u7950\u4e00\u3001\u5185\u85e4 \u8cb4\u5927\u3001\u5c71\u7530 \u664b\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6d5c\u5c4b \u5b8f\u5e73<\/p>\n\n\n\n

[17a-F102-10]
\u30ca\u30ce\u69cb\u9020\u5316Si \u8584\u819c\u306b\u304a\u3051\u308b\u51fa\u529b\u56e0\u5b50\u6c7a\u5b9a\u6a5f\u69cb
\u5742\u6839 \u99ff\u4e5f, \u6e21\u8fba \u5065\u592a\u90ce, \u6210\u702c \u5ef6\u5eb7, Md. Mahfuz Alam, \u6fa4\u91ce \u61b2\u592a\u90ce, \u68ee \u4f38\u4e5f, \u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[17a-F102-9]
\u754c\u9762\u5236\u5fa1\u306b\u3088\u308bSi\/SiGe\u8d85\u683c\u5b50\u306e\u51fa\u529b\u56e0\u5b50\u64cd\u4f5c
\u8c37\u53e3 \u9054\u5f66\uff0c\u6e21\u8fba \u5065\u592a\u90ce\uff0cMd. Mahfuz Alam, \u6fa4\u91ce \u61b2\u592a\u90ce\uff0c\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

\u7b2c78\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u798f\u5ca1\u56fd\u969b\u4f1a\u8b70\u5834\u3000\u798f\u5ca1\u30002017\u5e749\u6708<\/strong><\/p>\n\n\n\n

[8p-C19-4]
\u4e8c\u6bb5\u968e\u6210\u9577\u6cd5\u3092\u7528\u3044\u305fSi(110)\u57fa\u677f\u4e0aGe\u5c64\u306e\u4f5c\u88fd\u3068\u8a55\u4fa1
\u5927\u6728 \u5065\u53f8\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[6a-PA9-1]
\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30ebGe\u4e0a\u306e\u76f4\u63a5ALD\u306b\u3088\u308bAl2O3\u5c64\u306e\u5f62\u6210\u3068\u8a55\u4fa1
\u7e41\u6fa4 \u3048\u308a\u5b50\u3001\u4f50\u91ce \u826f\u4ecb\u3001\u6c60\u4e0a \u548c\u5f66\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u91ce\u5e73 \u535a\u53f8<\/p>\n\n\n\n

[5p-A503-5]
\u30ca\u30ce\u30c9\u30c3\u30c8\u542b\u6709Si\u8584\u819c\u306e\u71b1\u96fb\u7279\u6027\u306b\u4e0e\u3048\u308b\u71b1\u51e6\u7406\u306e\u5f71\u97ff
\u5742\u6839 \u99ff\u4e5f\u3001\u6e21\u8fba \u5065\u592a\u90ce\u3001\u85e4\u7530 \u6b66\u5fd7\u3001Md. Mahfuz Alam\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[5p-A503-4]
\u7d44\u6210\u5236\u5fa1\u306b\u3088\u308bSiGe\/Si\u8d85\u683c\u5b50\u306e\u51fa\u529b\u56e0\u5b50\u5897\u5927
\u8c37\u53e3 \u9054\u5f66\u3001\u5965\u7551 \u4eae\u3001\u6e21\u8fba \u5065\u592a\u90ce\u3001Md. Mahfuz Alam\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u85e4\u7530 \u6b66\u5fd7\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[7p-PA9-4]
Si\u30ad\u30e3\u30c3\u30d7\/Ge\u91cf\u5b50\u30c9\u30c3\u30c8\u7a4d\u5c64\u69cb\u9020\u306eXPS\u8a55\u4fa1
\u82b1\u7530 \u76f4\u58eb\u3001\u7530\u4e2d \u5f70\u535a\u3001\u65b0\u85e4 \u6075\u7f8e\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u91ce\u5e73 \u535a\u53f8\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[6a-C18-4]
\u4f4eRA\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u30c8\u30f3\u30cd\u30eb\u63a5\u5408\u96fb\u6975\u3092\u7528\u3044\u305fn-Ge\u4e2d\u306e\u5ba4\u6e29\u30b9\u30d4\u30f3\u4f1d\u5c0e\u691c\u51fa
\u585a\u539f \u8aa0\u4eba\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u85e4\u7530 \u88d5\u4e00\u3001\u5185\u85e4 \u8cb4\u5927\u3001\u5c71\u7530 \u664b\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6d5c\u5c4b \u5b8f\u5e73<\/p>\n\n\n\n

[7p-PA9-3]
Ge\u91cf\u5b50\u30c9\u30c3\u30c8\u3078\u306eP-Spin-on-Doping\u304c\u767a\u5149\u7279\u6027\u306b\u4e0e\u3048\u308b\u52b9\u679c
\u539f\u7530 \u6ce2\u5b50\u3001\u5f90 \u5b66\u4fca \u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[6p-C13-4]
Spin-on-dopant\u62e1\u6563\u306b\u3088\u308bGe\u30c0\u30a4\u30aa\u30fc\u30c9\u306e\u96fb\u6d41\u6ce8\u5165\u3067\u306e\u767a\u5149
\u5ca1\u91cd \u67ca\u6c70\u3001\u5f90 \u5b66\u4fca \u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

\u7b2c64\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u30d1\u30b7\u30d5\u30a3\u30b3\u6a2a\u6d5c\u30002017\u5e743\u6708<\/strong><\/p>\n\n\n\n

[16a-F204-2] An Optical
Resonator for Tensile-strained Ge Microbridge by Using Multimode Interference Coupler Loop Mirrors
\u5f90 \u5b66\u4fca\u3001\u677e\u4e0b \u5968\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[15a-422-2]
\u6ce2\u9577\u30b9\u30d7\u30ea\u30c3\u30c6\u30a3\u30f3\u30b0\u592a\u967d\u96fb\u6c60\u30dc\u30c8\u30e0\u30bb\u30eb\u3078\u306e\u5fdc\u7528\u3092\u76ee\u6307\u3057\u305f\u30d8\u30c6\u30ed\u63a5\u5408Ge\u592a\u967d\u96fb\u6c60
\u5927\u8c37 \u4fca\u8cb4\u3001\u4f50\u85e4 \u7dbe\u7950\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5c0f\u9577\u4e95 \u8aa0<\/p>\n\n\n\n

[15p-E206-8]
\u30ca\u30ce\u30c9\u30c3\u30c8\u542b\u6709Si\u8584\u819c\u306b\u304a\u3051\u308b\u69cb\u9020\u3068\u51fa\u529b\u56e0\u5b50\u306e\u95a2\u4fc2
\u5742\u6839 \u99ff\u4e5f\u3001\u6e21\u8fba \u5065\u592a\u90ce\u3001\u85e4\u7530 \u6b66\u5fd7\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[15p-P14-8]
\u9ad8\u7a7a\u9593\u5206\u89e3\u80fdHXPES\u306b\u3088\u308bGe 2p\u5185\u6bbb\u6e96\u4f4d\u306e\u7d50\u5408\u30a8\u30cd\u30eb\u30ae\u30fc\u306b\u6b6a\u307f\u304c\u4e0e\u3048\u308b\u5f71\u97ff\u306e\u691c\u51fa
\u4f50\u91ce \u826f\u4ecb\u3001\u6b64\u5cf6 \u5fd7\u7e54\u3001\u6edd\u6ca2 \u8015\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u91ce\u5e73 \u535a\u53f8<\/p>\n\n\n\n

[15a-422-3]
InGaP\/\/Si\u6ce2\u9577\u30b9\u30d7\u30ea\u30c3\u30c6\u30a3\u30f3\u30b0\u592a\u967d\u96fb\u6c60\u306e\u5c4b\u5916\u767a\u96fb\u7279\u6027
\u9ad8\u6a4b \u601c\u7f8e\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u718a\u7530 \u660c\u5e74\u3001\u6e21\u8fba \u6674\u83dc\u3001\u5c71\u7530 \u7e41\u3001\u690d\u7530 \u8b72\u3001\u5c0f\u9577\u4e95 \u8aa0<\/p>\n\n\n\n

\u7b2c77\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u6731\u9dfa\u30e1\u30c3\u30bb\u3000\u65b0\u6f5f\u30002016\u5e749\u6708<\/strong><\/p>\n\n\n\n

[14p-B12-13]
SiGe \u30d5\u30a9\u30ce\u30cb\u30c3\u30af\u7d50\u6676\u306b\u304a\u3051\u308b\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u71b1\u4f1d\u5c0e
\u91ce\u6751 \u653f\u5b8f\u3001\u4e2d\u5ddd \u7d14\u8cb4\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[15a-P8-4]
\u9ad8\u6fc3\u5ea6n\u578b\u30c9\u30fc\u30d7Ge\u30de\u30a4\u30af\u30ed\u30c7\u30a3\u30b9\u30af\u306e\u5171\u632f\u30d5\u30a9\u30c8\u30eb\u30df\u30cd\u30bb\u30f3\u30b9
\u6a4b\u672c \u79c0\u660e\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[16a-A24-9]
\u30d8\u30c6\u30ed\u63a5\u5408\u578bSi\u592a\u967d\u96fb\u6c60\u306e\u958b\u653e\u96fb\u5727\u306e\u5236\u9650\u8981\u7d20
\u4f50\u85e4 \u7dbe\u7950\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001Porponth Sichanugrist\u3001\u4e2d\u7530 \u548c\u5409\u3001\u5c0f\u9577\u4e95 \u8aa0<\/p>\n\n\n\n

[14a-B12-2]
Si\u8584\u819c\u4e2d\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30ebGe\u30ca\u30ce\u30c9\u30c3\u30c8\u7a4d\u5c64\u69cb\u9020\u306b\u304a\u3051\u308b\u71b1\u4f1d\u5c0e\u7387\u306e\u4f4e\u6e1b
\u6e21\u8fba \u5065\u592a\u90ce\u3001\u5c71\u962a \u53f8\u7950\u4eba\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[15p-A35-14]
\u9244\u30b7\u30ea\u30b5\u30a4\u30c9\u30ca\u30ce\u30c9\u30c3\u30c8\u7a4d\u5c64\u69cb\u9020\u306e\u5236\u5fa1\u306b\u3088\u308b\u71b1\u96fb\u7269\u6027\u5411\u4e0a
\u5742\u6839 \u99ff\u4e5f\u3001\u6e21\u8fba \u5065\u592a\u90ce\u3001\u85e4\u7530 \u6b66\u5fd7\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[16a-D61-5]
Si(110)\u57fa\u677f\u4e0aSiGe\u819c\u306e\u6b6a\u307f\u7de9\u548c\u306b\u304a\u3051\u308b\u30a4\u30aa\u30f3\u6ce8\u5165\u306e\u52b9\u679c
\u52a0\u85e4 \u307e\u3069\u304b\u3001\u6751\u4e0a \u592a\u967d\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[16a-D61-2]
Epitaxial Lift-Off (ELO)\u6cd5\u3092\u7528\u3044\u305fGOI\u57fa\u677f\u306e\u4f5c\u88fd
\u5927\u4e45\u4fdd \u4eae\u592a\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[14a-C41-4]
Electrical spin injection and detection in n+-Ge using Schottky tunnel contacts
\u85e4\u7530 \u88d5\u4e00\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u5c71\u7530 \u664b\u4e5f\u3001\u91d1\u5cf6 \u5cb3\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6d5c\u5c4b \u5b8f\u5e73<\/p>\n\n\n\n

[15a-P8-6]
GOI\u4e0a\u6b6a\u307f\u5186\u5f62\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u306e\u767a\u5149\u7279\u6027
\u5927\u91ce \u525b\u55e3\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[13a-D61-6]
Si\u30ca\u30ce\u30a6\u30a9\u30fc\u30eb\u69cb\u9020\u306e\u4f5c\u88fd
\u7be0\u585a \u6566\u53f2\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5409\u8449 \u4fee\u5e73\u3001\u5e73\u4e95 \u653f\u548c\u3001\u5e02\u5ddd \u5e78\u7f8e\u3001\u5c0f\u9577\u4e95 \u8aa0<\/p>\n\n\n\n

[14a-A24-9]
\u591a\u63a5\u5408\u6ce2\u9577\u30b9\u30d7\u30ea\u30c3\u30c6\u30a3\u30f3\u30b0\u592a\u967d\u96fb\u6c60\u306e\u5b9f\u73fe\u306b\u5411\u3051\u305f\u5c4b\u5916\u767a\u96fb\u7279\u6027\u8a55\u4fa1
\u9ad8\u6a4b \u601c\u7f8e\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001Porponth Sichanugrist\u3001\u718a\u7530 \u660c\u5e74\u3001\u6e21\u8fba \u6674\u83dc\u3001\u690d\u7530 \u8b72\u3001\u5c0f\u9577\u4e95 \u8aa0<\/p>\n\n\n\n

[15p-P11-8]
\u30a4\u30aa\u30f3\u6ce8\u5165\u6b6a\u307f\u7de9\u548c\u6cd5\u3092\u7528\u3044\u3066\u5f62\u6210\u3057\u305fSi\/Si1-xCx\/Si(001)\u69cb\u9020\u306e\u7d50\u6676\u6027\u8a55\u4fa1
\u6751\u4e0a \u592a\u967d\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u539f \u5eb7\u7950\u3001\u5c71\u672c \u5343\u7dbe\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686\u3001\u661f \u88d5\u4ecb\u3001\u6709\u6fa4 \u6d0b\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u5ddd \u6e05\u548c<\/p>\n\n\n\n

[15p-P11-7]
\u4f38\u5f35\u6b6a\u307fSi\/\u7de9\u548cSiGe\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u7d50\u6676\u6210\u9577\u4e2d\u306b\u304a\u3051\u308b\u8868\u9762\u5f62\u72b6\u5f62\u6210\u904e\u7a0b\u306b\u95a2\u3059\u308b\u7814\u7a76
\u5c71\u7530 \u5d07\u5cf0\u3001\u5b87\u6d25\u5c71 \u76f4\u4eba\u3001\u4f50\u85e4 \u572d\u3001\u767d\u5009 \u9ebb\u8863\u3001\u5c71\u672c \u5343\u7dbe\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u539f \u5eb7\u7950\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e2d\u5ddd \u6e05\u548c<\/p>\n\n\n\n

\u7b2c63\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u6771\u4eac\u5de5\u696d\u5927\u5b66\u30002016\u5e743\u6708<\/strong><\/p>\n\n\n\n

[21p-P17-5]
SiGe\u30b9\u30c8\u30c3\u30d7\u5c64\u3092\u7528\u3044\u305f\u6b6a\u307fGe-On-Insulator\u69cb\u9020\u306e\u5f62\u6210\u6280\u8853\u958b\u767a
\u77e2\u5cf6 \u4f51\u6a39\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[21p-P9-5]
\u8cbc\u308a\u5408\u308f\u305b\u6cd5\u306b\u3088\u308b\u4e00\u8ef8\u6027\u6b6a\u307fSiGe-on-Insulator(SGOI)\u306e\u4f5c\u88fd
\u677e\u5c3e \u62d3\u54c9\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[20p-W323-5]
\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9SiGe\u30d5\u30a9\u30ce\u30cb\u30c3\u30af\u7d50\u6676\u30ca\u30ce\u69cb\u9020\u306e\u71b1\u4f1d\u5c0e
\u4e2d\u5ddd \u7d14\u8cb4\u3001Jeremie Maire\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u91ce\u6751 \u653f\u5b8f<\/p>\n\n\n\n

[21p-P16-11]
\u5186\u5f62\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u69cb\u9020\u306b\u3088\u308bGOI\u306e\u4e8c\u8ef8\u5f15\u3063\u5f35\u308a\u6b6a\u307f\u5897\u5f37
\u677e\u4e0b \u5968\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[20a-H112-10]
\u30a4\u30aa\u30f3\u6ce8\u5165\u3092\u5229\u7528\u3057\u305f\u5727\u7e2e\u6b6a\u307fSi\/\u7de9\u548cSi1-xCx\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u4f5c\u88fd\u306b\u304a\u3051\u308b\u30a4\u30aa\u30f3\u6ce8\u5165\u6761\u4ef6\u306e\u691c\u8a0e
\u6709\u6fa4 \u6d0b\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686<\/p>\n\n\n\n

[21p-P16-12]
Ge\u91cf\u5b50\u30c9\u30c3\u30c8\/Si\u754c\u9762\u3078\u306eP\u30c7\u30eb\u30bf\u30c9\u30fc\u30d4\u30f3\u30b0\u304c\u767a\u5149\u7279\u6027\u3068\u30c9\u30c3\u30c8\u5f62\u6210\u306b\u4e0e\u3048\u308b\u5f71\u97ff
\u6e21\u908a \u5e78\u6a39\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[20p-W323-12]
\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30ebGe\u30ca\u30ce\u30c9\u30c3\u30c8\u542b\u6709Si\u69cb\u9020\u3092\u7528\u3044\u305fSi\u7cfb\u71b1\u96fb\u6750\u6599\u306e\u6027\u80fd\u5411\u4e0a
\u5c71\u962a \u53f8\u7950\u4eba\u3001\u6e21\u8fba \u5065\u592a\u90ce\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u7af9\u5185 \u6b63\u592a\u90ce\u3001\u9152\u4e95 \u6717\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[21a-P8-22]
\u9ad8\u52b9\u7387GaInP\/\/Si\u4f4e\u500d\u7387\u96c6\u5149\u578b\u30fb\u6ce2\u9577\u30b9\u30d7\u30ea\u30c3\u30c6\u30a3\u30f3\u30b0\u592a\u967d\u96fb\u6c60
\u4e45\u4fdd\u7530 \u667a\u4e5f\u3001\u4f50\u85e4 \u7dbe\u7950\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001Sichanugrist Porponth\u3001\u5c0f\u9577\u4e95 \u8aa0<\/p>\n\n\n\n

[22a-W321-7]
\u4f4e\u500d\u7387\u96c6\u5149\u578bSi\u30d8\u30c6\u30ed\u63a5\u5408\u592a\u967d\u96fb\u6c60\u306e\u52d5\u4f5c\u89e3\u6790
\u4f50\u85e4 \u7dbe\u7950\u3001\u6afb\u4e95 \u5065\u592a\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001Sichanugrist Porponth\u3001\u4e2d\u7530 \u548c\u5409\u3001\u5c0f\u9577\u4e95 \u8aa0<\/p>\n\n\n\n

[20p-H112-5]
\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u3067\u4f5c\u88fd\u3057\u305f\u4e00\u8ef8\u6027\u6b6aGe\u306e\u7570\u65b9\u6027\u5fdc\u529b\u8a55\u4fa1
\u5c71\u672c \u7ae0\u592a\u90ce\u3001\u6b66\u5185 \u4e00\u771f\u3001\u5c0f\u702c\u6751 \u5927\u4eae\u3001\u6b64\u5cf6 \u8a69\u7e54\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5c0f\u690b \u539a\u5fd7<\/p>\n\n\n\n

[21p-P9-7]
\u5fae\u50be\u659c\u57fa\u677f\u3092\u7528\u3044\u305f\u4f38\u5f35\u6b6a\u307fSi\/\u7de9\u548cSiGe\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u30e2\u30d5\u30a9\u30ed\u30b8\u30fc\u53ca\u3073\u7d20\u5b50\u7279\u6027
\u5b87\u6d25\u5c71 \u76f4\u4eba\u3001\u4f50\u85e4 \u572d\u3001\u5c71\u7530 \u5d07\u5cf0\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u539f \u5eb7\u4ecb\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

\u7b2c76\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\u30002015\u5e749\u6708<\/strong><\/p>\n\n\n\n

[15a-1E-2]
\u30d0\u30a4\u30aa\u30c6\u30f3\u30d7\u30ec\u30fc\u30c8\u6975\u9650\u52a0\u5de5\u306b\u3088\u308bSi1-xGex\u30ca\u30ce\u30c7\u30a3\u30b9\u30af\u306e\u4f5c\u88fd\u3068\u7279\u6027\u8a55\u4fa1
\u85e4\u4e95 \u62d3\u4e5f\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5bd2\u5ddd \u8aa0\u4e8c<\/p>\n\n\n\n

[14a-2N-4]
GOI\u30de\u30a4\u30af\u30ed\u30c7\u30a3\u30b9\u30af\u306b\u304a\u3051\u308bHigh-Q\u5024\u5171\u632f\u30d5\u30a9\u30c8\u30eb\u30df\u30cd\u30bb\u30f3\u30b9
\u6a4b\u672c \u79c0\u660e\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[14a-2Q-9]
\u4e2d\u6027\u7c92\u5b50\u30d3\u30fc\u30e0\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u3092\u7528\u3044\u305fSi\u91cf\u5b50\u30c9\u30c3\u30c8\u306e\u4f5c\u88fd\u3068\u71b1\u4f1d\u5c0e\u7279\u6027
\u83ca\u6c60 \u4e9c\u7d00\u5fdc\u3001\u516b\u5c3e \u7ae0\u53f2\u3001\u6bdb\u5229 \u52c7\u3001\u4e2d\u6751 \u96c5\u4e00\u3001\u5c71\u4e0b \u4e00\u90ce\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5bd2\u5ddd \u8aa0\u4e8c\u3001\u5c0f\u91ce \u5d07\u4eba<\/p>\n\n\n\n

[13p-2T-5]
\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30ebGe\u30ca\u30ce\u30c9\u30c3\u30c8\u542b\u6709Si\u8584\u819c\u306b\u304a\u3051\u308b\u71b1\u96fb\u7279\u6027\u5236\u5fa1
\u5c71\u962a \u53f8\u7950\u4eba\u3001\u6e21\u8fba \u5065\u592a\u90ce\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u7af9\u5185 \u6b63\u592a\u90ce\u3001\u9152\u4e95 \u6717\u3001\u4e2d\u6751 \u82b3\u660e<\/p>\n\n\n\n

[13p-2W-4]
Si(110)\u57fa\u677f\u4e0aSiGe\u819c\u306e\u6b6a\u307f\u7de9\u548c\u306b\u304a\u3051\u308b\u30a4\u30aa\u30f3\u6ce8\u5165\u306e\u52b9\u679c
\u52a0\u85e4 \u307e\u3069\u304b\u3001\u6751\u4e0a \u592a\u967d\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[13p-2W-5]
\u30a4\u30aa\u30f3\u6ce8\u5165\u306b\u3088\u308b\u6b20\u9665\u5236\u5fa1\u3092\u7528\u3044\u3066\u4f5c\u88fd\u3057\u305f\u5727\u7e2e\u6b6a\u307fSi\/Si1-xCx \u30d8\u30c6\u30ed\u69cb\u9020\u306e\u71b1\u7684\u5b89\u5b9a\u6027
\u6709\u6fa4 \u6d0b\u3001\u661f \u88d5\u4ecb\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686<\/p>\n\n\n\n

[13p-2W-6]
P\u30c7\u30eb\u30bf\u30c9\u30fc\u30d7\u3057\u305fGe\u57fa\u677f\u306e\uff13\u6b21\u5143\u30a2\u30c8\u30e0\u30d7\u30ed\u30fc\u30d6\u8a55\u4fa1
\u6e05\u6c34 \u5eb7\u96c4\u3001\u5c71\u7530 \u9053\u6d0b\u3001\u97d3 \u658c\u3001\u6d82 \u8fdc\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u690d\u677e \u771f\u53f8\u3001\u4f0a\u85e4 \u516c\u5e73\u3001\u4e95\u4e0a \u8015\u6cbb\u3001\u6c38\u4e95 \u5eb7\u4ecb<\/p>\n\n\n\n

\u7b2c62\u56de \u5fdc\u7528\u7269\u7406\u5b66\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u6771\u6d77\u5927\u5b66\u30002015\u5e743\u6708<\/strong><\/p>\n\n\n\n

[12a-D5-4]
Ar\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u3092\u7528\u3044\u305f\u5727\u7e2e\u6b6a\u307fSi\/\u7de9\u548cSi1-xCx\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u4f5c\u88fd
\u6709\u6fa4 \u6d0b\u3001\u661f \u88d5\u4ecb\u3001\u85e4\u539f \u5e78\u4eae\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u6709\u5143 \u572d\u4ecb\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686<\/p>\n\n\n\n

[12p-A16-3]
\u71b1\u9178\u5316\u3092\u7528\u3044\u305f\u8868\u9762\u4e0d\u6d3b\u6027\u5316\u306b\u3088\u308b\u5f15\u3063\u5f35\u308a\u6b6a\u307fGe on Si\u306e\u767a\u5149\u5f37\u5ea6\u5897\u5927
\u9ad8\u6797 \u6602\u7d00\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

[12a-D5-5]
n-Ge\u3078\u306eP\u30c7\u30eb\u30bf\u30c9\u30fc\u30d4\u30f3\u30b0\u306b\u304a\u3051\u308bSi\u633f\u5165\u306b\u3088\u308b\u305d\u306e\u504f\u6790\u6291\u5236\u52b9\u679c
\u5c71\u7530 \u9053\u6d0b\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u690d\u677e \u771f\u53f8\u3001\u4f0a\u85e4 \u516c\u5e73<\/p>\n\n\n\n

[12p-P17-2]
\u9ad8\u7a7a\u9593\u5206\u89e3\u80fdHXPES\u3068XPS\u306b\u3088\u308b\u6b6a\u307f\u53ca\u3073\u7d44\u6210\u304cSiGe\u4fa1\u96fb\u5b50\u5e2f\u306b\u4e0e\u3048\u308b\u5f71\u97ff\u306e\u691c\u51fa
\u5c71\u5800 \u4fca\u592a\u3001\u7b39\u5b50 \u77e5\u5f25\u3001\u7c73\u5009 \u745b\u4ecb\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6c60\u6c38 \u82f1\u53f8\u3001\u91ce\u5e73 \u535a\u53f8<\/p>\n\n\n\n

[12p-P17-3]
\u30a4\u30aa\u30f3\u6ce8\u5165\u6210\u9577\u6cd5\u3067\u4f5c\u88fd\u3057\u305f\u5727\u7e2e\u6b6a\u307fSi\/Si1-xCx\/Si(001)\u69cb\u9020MOSFET\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1
\u4e2d\u8fbc \u8ad2\u3001\u9152\u4e95 \u7fd4\u4e00\u6717\u3001\u85e4\u539f \u5e78\u4eae\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686\u3001\u661f \u88d5\u4ecb\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[12p-P17-4]
\u4f38\u5f35\u6b6a\u307fSi\/\u7de9\u548cSiGe\/Si(110)\u306e\u8868\u9762\u30e2\u30d5\u30a9\u30ed\u30b8\u30fc\u3078\u306e\u6210\u9577\u901f\u5ea6\u306e\u5f71\u97ff
\u5b87\u6d25\u5c71 \u76f4\u4eba\u3001\u4f50\u85e4 \u572d\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[12p-P17-5]
\u6b6a\u307fSi\/Si1-xCx\/Si(001)\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u7d50\u6676\u6027\u3068\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u904e\u7a0b\u3068\u306e\u95a2\u4fc2
\u85e4\u539f \u5e78\u4eae\u3001\u9152\u4e95 \u7fd4\u4e00\u6717\u3001\u5c0f\u6797 \u662d\u592a\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686\u3001\u661f \u88d5\u4ecb\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[12p-P17-7]
P\u306ein-situ\u30c9\u30fc\u30d4\u30f3\u30b0\u306b\u3088\u308a\u4f5c\u88fd\u3057\u305fn\u578bGOI\u306e\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u52dd\u4fe3 \u6d0b\u5178\u3001\u9577\u5d8b \u667a\u5178\u3001\u6d5c\u5c4b \u5b8f\u5e73\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[13p-P11-14]
\u6c34\u7d20\u30e9\u30b8\u30ab\u30eb\u306b\u3088\u308bW\u3001Ni\u306e\u9078\u629e\u52a0\u71b1\u3092\u7528\u3044\u305fa-Si\u306e\u56fa\u76f8\u6210\u9577\u6cd5\u3068TFT\u306e\u4f5c\u88fd
\u4e0a\u6751 \u548c\u8cb4\u3001\u8352\u4e95 \u54f2\u53f8\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5c71\u4e2d \u6df3\u4e8c\u3001\u4f50\u85e4 \u54f2\u4e5f\u3001\u4e2d\u5bb6 \u5927\u5e0c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u9ad8\u677e \u5229\u884c\u3001\u6fa4\u91ce \u61b2\u592a\u90ce<\/p>\n\n\n\n

[13p-P18-17]
\u5f15\u3063\u5f35\u308a\u6b6a\u307fGOI\u306eCMP\u8584\u819c\u5316\u306b\u3088\u308b\u767a\u5149\u5f37\u5ea6\u5897\u5927
\u6a4b\u672c \u79c0\u660e\u3001\u5f90 \u5b66\u4fca\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u4e38\u6cc9 \u7422\u4e5f<\/p>\n\n\n\n

\u7b2c75\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u5317\u6d77\u9053\u5927\u5b66\u30002014\u5e749\u6708<\/strong><\/p>\n\n\n\n

[17a-PB2-2]
\u6c34\u7d20\u30e9\u30b8\u30ab\u30eb\u306b\u3088\u308b\u9077\u79fb\u91d1\u5c5e\u306e\u9078\u629e\u52a0\u71b1\u3068\u305d\u306e\u30c7\u30d0\u30a4\u30b9\u5fdc\u7528
\u4e0a\u6751\u548c\u8cb4\uff0c\u8352\u4e95\u54f2\u53f8\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4f50\u85e4\u54f2\u4e5f\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[18p-PB8-1]
\u6b6aGe\u30de\u30a4\u30af\u30ed\u30d6\u30ea\u30c3\u30b8\u306e\u4f5c\u88fd\u3068\u8a55\u4fa1
\u6edd\u6fa4\u5bdb\u4e4b\uff0c\u5f90\u5b66\u4fca\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4e38\u6cc9\u7422\u4e5f<\/p>\n\n\n\n

[18p-PB10-4]
\u4f38\u5f35\u6b6a\u307fSi\/\u7de9\u548cSiGe\/Si(110)\u306e\u5fae\u7d30\u69cb\u9020\u304a\u3088\u3073\u96fb\u6c17\u7684\u7279\u6027\u3078\u306e\u71b1\u51e6\u7406\u306e\u5f71\u97ff
\u5b87\u6d25\u5c71\u76f4\u4eba\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[18p-PB10-6]
\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u3067\u4f5c\u88fd\u3057\u305f\u5727\u7e2e\u6b6a\u307fSi\/Si1-xCx\/Si(001)\u69cb\u9020\u306e\u7d50\u6676\u6027\u53ca\u3073\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u8a55\u4fa1
\u4e2d\u8fbc\u8ad2\uff0c\u9152\u4e95\u7fd4\u4e00\u6717\uff0c\u85e4\u539f\u5e78\u4eae\uff0c\u53e4\u5ddd\u6d0b\u5fd7\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u661f\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[18p-PB10-7]
\u6b6a\u307fSi\/Si1-XCx\/Si(001)\u69cb\u9020\u306e\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u904e\u7a0b\u306b\u304a\u3051\u308b\u7d50\u6676\u6027\u53ca\u3073\u96fb\u6c17\u7279\u6027\u8a55\u4fa1
\u85e4\u539f\u5e78\u4eae\uff0c\u9152\u4e95\u7fd4\u4e00\u6717\uff0c\u53e4\u5ddd\u6d0b\u5fd7\uff0c\u4e95\u4e0a\u6a39\u7bc4\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u661f\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[18p-PB10-8]
\u9ad8\u7a7a\u9593\u5206\u89e3\u80fdHXPES\u306b\u3088\u308b\u4e00\u8ef8\u6b6a\u307f\u91cf\u306e\u9055\u3044\u304cSiGe\u4fa1\u96fb\u5b50\u5e2f\u306b\u4e0e\u3048\u308b\u5f71\u97ff\u306e\u691c\u51fa
\u5c71\u5800\u4fca\u592a\uff0c\u6afb\u4e95\u62d3\u4e5f\uff0c\u7c73\u7aaa\u99ff\uff0c\u8352\u4e95\u4ec1\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6c60\u6c38\u82f1\u53f8\uff0c\u91ce\u5e73\u535a\u53f8<\/p>\n\n\n\n

[18p-PB10-10]
\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308b\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u9818\u57df\u3067\u306eSiGe\u6b6a\u307f\u5236\u5fa1
\u8239\u6a4b\u76f4\u8cb4\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[18p-PB10-11]
Al2O3\u3092\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u3068\u3057\u305f\u6b6a\u307fGe MOS\u69cb\u9020\u306e\u96fb\u6c17\u7279\u6027
\u6df1\u5c71\u525b\uff0c\u7530\u4e2d\u4f38\u4e43\u4ecb\uff0c\u7530\u4e2d\u8cb4\u4e45\uff0c\u30df\u30ed\u30ce\u30d5 \u30de\u30af\u30b7\u30e0\uff0c\u7267\u79c0\u4e4b\uff0c\u4f0a\u85e4\u516c\u5e73\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[19a-A16-4]
\u6db2\u6d78\u30e9\u30de\u30f3\u5206\u5149\u6cd5\u306b\u3088\u308b\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u306b\u3088\u308a\u4f5c\u88fd\u3055\u308c\u305f\u4e00\u8ef8\u6b6aSiGe\/Si\u306e\u7570\u65b9\u60272\u8ef8\u5fdc\u529b\u8a55\u4fa1
\u5c71\u672c\u7ae0\u592a\u90ce\uff0c\u5c0f\u702c\u6751\u5927\u4eae\uff0c\u5bcc\u7530\u57fa\u88d5\uff0c\u6b66\u5185\u4e00\u771f\uff0c\u6a2a\u5ddd\u51cc\uff0c\u7c73\u5009\u745b\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u91ce\u5e73\u535a\u53f8\uff0c\u5c0f\u690b\u539a\u5fd7<\/p>\n\n\n\n

[19a-A16-10]
\u8cbc\u308a\u5408\u308f\u305b\u6cd5\u306b\u3088\u308b\u9ad8\u79fb\u52d5\u5ea6\u6b6a\u307fGOI\u306e\u4f5c\u88fd
\u9577\u5d8b\u667a\u5178\uff0c\u52dd\u4fe3\u6d0b\u5178\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[19a-A26-1]
\u300c\u8b1b\u6f14\u5968\u52b1\u8cde\u53d7\u8cde\u8a18\u5ff5\u8b1b\u6f14\u300d
n\u578b\u30c9\u30fc\u30d7\u5f15\u3063\u5f35\u308a\u6b6a\u307fGOI\u306e\u4f5c\u88fd\u3068\u767a\u5149\u7279\u6027\u306e\u8a55\u4fa1
\u897f\u7530\u572d\u4f51\uff0c\u5f90\u5b66\u4fca\uff0c\u9ad8\u6797\u6602\u7d00\uff0c\u5409\u7530\u572d\u4f51\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u4e38\u6cc9\u7422\u4e5f<\/p>\n\n\n\n

\u7b2c61\u56de \u5fdc\u7528\u7269\u7406\u5b66\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u9752\u5c71\u5b66\u9662\u5927\u5b66\u30002014\u5e743\u6708<\/strong><\/p>\n\n\n\n

[17a-E7-52]
Highly efficient detection of pure spin currents in n-Ge using L21-Co2FeSi Heusler-compound electrodes
\u85e4\u7530\u88d5\u4e00\uff0c\u7b20\u539f\u5065\u53f8\uff0c\u5c71\u7530\u664b\u4e5f\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u6d5c\u5c4b\u5b8f\u5e73<\/p>\n\n\n\n

[17a-PG2-1]
Cap-Si\/\u5727\u7e2e\u6b6a\u307fSiGe\u30c1\u30e3\u30cd\u30eb\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020\u3092\u6709\u3059\u308bp-MOSFET\u306e\u754c\u9762\u6e96\u4f4d\u5bc6\u5ea6\u3068\u6b63\u5b54\u79fb\u52d5\u5ea6\u306b\u4e0e\u3048\u308bCap-Si\u819c\u539a\u306e\u5f71\u97ff
\u5c0f\u5e61\u667a\u5e78\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[17a-PG2-2]
\u5727\u7e2e\u6b6a\u307fSi\/Si1-XCX\/Si(100)\u30d8\u30c6\u30ed\u69cb\u9020\u306b\u304a\u3051\u308b \u70ad\u7d20\u50be\u659c\u7d44\u6210\u306e\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027\u3078\u306e\u52b9\u679c
\u9152\u4e95\u7fd4\u4e00\u6717\uff0c\u53e4\u5ddd\u6d0b\u5fd7\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u661f\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[17a-PG2-3]
\u4e0d\u7d14\u7269\u30a4\u30aa\u30f3\u6ce8\u5165\u304a\u3088\u3073\u71b1\u51e6\u7406\u304cSi1-xCx\u5c64\u306e\u7d50\u6676\u6027\u306b\u53ca\u307c\u3059\u5f71\u97ff
\u85e4\u539f\u5e78\u4eae\uff0c\u9152\u4e95\u7fd4\u4e00\u6717\uff0c\u53e4\u5ddd\u6d0b\u5fd7\uff0c\u4e95\u4e0a\u6a39\u7bc4\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u661f\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[17a-PG2-4]
\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u304cSi1-XCX\/Si(001)\u69cb\u9020\u306e\u6b20\u9665\u5f62\u6210\u904e\u7a0b\u306b\u53ca\u307c\u3059\u52b9\u679c
\u4e2d\u8fbc\u8ad2\uff0c\u9152\u4e95\u7fd4\u4e00\u6717\uff0c\u85e4\u539f\u5e78\u4eae\uff0c\u53e4\u5ddd\u6d0b\u5fd7\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u661f\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[18p-F6-6]
P\u30c7\u30eb\u30bf\u30c9\u30fc\u30d7\u306b\u3088\u308bn\u578bGe\u3078\u306e\u6975\u6d45\u30aa\u30fc\u30df\u30c3\u30af\u63a5\u89e6\u306e\u5f62\u6210
\u5c71\u7530\u9053\u6d0b\uff0c\u7af9\u5185\u5609\u5bdb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4f0a\u85e4\u516c\u5e73<\/p>\n\n\n\n

[18p-PA8-1]
\u6c34\u7d20\u30e9\u30b8\u30ab\u30eb\u306b\u3088\u308b\u9077\u79fb\u91d1\u5c5e\u306e\u9078\u629e\u52a0\u71b1\u3092\u7528\u3044\u305f\u591a\u7d50\u6676Si\u819c\u5f62\u6210\u3068\u30c7\u30d0\u30a4\u30b9\u30d7\u30ed\u30bb\u30b9\u5fdc\u7528
\u4e2d\u5bb6\u5927\u5e0c\uff0c\u4e0a\u6751\u548c\u8cb4\uff0c\u8352\u4e95\u54f2\u53f8\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4f50\u85e4\u54f2\u4e5f\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[19a-E11-2]
SiO2\u4e0a\u306b\u5f62\u6210\u3057\u305fGe\u819c\u306e\u767a\u5149\u7279\u6027\u8a55\u4fa1
\u4e0a\u65b9\u8056\u77e2\uff0c\u5f90\u5b66\u4fca\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u4e38\u6cc9\u7422\u4e5f<\/p>\n\n\n\n

[19a-E11-3]
Ge\u91cf\u5b50\u30c9\u30c3\u30c8\/Si\u754c\u9762\u3078\u306eP\u30c7\u30eb\u30bf\u30c9\u30fc\u30d4\u30f3\u30b0\u3068\u767a\u5149\u7279\u6027\u8a55\u4fa1
\u4e2d\u9593\u9054\u54c9\uff0c\u5f90\u5b66\u4fca\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u4e38\u6cc9\u7422\u4e5f<\/p>\n\n\n\n

[19a-E11-6]
n\u578b\u30c9\u30fc\u30d7\u5f15\u3063\u5f35\u308a\u6b6a\u307fGOI\u306e\u4f5c\u88fd\u3068\u767a\u5149\u7279\u6027\u306e\u8a55\u4fa1
\u897f\u7530\u572d\u4f51\uff0c\u5f90\u5b66\u4fca\uff0c\u9ad8\u6797\u6602\u7d00\uff0c\u5409\u7530\u572d\u4f51\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u4e38\u6cc9\u7422\u4e5f<\/p>\n\n\n\n

[19a-F8-10]
\u30b7\u30ea\u30b3\u30f3\u30de\u30a4\u30af\u30ed\u30c7\u30a3\u30b9\u30af\u3092\u7528\u3044\u305f\u71b1\u5149\u5b66\u52b9\u679c\u578b\u5149\u5909\u8abf\u5668
\u7530\u6751\u4f91\u4e5f\uff0c\u5f90\u5b66\u4fca\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4e38\u6cc9\u7422\u4e5f<\/p>\n\n\n\n

\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u540c\u5fd7\u793e\u5927\u5b66\u30002013\u5e749\u6708<\/strong><\/p>\n\n\n\n

[17p-P2-47]
\u6c34\u7d20\u30e9\u30b8\u30ab\u30eb\u3092\u7528\u3044\u305f\u9077\u79fb\u91d1\u5c5e\u306e\u9078\u629e\u52a0\u71b1\u73fe\u8c61\u306b\u3088\u308b\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u7528\u591a\u7d50\u6676Si\u5f62\u6210
\u4e2d\u5bb6\u5927\u5e0c\uff0c\u8352\u4e95\u54f2\u53f8\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4f50\u85e4\u54f2\u4e5f\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[17p-P8-2]
\u56fa\u76f8\u6210\u9577\u6cd5\u306b\u3088\u308bCap-Si\/SiGe\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u5f62\u6210\u3068\u754c\u9762\u6e96\u4f4d\u53ca\u3073\u79fb\u52d5\u5ea6\u306e\u8a55\u4fa1
\u5c0f\u5e61\u667a\u5e78\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u661f\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[17p-P8-3]
\u9ad8\u7a7a\u9593\u5206\u89e3\u80fdHXPES\u306b\u3088\u308bSiGe\u4fa1\u96fb\u5b50\u5e2f\u3078\u306e\u4e00\u8ef8\u6b6a\u307f\u306e\u5f71\u97ff\u306e\u691c\u51fa
\u5c71\u5800\u4fca\u592a\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6c60\u6c38\u82f1\u53f8\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u91ce\u5e73\u535a\u53f8<\/p>\n\n\n\n

[17p-P8-4]\u9ad8\u54c1\u8cea\u5727
\u7e2e\u6b6a\u307fSiGe\/Si(110)\u306e\u5f62\u6210\u3068nMOSFET\u306e\u96fb\u5b50\u79fb\u52d5\u5ea6\u8a55\u4fa1
\u4e95\u9580\u8ce2\u8f14\uff0c\u5c0f\u5e61\u667a\u5e78\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[18a-B4-8]
\u8cbc\u308a\u5408\u308f\u305b\u6cd5\u306b\u3088\u308a\u4f5c\u88fd\u3057\u305f\u6b6a\u307fGOI\u69cb\u9020\u306e\u96fb\u6c17\u7279\u6027
\u9577\u5d8b\u667a\u5178\uff0c\u52dd\u4fe3\u6d0b\u5178\uff0c\u9060\u85e4\u51b4\u5df1\uff0c\u5c71\u7530\u664b\u4e5f\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[18a-B4-9]
\u5727\u7e2e\u6b6a\u307fSi\/Si1-XCX\/Si(100)\u30d8\u30c6\u30ed\u69cb\u9020\u306b\u304a\u3051\u308b\u7d50\u6676\u6b20\u9665\u5f62\u6210\u904e\u7a0b\u306e\u7814\u7a76
\u9152\u4e95\u7fd4\u4e00\u6717\uff0c\u53e4\u5ddd\u6d0b\u5fd7\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u661f\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[18a-B4-10]
\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308b\u9ad8Ge\u7d44\u6210\u4e00\u8ef8\u6b6a\u307fSiGe\u306e\u5f62\u6210
\u7c73\u5009\u745b\u4ecb\uff0c\u8358\u53f8\u96c4\u592a\u90ce\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

[19p-P8-7]
HEPES\u306b\u3088\u308bFe3Si\/Ge\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u5316\u5b66\u7d50\u5408\u72b6\u614b\u8a55\u4fa1\u2161
\u6afb\u4e95\u62d3\u4e5f\uff0c\u677e\u672c\u5b8f\u54c9\uff0c\u5c71\u7530\u664b\u4e5f\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u91ce\u5e73\u535a\u53f8<\/p>\n\n\n\n

\u7b2c60\u56de \u5fdc\u7528\u7269\u7406\u5b66\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\u30002013\u5e743\u6708<\/strong><\/p>\n\n\n\n

[28p-PA2-2]
Si+\u30a4\u30aa\u30f3\u6ce8\u5165\u306b\u3088\u308a\u5c0e\u5165\u3057\u305f\u70b9\u6b20\u9665\u306b\u95a2\u9023\u3059\u308bSiGe\u6df7\u6676\u4e2d\u306e\u30a2\u30af\u30bb\u30d7\u30bf\u6e96\u4f4d
\u4f50\u85e4\u5143\u6a39\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[29p-G7-10]
HEPES\u306b\u3088\u308bFe3Si\/Ge\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u8a55\u4fa1
\u677e\u672c\u5b8f\u54c9\uff0c\u5c71\u7530\u664b\u4e5f\uff0c\u7b20\u539f\u5065\u53f8\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u91ce\u5e73\u535a\u53f8<\/p>\n\n\n\n

[27p-PA4-11]
\u6c34\u7d20\u30e9\u30b8\u30ab\u30eb\u306b\u3088\u308b\u9077\u79fb\u91d1\u5c5e\u306e\u9078\u629e\u52a0\u71b1\u73fe\u8c61\u3092\u5229\u7528\u3057\u305f\u591a\u7d50\u6676Si\u5f62\u6210\u6280\u8853\u3068\u30c7\u30d0\u30a4\u30b9\u3078\u306e\u5fdc\u7528
\u4e2d\u5bb6\u5927\u5e0c\uff0c\u8352\u4e95\u54f2\u53f8\uff0c\u5927\u5e73\u9686\u88d5\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4f50\u85e4\u54f2\u4e5f\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u611b\u5a9b\u5927\u5b66\u3000\u677e\u5c71\u5927\u5b66\u30002012\u5e749\u6708<\/strong><\/p>\n\n\n\n

[13p-PA10-6]
\u89d2\u5ea6\u5206\u89e3X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u6cd5\u306b\u3088\u308bGe\u306b\u03b4\u30c9\u30fc\u30d7\u3057\u305fSb\u306e\u6df1\u3055\u65b9\u5411\u5206\u5e03
\u6e21\u9089\u5c06\u4eba\uff0c\u6991\u6797\u3000\u5fb9\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u91ce\u5e73\u535a\u53f8<\/p>\n\n\n\n

[13a-J-4]
n-Ge\u3078\u306eSb\u30c7\u30eb\u30bf\u30c9\u30fc\u30d4\u30f3\u30b0\u306b\u304a\u3051\u308bSi\u6dfb\u52a0\u306e\u52b9\u679c
\u7af9\u5185\u5609\u5bdb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u661f\u3000\u7950\u4ecb\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u4e38\u6cc9\u7422\u4e5f\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[13a-J-7]
CMP\u306b\u3088\u308bGe\u8868\u9762\u306e\u5e73\u5766\u5316\u3068\u6b6a\u307fGOI (111) \u57fa\u677f\u306e\u4f5c\u88fd
\u9060\u85e4\u51b4\u5df1\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u4e45\u4fdd\u667a\u53f2\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[13a-J-8]
\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308a\u6b6a\u307f\u5236\u5fa1\u3057\u305fSiGe\u7591\u4f3c\u57fa\u677f\u4e0a\u3078\u306e\u4e00\u8ef8\u6b6a\u307fSiGe\u30c1\u30e3\u30cd\u30eb\u5f62\u6210
\u8358\u53f8\u96c4\u592a\u90ce\uff0c\u6c38\u5009\u3000\u58ee\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[13a-J-11]
\u4f38\u5f35\u6b6a\u307fSi\/SiGe\/Si(110)\u8584\u819c\u69cb\u9020\u306e\u5f62\u6210\u3068pMOSFET\u306e\u7279\u6027\u8a55\u4fa1
\u4e09\u4e95\u7fd4\u5e73\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[11p-PB2-8]
\u786cX\u7dda\u5149\u96fb\u5b50\u5206\u5149\u6cd5\u306b\u3088\u308bSiO2\/4H-SiC\u69cb\u9020\u306e\u9178\u5316\u819c\u4e2d\u306e\u70ad\u7d20\u5206\u5e03\u306e\u63a8\u5b9a
\u5ca1\u7530\u8449\u6708\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u91ce\u5e73\u535a\u53f8<\/p>\n\n\n\n

2012\u5e74\u6625\u5b63 \u7b2c59\u56de \u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u65e9\u7a32\u7530\u5927\u5b66\u30002012\u5e743\u6708<\/strong><\/p>\n\n\n\n

[17a-B4-3]
Fe3Si\/n+-Ge\/n-Ge\u7d20\u5b50\u306b\u304a\u3051\u308b\u30b9\u30d4\u30f3\u84c4\u7a4d\u306e\u751f\u6210\u30fb\u691c\u51fa
\u7af9\u672c\u525b\u592a\u90ce\uff0c\u99ac\u5834\u96c4\u4e09\uff0c\u7b20\u539f\u5065\u53f8\uff0c\u5c71\u7530\u664b\u4e5f\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u6d5c\u5c4b\u5b8f\u5e73\u3000<\/p>\n\n\n\n

[17a-B4-10]
Si-MOSFET\u69cb\u9020\u306b\u304a\u3051\u308b\u30b9\u30d4\u30f3\u84c4\u7a4d\u306e\u691c\u51fa
\u771f\u5d0e\u7d18\u5e73\uff0c\u5b89\u85e4\u88d5\u4e00\u90ce\uff0c\u524d\u7530\u96c4\u4e5f\uff0c\u7b20\u539f\u5065\u53f8\uff0c\u5c71\u7530\u664b\u4e5f\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u6d5c\u5c4b\u5b8f\u5e73\u3000\u3000<\/p>\n\n\n\n

[17p-GP16-4]
\u7b2c\u4e00\u539f\u7406\u8a08\u7b97\u306b\u3088\u308bSb\u30c9\u30fc\u30d1\u30f3\u30c8\u8868\u9762\u504f\u6790\u6319\u52d5\u306e\u691c\u8a0e\uff083\uff09
\u98ef\u5cf6\u90c1\u5f25\uff0c\u4f0a\u85e4\u88d5\u7f8e\uff0c\u4e38\u6cc9\u7422\u4e5f\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

[15p-GP1-13]
Si-cap\u306b\u3088\u308bHfO2\/\u6b6a\u307fGe\u754c\u9762\u306eHf\u30b8\u30e3\u30fc\u30de\u30cd\u30a4\u30c8\u5f62\u6210\u306e\u6291\u5236
\u5c0f\u677e\u3000\u65b0\uff0c\u591a\u7530\u96bc\u4eba\uff0c\u6e21\u9089\u5c06\u4eba\uff0c\u90a3\u9808\u8ce2\u592a\u90ce\uff0c\u661f\u3000\u7950\u4ecb\uff0c\u6991\u6797\u3000\u5fb9\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u30df\u30ed\u30ce\u30d5 \u30de\u30af\u30b7\u30e0\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u91ce\u5e73\u535a\u53f8\u3000\u3000<\/p>\n\n\n\n

[16p-GP6-4]
Capping gate\u69cb\u9020\u3092\u6709\u3059\u308bSi\/SiGe\u91cf\u5b50\u30c9\u30c3\u30c8\u306e\u4f5c\u88fd\u3068\u8a55\u4fa1
\u798f\u5ca1\u4f51\u4e8c\uff0c\u5c0f\u5bfa\u54f2\u592b\uff0c\u6b66\u7530\u5065\u592a\uff0c\u5c0f\u5e61\u5229\u9855\uff0c\u5409\u7530\u52dd\u6cbb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5185\u7530\u3000\u5efa\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u6a3d\u8336\u6e05\u543e\uff0c\u5c0f\u7530\u4fca\u7406\u3000\u3000<\/p>\n\n\n\n

[17a-E3-2]
Ge\/SiGe \u30d8\u30c6\u30ed\u69cb\u9020\u4e2d\u306b\u5f62\u6210\u3055\u308c\u308b\u4e8c\u6b21\u5143\u6b63\u5b54\u30ac\u30b9\u4e2d\u306e\u6b63\u5b54\u6563\u4e71\u6a5f\u69cb\u306e\u89e3\u6790
\u7530\u4e2d\u8cb4\u4e45\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u4f0a\u85e4\u516c\u5e73\u3000\u3000<\/p>\n\n\n\n

[16a-F11-7]
\u5727\u7e2e\u6b6a\u307fSi\/Si1-XCX\/Si(100)\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u5f62\u6210\u3068\u8a55\u4fa1
\u9152\u4e95\u7fd4\u4e00\u6717\uff0c\u53e4\u5ddd\u6d0b\u5fd7\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

[16a-F11-8]
(110)\u50be\u659c\u57fa\u677f\u4e0a\u306b\u5f62\u6210\u3057\u305f\u6b6a\u307fSi\u306e\u96fb\u5b50\u79fb\u52d5\u5ea6\u3068\u7d50\u6676\u6027\u3068\u306e\u95a2\u4fc2
\u4e2d\u6fa4\u62d3\u5e0c\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

[16a-F11-9]
SiGe\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u6b63\u5b54\u79fb\u52d5\u5ea6\u6e2c\u5b9a
\u5c0f\u5e61\u667a\u5e78\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u53e4\u5ddd\u6d0b\u5fd7\u3000\u3000<\/p>\n\n\n\n

[16p-F11-3]
\u6c34\u7d20\u30e9\u30b8\u30ab\u30eb\u306b\u3088\u308b\u9078\u629e\u52a0\u71b1\u73fe\u8c61\u3092\u5229\u7528\u3057\u305fSi1-XGeX\u8584\u819c\u5f62\u6210\u6280\u8853
\u8352\u4e95\u54f2\u53f8\uff0c\u5ddd\u53e3\u88d5\u6a39\uff0c\u4e2d\u6751\u6d69\u4e4b\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4f50\u85e4\u54f2\u4e5f\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

[17a-DP4-2]
\u5727\u7e2e\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u5909\u8abf\u30c9\u30fc\u30d7\u69cb\u9020\u306e\u78c1\u6c17\u8f38\u9001\u7279\u6027
\u661f\u3000\u88d5\u4ecb\uff0c\u5b88\u8c37\u3000\u983c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u753a\u7530\u53cb\u6a39\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

[17a-DP4-5]
Si(110)\u57fa\u677f\u4e0a\u306b\u5f62\u6210\u3057\u305fSiGe nMOSFET\u306e\u96fb\u5b50\u79fb\u52d5\u5ea6\u306e\u8a55\u4fa1
\u4e95\u9580\u8ce2\u8f14\uff0c\u5c0f\u5e61\u667a\u5e78\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000\u3000\u3000<\/p>\n\n\n\n

\u7b2c72\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u5c71\u5f62\u5927\u5b66\u30002011\u5e748\u6708<\/strong><\/p>\n\n\n\n

[1p-J-3]
\u30b7\u30ea\u30b3\u30f3\u306e\u4fa1\u96fb\u5b50\u5e2f\u5206\u6563\u69cb\u9020\u306e2 \u8ef8\u5f15\u3063\u3071\u308a\u6b6a\u307f\u306b\u3088\u308b\u5909\u5316
\u6b66\u7530\u3055\u304f\u3089\uff0c\u7530\u7551\u88d5\u8cb4\uff0c\u5742\u7530\u667a\u88d5\uff0c\u30a2\u30e8\u30d6 \u30cc\u30eb\u3000\u30a4\u30c0\u30e6\uff0c\u524d\u5cf6\u5c1a\u884c\uff0c\u677e\u5ca1\u5f18\u61b2\uff0c\u7a32\u5ca1\u3000\u6bc5\uff0c\u6709\u99ac\u5065\u592a\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u624b\u585a\u3000\u52c9\uff0c\u7247\u5c71\u4fca\u6cbb\uff0c\u5409\u4e38\u6b63\u6a39\uff0c\u4eca\u6751\u3000\u5065\uff0c\u5927\u9580\u3000\u5bdb<\/p>\n\n\n\n

[1p-J-4]
\u7b2c\u4e00\u539f\u7406\u8a08\u7b97\u306b\u3088\u308b\u30c9\u30fc\u30d1\u30f3\u30c8\u8868\u9762\u504f\u6790\u6319\u52d5\u306e\u691c\u8a0e\uff08\uff12\uff09
\u98ef\u5cf6\u90c1\u5f25\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4e38\u6cc9\u7422\u4e5f<\/p>\n\n\n\n

[1p-M-11]
\u6c34\u7d20\u30e9\u30b8\u30ab\u30eb\u306b\u3088\u308b\u9078\u629e\u52a0\u71b1\u73fe\u8c61\u3092\u5229\u7528\u3057\u305f\u591a\u7d50\u6676Si1-xGex\u5f62\u6210\u6280\u8853
\u5ddd\u53e3\u88d5\u6a39\uff0c\u8352\u4e95\u54f2\u53f8\uff0c\u4e2d\u6751\u6d69\u4e4b\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4f50\u85e4\u54f2\u4e5f\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[1p-P10-3]
Si\/SiGe\u91cf\u5b50\u30c9\u30c3\u30c8\u69cb\u9020\u306e\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3068\u4f5c\u88fd
\u798f\u5ca1\u4f51\u4e8c\uff0c\u5c0f\u5bfa\u54f2\u592b\uff0c\u5927\u585a\u670b\u5ee3\uff0c\u6b66\u7530\u5065\u592a\uff0c\u5c0f\u5e61\u5229\u9855\uff0c\u5409\u7530\u52dd\u6cbb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5185\u7530\u5efa\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u6a3d\u8336\u6e05\u609f,\uff0c\u5c0f\u7530\u4fca\u7406<\/p>\n\n\n\n

[31a-P15-1]
2\u6bb5\u968e\u6210\u9577\u6cd5\u306b\u3088\u308bSi(111)\u57fa\u677f\u4e0aGe\u8584\u819c\u306e\u4f5c\u88fd
\u4e45\u4fdd\u667a\u53f2\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb \u3000<\/p>\n\n\n\n

[31a-P15-2]
Ge\/Si\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u3092\u5229\u7528\u3057\u305f\u8584\u819c\u6b6aGOI(111)\u69cb\u9020\u306e\u5f62\u6210
\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u767d\u6728\u9756\u5bdb\u3000<\/p>\n\n\n\n

\u7b2c58\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\u30002011\u5e743\u6708<\/strong><\/p>\n\n\n\n

[25a-KM-13]
\u30cf\u30f3\u30eb\u52b9\u679c\u6e2c\u5b9a\u3092\u7528\u3044\u305f\u5f37\u78c1\u6027\u5408\u91d1\/\u30b7\u30ea\u30b3\u30f3\u754c\u9762\u8fd1\u508d\u306b\u304a\u3051\u308b\u30b9\u30d4\u30f3\u84c4\u7a4d\u306e\u96fb\u6c17\u7684\u691c\u51fa
\u5b89\u85e4\u88d5\u4e00\u90ce\uff0c\u7b20\u539f\u5065\u53f8\uff0c\u5c71\u6839\u4e00\u9ad8\uff0c\u99ac\u5834\u96c4\u4e09\uff0c\u524d\u7530\u96c4\u4e5f\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u6d5c\u5c4b\u5b8f\u5e73\u3000<\/p>\n\n\n\n

[24p-KM-1]
\u5727\u7e2e\u6b6a\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u4e2d\u306e\u81ea\u5df1\u62e1\u6563
\u6cb3\u6751\u8e0a\u5b50\uff0c\u690d\u677e\u771f\u53f8\uff0c\u4f0a\u85e4\u516c\u5e73\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0cEugene Haller\uff0cMasksym Myronov<\/p>\n\n\n\n

[24p-KM-2]
\u7b2c\u4e00\u539f\u7406\u8a08\u7b97\u306b\u3088\u308b\u30c9\u30fc\u30d1\u30f3\u30c8\u8868\u9762\u504f\u6790\u6319\u52d5\u306e\u691c\u8a0e
\u98ef\u5cf6\u90c1\u5f25\uff0c\u5b89\u500d\u7ae0\u592a\u90ce\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4e38\u6cc9\u7422\u4e5f\u3000<\/p>\n\n\n\n

[27a-KW-4]
\u89d2\u5ea6\u5206\u89e3X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u6cd5\u306b\u3088\u308bHfO2\/Si\/\u6b6a\u307fGe\/SiGe\u69cb\u9020\u306e\u8a55\u4fa1 III
\u5c0f\u677e\u3000\u65b0\uff0c\u90a3\u9808\u8ce2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6991\u6797\u3000\u5fb9\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u30de\u30af\u30b7\u30e0 \u30df\u30ed\u30ce\u30d5\uff0c\u91ce\u5e73\u535a\u53f8\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

[26p-KV-6]
Si\/SiGe\u91cf\u5b50\u30c9\u30c3\u30c8\u4f5c\u88fd\u306b\u5411\u3051\u305fPd\u30c8\u30c3\u30d7\u30b2\u30fc\u30c8\u52d5\u4f5c\u70b9\u306e\u4f4e\u96fb\u5727\u5316
\u798f\u5ca1\u4f51\u4e8c\uff0c\u5c0f\u5bfa\u54f2\u592b\uff0c\u5927\u585a\u670b\u5ee3\uff0c\u6b66\u7530\u5065\u592a\uff0c\u5c0f\u5e61\u5229\u9855\uff0c\u5409\u7530\u52dd\u6cbb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5185\u7530\u3000\u5efa\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u6a3d\u8336\u6e05\u609f\uff0c\u5c0f\u7530\u4fca\u7406\u3000<\/p>\n\n\n\n

[27p-KF-2]
\u8cbc\u308a\u5408\u308f\u305b\u6cd5\u306b\u3088\u308b\u6b6a\u307fGOI\u57fa\u677f\u306e\u4f5c\u88fd
\u661f\u3000\u88d5\u4ecb\uff0c\u6822\u91ce\u7adc\u4e1e\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

[27p-KF-3]
\u6c34\u7d20\u30e9\u30b8\u30ab\u30eb\u306b\u3088\u308b\u9078\u629e\u52a0\u71b1\u73fe\u8c61\u3092\u5229\u7528\u3057\u305f\u591a\u7d50\u6676\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u5f62\u6210\u6280\u8853
\u8352\u4e95\u54f2\u53f8\uff0c\u4e2d\u6751\u6d69\u4e4b\uff0c\u5ddd\u53e3\u88d5\u6a39\uff0c\u5c71\u672c\u5343\u7dbe\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4f50\u85e4\u54f2\u4e5f\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

[27p-KF-6]
\u5727\u7e2e\u6b6a\u307fSiGe\/Si(110)\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u5f62\u6210\u3068\u7d20\u5b50\u5fdc\u7528
\u5c0f\u5e61\u667a\u5e78\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

[27p-KF-7]
Si(110)\u50be\u659c\u57fa\u677f\u4e0a\u306b\u5f62\u6210\u3055\u308c\u305f\u6b6a\u307fSi-nMOSFET\u306b\u304a\u3051\u308b\u96fb\u5b50\u79fb\u52d5\u5ea6\u306e\u8a55\u4fa1
\u4e2d\u6fa4\u62d3\u5e0c\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

[24p-KW-3]
\u30b7\u30ea\u30b3\u30f3\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u5206\u79d1\u4f1a\u7814\u7a76\u5968\u52b1\u8cde\u53d7\u8cde\u8a18\u5ff5\u8b1b\u6f14
\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u306b\u304a\u3051\u308b\u6b63\u5b54\u6709\u52b9\u8cea\u91cf\u306e\u6b6a\u307f\u4f9d\u5b58\u6027\u3068\u6563\u4e71\u6a5f\u69cb
\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u7576\u5c71\u6e05\u5f66\uff0c\u67a1\u5bcc\u9f8d\u4e00\uff0c\u5ca1\u672c\u3000\u5fb9\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb\u3000\u3000<\/p>\n\n\n\n

\u7b2c71\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u9577\u5d0e\u5927\u5b66\u30002010\u5e749\u6708<\/strong><\/p>\n\n\n\n

[15p-ZA-12]
\u89d2\u5ea6\u5206\u89e3X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u6cd5\u306b\u3088\u308bHfO2\/Si\/\u6b6aGe\/SiGe\u69cb\u9020\u306e\u8a55\u4fa1 II
\u5c0f\u677e\u3000\u65b0\uff0c\u90a3\u9808\u8ce2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6991\u6797\u3000\u5fb9\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u30df\u30ed\u30ce\u30d5 \u30de\u30af\u30b7\u30e0\uff0c\u91ce\u5e73\u535a\u53f8\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[14a-NC-1]
Si\/SiGe\u7cfb2DEG\u306ePd\u30b7\u30e7\u30c3\u30c8\u30b2\u30fc\u30c8\u5236\u5fa1\u306b\u3088\u308b\u7d50\u5408\u91cf\u5b50\u30c9\u30c3\u30c8\u306e\u4f5c\u88fd
\u798f\u5ca1\u4f51\u4e8c\uff0c\u5c0f\u5bfa\u54f2\u592b\uff0c\u5927\u585a\u670b\u5ee3\uff0c\u6b66\u7530\u5065\u592a\uff0c\u5c0f\u5e61\u5229\u9855\uff0c\u5409\u7530\u52dd\u6cbb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5185\u7530\u3000\u5efa\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u6a3d\u8336\u6e05\u609f\uff0c\u5c0f\u7530\u4fca\u7406<\/p>\n\n\n\n

[14p-NH-14]
CVD\u306b\u3088\u308a\u4f5c\u88fd\u3057\u305f\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u306e\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u6991\u6797\u3000\u5fb9\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u90a3\u9808\u8ce2\u592a\u90ce\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[14p-ZQ-3]
(110)\u9762\u3092\u8868\u9762\u306b\u6709\u3059\u308b\u6b6a\u307fSi\u306e\u6b63\u5b54\u79fb\u52d5\u5ea6\u3068\u7d50\u6676\u30e2\u30d5\u30a9\u30ed\u30b8\u30fc\u3068\u306e\u95a2\u4fc2
\u516b\u6728\u8061\u4ecb\uff0c\u25cb\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5d8b\u4e00\u96c4\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[14p-ZQ-4]
Ar+\u304a\u3088\u3073Si+\u30a4\u30aa\u30f3\u6ce8\u5165\u6b20\u9665\u304cSiGe\u5c64\u306e\u6b6a\u7de9\u548c\u306b\u4e0e\u3048\u308b\u5f71\u97ff
\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[14p-ZQ-5]
\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308bSi(111)\u57fa\u677f\u4e0a\u7de9\u548cSiGe\u30d0\u30c3\u30d5\u30a1\u5c64\u306e\u4f5c\u88fd
\u4e45\u4fdd\u667a\u53f2\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[14p-ZQ-6]
\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308a\u4f5c\u88fd\u3055\u308c\u308b\u4e00\u8ef8\u6027\u6b6a\u307fSiGe\u306e\u8868\u9762\u69cb\u9020\u8a55\u4fa1
\u6c38\u5009\u3000\u58ee\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[14p-ZQ-8]
Ge(111)\u3078\u306e\u9ad8\u6fc3\u5ea6Sb\u30c7\u30eb\u30bf\u30c9\u30fc\u30d4\u30f3\u30b0\u306b\u3088\u308b\u4f4e\u62b5\u6297\u30b3\u30f3\u30bf\u30af\u30c8\u5f62\u6210
\u7af9\u7530\u572d\u543e\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u7b20\u539f\u5065\u53f8\uff0c\u5c71\u6839\u4e00\u9ad8\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c57\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u6771\u6d77\u5927\u5b66\u30002010\u5e743\u6708<\/strong><\/p>\n\n\n\n

\u89d2\u5ea6\u5206\u89e3X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u6cd5\u306b\u3088\u308bHfO2\/Si\/\u6b6aGe\/SiGe\u69cb\u9020\u306e\u8a55\u4fa1
\u5c0f\u677e\u3000\u65b0\uff0c\u90a3\u9808\u8ce2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6991\u6797\u3000\u5fb9\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u30df\u30ed\u30ce\u30d5 \u30de\u30af\u30b7\u30e0\uff0c\u91ce\u5e73\u535a\u53f8\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u300c\u30b7\u30ea\u30b3\u30f3\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u5206\u79d1\u4f1a\u7814\u7a76\u5968\u52b1\u8cde\u53d7\u8cde\u8a18\u5ff5\u8b1b\u6f14\u300d\uff0815\u5206\uff09
Fe3Si\/Si\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u30c8\u30f3\u30cd\u30eb\u30d0\u30ea\u30a2\u3092\u4ecb\u3057\u305fSi\u3078\u306e\u30b9\u30d4\u30f3\u6ce8\u5165\u3068\u305d\u306e\u96fb\u6c17\u7684\u691c\u51fa
\u5b89\u85e4\u88d5\u4e00\u90ce\uff0c\u4e0a\u7530\u516c\u4e8c\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6728\u6751\u3000\u5d07\uff0c\u5bae\u5c3e\u6b63\u4fe1<\/p>\n\n\n\n

\u300c\u8b1b\u6f14\u5968\u52b1\u8cde\u53d7\u8cde\u8a18\u5ff5\u8b1b\u6f14\u300d\uff0815\u5206\uff09
Fe3Si\/Si\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u969c\u58c1\u3092\u4ecb\u3057\u305fSi\u3078\u306e\u96fb\u6c17\u7684\u30b9\u30d4\u30f3\u6ce8\u5165\u30fb\u691c\u51fa
\u7b20\u539f\u5065\u53f8\uff0c\u5b89\u85e4\u88d5\u4e00\u90ce\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u6728\u6751\u3000\u5d07\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5bae\u5c3e\u6b63\u4fe1<\/p>\n\n\n\n

Si\u30ad\u30e3\u30c3\u30d7\u5c64\u306b\u3088\u308b\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u306e\u6b6a\u307f\u5b89\u5b9a\u6027\u5411\u4e0a
\u90a3\u9808\u8ce2\u592a\u90ce\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6991\u6797\u3000\u5fb9\uff0c\u30df\u30ed\u30ce\u30d5 \u30de\u30af\u30b7\u30e0\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Ge\u6fc3\u7e2e\u5c64\/SiGe\u5c64\/Si(100)\u69cb\u9020\u306e\u5f62\u6210\u3068\u7d20\u5b50\u5fdc\u7528
\u5965\u6751\u666f\u661f\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4f50\u85e4\u5143\u6a39\uff0c\u4e95\u4e0a\u6a39\u7bc4\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308a\u4f5c\u88fd\u3055\u308c\u305f\u4e00\u8ef8\u6027\u6b6a\u307fSiGe\u306e\u6b6a\u307f\u72b6\u614b\u306b\u4e0e\u3048\u308b\u30e1\u30b5\u30a8\u30c3\u30c1\u306e\u5f71\u97ff
\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5c71\u7530\u6df3\u77e9\uff0c\u6c38\u5009\u3000\u58ee\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u71b1\u51e6\u7406\u306e\u6b6a\u307fSi1-yCy\/Si\u30d8\u30c6\u30ed\u69cb\u9020\u3068\u7d20\u5b50\u7279\u6027\u306b\u4e0e\u3048\u308b\u5f71\u97ff
\u9577\u846d\u4e00\u5229\uff0c\u4f50\u85e4\u5143\u6a39\uff0c\u4e95\u4e0a\u6a39\u7bc4\uff0c\u4f0a\u85e4\u7ae0\u5f18\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u68ee\u8c37\u3000\u6566\uff0c\u4e95\u30ce\u53e3\u6cf0\u5553\uff0c\u56fd\u4e95\u6cf0\u592b<\/p>\n\n\n\n

\u4f4e\u62b5\u6297\u30b3\u30f3\u30bf\u30af\u30c8\u5f62\u6210\u3078\u5411\u3051\u305fGe\u3078\u306eSb\u30c7\u30eb\u30bf\u30c9\u30fc\u30d4\u30f3\u30b0\u3068\u305d\u306e\u504f\u6790\u73fe\u8c61
\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u7b20\u539f\u5065\u53f8\uff0c\u5c71\u6839\u4e00\u9ad8\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u5bae\u5c3e\u6b63\u4fe1\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c70\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u5bcc\u5c71\u5927\u5b66\u30002009\u5e749\u6708<\/strong><\/p>\n\n\n\n

Fe3Si\/Ge\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u754c\u9762\u306e\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u4f1d\u5c0e\u7279\u6027\u8a55\u4fa1
\u5c71\u6839\u4e00\u9ad8\uff0c\u698e\u672c\u96c4\u5fd7\uff0c\u6751\u4e0a\u9054\u5f66\uff0c\u5c71\u672c\u5065\u58eb\uff0c\u5b89\u85e4\u88d5\u4e00\u90ce\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4f50\u9053\u6cf0\u9020\uff0c\u5bae\u5c3e\u6b63\u4fe1<\/p>\n\n\n\n

\u300cJJAP\u8ad6\u6587\u5968\u52b1\u8cde\u53d7\u8cde\u8a18\u5ff5\u8b1b\u6f14\u300d\uff0820\u5206\uff09
Introduction of Uniaxial Strain into Si\/Ge Heterostructures by Selective Ion Implantation
\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u969c\u58c1\u3092\u4ecb\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u3078\u306e\u30b9\u30d4\u30f3\u6ce8\u5165\u3068\u305d\u306e\u96fb\u6c17\u7684\u691c\u51fa
\u7b20\u539f\u5065\u53f8\uff0c\u5b89\u85e4\u88d5\u4e00\u90ce\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u6728\u6751\u3000\u5d07\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5bae\u5c3e\u6b63\u4fe1<\/p>\n\n\n\n

[10a-P6-6]
HfO2\/\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u5909\u8abf\u30c9\u30fc\u30d7\u69cb\u9020\u306b\u304a\u3051\u308b\u6b63\u5b54\u79fb\u52d5\u5ea6\u306e\u6b63\u5b54\u5bc6\u5ea6\u4f9d\u5b58\u6027
\u661f\u3000\u88d5\u4ecb\uff0c\u4f50\u85e4\u3000\u96c4\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5c0f\u5ddd\u4f51\u592a\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

[10a-P6-7]
Si(111)\u57fa\u677f\u4e0a\u3078\u306eSiGe\u5c64\u306eMBE\u6210\u9577\u3068\u7d50\u6676\u6027\u8a55\u4fa1
\u5c0f\u5ddd\u4f51\u592a\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

As+, B+, Si+ \u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305fSi-C\u6df7\u6676\u534a\u5c0e\u4f53\u819c\u306eRTA\u51e6\u7406\u306b\u3088\u308b\u7d44\u7e54\u5909\u5316
\u4e95\u4e0a\u6a39\u7bc4\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u68ee\u8c37\u3000\u6566\uff0c\u4e95\u30ce\u53e3\u6cf0\u5553\uff0c\u56fd\u4e95\u6cf0\u592b<\/p>\n\n\n\n

(110)\u9762\u4e0a\u306b\u5f62\u6210\u3055\u308c\u305f\u6b6a\u307fSi\u8584\u819c\u306e\u7d50\u6676\u6027\u306e\u6539\u5584
\u516b\u6728\u8061\u4ecb\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5d8b\u4e00\u96c4\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u30bd\u30fc\u30b9\uff0f\u30c9\u30ec\u30a4\u30f3\u306e\u5f37\u78c1\u6027\u30b7\u30ea\u30b5\u30a4\u30c9\u5316\u3068\u30b9\u30d4\u30f3\u6ce8\u5165\uff1aSi\u7cfb\u30b9\u30d4\u30f3\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u5b9f\u73fe\u3092\u76ee\u6307\u3057\u3066\uff0830\u5206\uff09
\u5bae\u5c3e\u6b63\u4fe1\uff0c\u6d5c\u5c4b\u5b8f\u5e73\uff0c\u6728\u6751\u3000\u5d07\uff0c\u4f0a\u85e4\u535a\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

\u7b2c56\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u7b51\u6ce2\u5927\u5b66\u30002009\u5e743\u6708<\/strong><\/p>\n\n\n\n

\u03bc\u6ce2\u30d7\u30e9\u30ba\u30de\u52a0\u71b1\u306b\u3088\u308b\u91d1\u5c5e\u306e\u9078\u629e\u52a0\u71b1\u73fe\u8c61\u3092\u5229\u7528\u3057\u305f\u591a\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u5f62\u6210\u6280\u88532
\u8352\u4e95\u54f2\u53f8\uff0c\u6709\u6cc9\u3000\u6167\uff0c\u6c60\u91ce\u7950\u559c\uff0c\u677f\u5c71\u6cf0\u88d5\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4f50\u85e4\u54f2\u4e5f\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

As+\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305fSi-C\u6df7\u6676\u534a\u5c0e\u4f53\u8584\u819c\u306eRTA\u51e6\u7406\u306b\u3088\u308b\u7d44\u7e54\u5909\u5316
\u4e95\u4e0a\u6a39\u7bc4\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u68ee\u8c37\u3000\u6566\uff0c\u4e95\u30ce\u53e3\u6cf0\u5553\uff0c\u56fd\u4e95\u6cf0\u592b<\/p>\n\n\n\n

\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308aSiGe\u5c64\u306b\u5c0e\u5165\u3055\u308c\u308b\u4e00\u8ef8\u6027\u6b6a\u307f\u72b6\u614b\u306e\u7dda\u5e45\u4f9d\u5b58\u6027
\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5e73\u5ca1\u826f\u5eb7\uff0c\u5c71\u7530\u6df3\u77e9\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u4e2d\u90e8\u5927\u5b66\u30002008\u5e749\u6708<\/strong><\/p>\n\n\n\n

\u30b7\u30ea\u30b3\u30f3\u4e2d\u30ea\u30f3\u4e0d\u7d14\u7269\u306e\u4f4e\u78c1\u5834\u78c1\u6c17\u5171\u9cf4
\u68ee\u4e0b\u5f18\u6a39\uff0c\u7530\u4e2d\u5f18\u9686\uff0c\u4ed9\u5834\u6d69\u4e00\uff0c\u30ec\u30aa\u30cb\u30c9 \u30d6\u30e9\u30bb\u30f3\u30b3\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u4f0a\u85e4\u516c\u5e73<\/p>\n\n\n\n

\u03bc\u6ce2\u30d7\u30e9\u30ba\u30de\u4e2d\u306e\u91d1\u5c5e\u306e\u9078\u629e\u52a0\u71b1\u73fe\u8c61\u3092\u5229\u7528\u3057\u305f\u591a\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u5f62\u6210\u6280\u8853
\u6709\u6cc9\u3000\u6167\uff0c\u82a6\u6fa4\u91cc\u6a39\uff0c\u6c60\u91ce\u7950\u559c\uff0c\u677f\u5c71\u6cf0\u88d5\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u8352\u4e95\u54f2\u53f8\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u975e\u6676\u8ceaSi\u306e\u7d30\u7dda\u52a0\u5de5\u306b\u3088\u308b\u56fa\u76f8\u6210\u9577\u591a\u7d50\u6676Si\u5185\u90e8\u306e\u5fdc\u529b\u5206\u5e03\u306e\u5236\u5fa1
\u677f\u5c71\u6cf0\u88d5\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Ge\u540c\u4f4d\u4f53\u8d85\u683c\u5b50\u3092\u7528\u3044\u305fGe\u81ea\u5df1\u62e1\u6563\u3068\u7812\u7d20\u62e1\u6563\u306e\u540c\u6642\u89b3\u6e2c\u306b\u3088\u308bGe\u4e2d\u306e\u62e1\u6563\u6a5f\u69cb\u306e\u89e3\u660e
\u9577\u7e04\u7f8e\u6a39\uff0c\u6e05\u6c34\u5eb7\u96c4\uff0c\u690d\u677e\u771f\u53f8\uff0c\u4f0a\u85e4\u516c\u5e73\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Si\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308a\u4f5c\u88fd\u3055\u308c\u305fSiGe\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306e\u6b6a\u7de9\u548c\u904e\u7a0b
\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5e73\u5ca1\u826f\u5eb7\uff0c\u5c71\u7530\u6df3\u77e9\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Si(110)\u57fa\u677f\u4e0a\u306b\u5f62\u6210\u3057\u305f\u6b6a\u307fSi\/SiGe\u69cb\u9020\u306e\u6b6a\u307f\u89e3\u6790
\u6709\u5143\u572d\u4ecb\uff0c\u77e2\u5d8b\u5229\u5f66\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5d8b\u4e00\u96c4\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u306b\u3088\u308a\u4f5c\u88fd\u3057\u305fSiGe\u5c64\u306b\u304a\u3051\u308b\u4e00\u8ef8\u6027\u6b6a\u307f\u306e\u89b3\u6e2c
\u5c71\u7530\u6df3\u77e9\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u5e73\u5ca1\u826f\u5eb7\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u6b6a\u307fSi\/SiGe\u30d8\u30c6\u30ed\u69cb\u9020\u306b\u304a\u3051\u308b2\u6b21\u5143\u96fb\u5b50\u30ac\u30b9\u306e\u96fb\u6c17\u8f38\u9001\u7279\u6027\u306e\u8a55\u4fa1
\u6176\u5927\u7406\u5de5\uff0c\u6b66\u8535\u5de5\u5927\u7dcf\u7814\u3000\u571f\u5c4b\u3000\u8c6a\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u4f0a\u85e4\u516c\u5e73<\/p>\n\n\n\n

\u7b2c55\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u65e5\u672c\u5927\u5b66\u30002008\u5e743\u6708<\/strong><\/p>\n\n\n\n

\u30b7\u30ea\u30b3\u30f3\u4e2d\u306e\u30ea\u30f3\u4e0d\u7d14\u7269\u78c1\u6c17\u5171\u9cf4\u306e\u96fb\u6c17\u7684\u691c\u51fa
\u68ee\u4e0b\u5f18\u6a39\uff0c\u4f0a\u85e4\u516c\u5e73\uff0c\u7530\u4e2d\u5f18\u9686\uff0c\u4ed9\u5834\u6d69\u4e00\uff0c\u30d6\u30e9\u30f3\u30bb\u30b3\u30ec\u30aa\u30cb\u30c9\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u30de\u30a4\u30af\u30ed\u6ce2\u30d7\u30e9\u30ba\u30de\u52a0\u71b1\u306b\u3088\u308b\u975e\u6676\u8cea\u30b7\u30ea\u30b3\u30f3\u306e\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u52a0\u71b1\u6a5f\u69cb
\u82a6\u6fa4\u91cc\u6a39\uff0c\u6709\u6cc9\u3000\u6167\uff0c\u4e09\u4e95\u3000\u5b9f\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u8352\u4e95\u54f2\u53f8\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9Si\u306e\u56fa\u76f8\u7d50\u6676\u6210\u9577\u306b\u4e0e\u3048\u308b\u9178\u5316\u819c\u57fa\u677f\u5f62\u72b6\u306e\u5f71\u97ff
\u677f\u5c71\u6cf0\u88d5\uff0c\u4e09\u4e95\u3000\u5b9f\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u50be\u659c\u7d44\u6210SiGe\/Si(110)\u3068\u5747\u4e00SiGe\/(110)\u306e\u6b6a\u307f\u7de9\u548c\u6a5f\u69cb
\u6e21\u908a\u6b63\u4eba\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5d8b\u4e00\u96c4\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308b\u9ad8Ge\u7d44\u6210\u8584\u819c\u7de9\u548cSiGe\u5c64\u306e\u958b\u767a
\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5e73\u5ca1\u826f\u5eb7\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u9078\u629e\u7684\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308bSiGe\u5c64\u306e\u9762\u5185\u6b6a\u307f\u5236\u5fa1
\u5e73\u5ca1\u826f\u5eb7\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6cb3\u5357\u4fe1\u6cbb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u9078\u629e\u6210\u9577\u3092\u5229\u7528\u3057\u305fV\u6e9d\u57fa\u677f\u4e0a\u3078\u306eSiGe\u7d30\u7dda\u5f62\u6210\u3068\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u5ddd\u53e3\u5143\u6c17\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u6e05\u6c34\u9999\u5948\uff0c\u6e21\u908a\u6b63\u4eba\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u69cb\u9020\u306b\u304a\u3051\u308b\u6b63\u5b54\u79fb\u52d5\u5ea6\u306e\u6b63\u5b54\u5bc6\u5ea6\u4f9d\u5b58\u6027
\u4f50\u85e4\u3000\u96c4\uff0c\u56fd\u53f8\u4f91\u543e\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u7576\u5c71\u6e05\u5f66\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5ca1\u672c\u3000\u5fb9\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u9ad8\u79fb\u52d5\u5ea6p-MOSFET\u306e\u305f\u3081\u306e\u8868\u9762Ge\u6fc3\u7e2e\u5c64\/\u6b6a\u307fSiGe\u5c64\u69cb\u9020\u306e\u5f62\u6210
\u4f50\u85e4\u5143\u6a39\uff0c\u5965\u6751\u666f\u661f\uff0c\u4e95\u4e0a\u6a39\u7bc4\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5d8b\u4e00\u96c4\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u5317\u6d77\u9053\u5de5\u696d\u5927\u5b66\u30002007\u5e748\u6708<\/strong><\/p>\n\n\n\n

\u975e\u6676\u8cea\u30b7\u30ea\u30b3\u30f3\u306e\u30de\u30a4\u30af\u30ed\u6ce2\u52a0\u71b1\u306b\u3088\u308b\u7d50\u6676\u5316\u306e\u96f0\u56f2\u6c17\u4f9d\u5b58\u6027
\u82a6\u6fa4\u91cc\u6a39\uff0c\u4e09\u4e95\u3000\u5b9f\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u8352\u4e95\u54f2\u53f8\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7121\u640d\u50b7\u4e2d\u6027\u7c92\u5b50\u30d3\u30fc\u30e0\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u7528\u3044\u305fSiGe\u91cf\u5b50\u30ca\u30ce\u30c7\u30a3\u30b9\u30af\u7a4d\u5c64\u69cb\u9020\u306e\u4f5c\u88fd2
\u7c73\u5143\u96c5\u6d69\uff0c\u5bae\u672c\u3000\u8061\uff0c\u5e73\u91ce\u68a8\u4f0a\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4f0a\u85e4\u516c\u5e73\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u5bd2\u5ddd\u8aa0\u4e8c<\/p>\n\n\n\n

TEOS\u9178\u5316\u819c\u306e\u5806\u7a4d\u306b\u3088\u308bsSOI\u69cb\u9020\u306e\u71b1\u7684\u5b89\u5b9a\u6027\u306e\u6539\u5584
\u661f\u3000\u88d5\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u30a4\u30a2\u30f3\u30ad\u30e3\u30ea\u30d5\u30a9\u30fc\uff0c\u5409\u898b\u3000\u4fe1\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Si(110)\u57fa\u677f\u4e0a\u306b\u6210\u9577\u3057\u305f\u50be\u659c\u7d44\u6210SiGe\u306e\u30e2\u30d5\u30a9\u30ed\u30b8\u30fc\u306e\u6210\u9577\u6e29\u5ea6\u4f9d\u5b58\u6027
\u6e21\u908a\u6b63\u4eba\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5d8b\u4e00\u96c4\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u5727\u7e2e\u6b6a\u307fGe\u306b\u304a\u3051\u308b\u6b63\u5b54\u6709\u52b9\u8cea\u91cf\u306e\u6b63\u5b54\u5bc6\u5ea6\u4f9d\u5b58\u6027\u306b\u95a2\u3059\u308b\u8a08\u7b97
\u6709\u5143\u572d\u4ecb\uff0c\u56fd\u53f8\u4f91\u543e\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4f50\u85e4\u3000\u512a\uff0c\u7576\u5c71\u6e05\u5f66\uff0c\u5ca1\u672c\u3000\u5fb9\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Demonstration of SiGe heterostructures with room-temperature 2DHG drift mobility and carrier density exceeding those of 2DEG
\u30de\u30af\u30b7\u30e0\u30df\u30ed\u30ce\u30d5\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4f0a\u85e4\u516c\u5e73\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308a\u4f5c\u88fd\u3057\u305f\u8584\u819cSiGe\u7de9\u548c\u5c64\u4e0a\u306e\u6b6a\u307fSi-nMOSFET
\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u798f\u672c\u6566\u4e4b\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Si\/\u6b6a\u307fSiGe\/Si \u69cb\u9020\u3092\u7528\u3044\u3066\u5f62\u6210\u3057\u305f\u9178\u5316\u819c\/\u534a\u5c0e\u4f53\u306e\u754c\u9762\u72b6\u614b\u306b\u4e0e\u3048\u308b\u71b1\u9178\u5316\u6642\u9593\u306e\u5f71\u97ff
\u4e09\u4e95\u3000\u5b9f\uff0c\u91ce\u6fa4\u660e\u5b50\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4f50\u85e4\u54f2\u4e5f\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u798f\u7530\u5e78\u592b\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c54\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u9752\u5c71\u5b66\u9662\u5927\u5b66\u30002007\u5e743\u6708<\/strong><\/p>\n\n\n\n

\u91d1\u5c5e\u8a98\u8d77\u56fa\u76f8\u6210\u9577\u6cd5\u306b\u304a\u3051\u308b\u96f0\u56f2\u6c17\u306e\u5f71\u97ff
\u5800\u6c5f\u5fe0\u53f8\uff0c\u4e09\u4e95\u3000\u5b9f\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u68ee\u8c37\u667a\u4e00\uff0c\u571f\u4e95\u3000\u7a14<\/p>\n\n\n\n

\u30de\u30a4\u30af\u30ed\u6ce2\u52a0\u71b1\u306b\u3088\u308b\u975e\u6676\u8cea\u30b7\u30ea\u30b3\u30f3\u306e\u7d50\u6676\u5316
\u82a6\u6fa4\u91cc\u6a39\uff0c\u4e09\u4e95\u3000\u5b9f\uff0c\u5800\u6c5f\u5fe0\u53f8\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u8352\u4e95\u54f2\u53f8\uff0c\u9ad8\u677e\u5229\u884c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7121\u640d\u50b7\u4e2d\u6027\u7c92\u5b50\u30d3\u30fc\u30e0\u52a0\u5de5\u3092\u7528\u3044\u305fSiGe\u91cf\u5b50\u30ca\u30ce\u30c7\u30a3\u30b9\u30af\u7a4d\u5c64\u69cb\u9020\u306e\u4f5c\u88fd
\u9f4b\u85e4\u3000\u5353\uff0c\u7c73\u5143\u96c5\u6d69\uff0c\u76f8\u826f\u6681\u5f66\uff0c\u5bae\u672c\u3000\u8061\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4f0a\u85e4\u516c\u5e73\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u5bd2\u5ddd\u8aa0\u4e8c<\/p>\n\n\n\n

SiGe\u6b6a\u307f\u7d30\u7dda\u69cb\u9020\u306e\u69cb\u9020\u8a55\u4fa1\u3068\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u6e05\u6c34\u9999\u5948\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u5206\u5b50\u7dda\u5806\u7a4d\u306b\u3088\u308bSiO2\u57fa\u677f\u4e0a\u591a\u7d50\u6676SiGe\u8584\u819c\u306e\u5f62\u6210
\u4e09\u4e95\u3000\u5b9f\uff0c\u7530\u672c\u3000\u5b88\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Si(110)\u57fa\u677f\u3078\u306e\u50be\u659c\u7d44\u6210SiGe \u5c64\u306e\u30ac\u30b9\u30bd\u30fc\u30b9MBE\u6210\u9577
\u6709\u5143\u572d\u4ecb\uff0c\u6e21\u908a\u6b63\u4eba\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Si+\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308b\u9ad8\u54c1\u8ceaSiGe\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306e\u4f5c\u88fd
\u661f\u3000\u88d5\u4ecb\uff0c\u798f\u672c\u6566\u4e4b\uff0c\u5e73\u5ca1\u826f\u5eb7\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u30ce\u30f3\u30c9\u30fc\u30d7SGOI\u5c64\u306e\u96fb\u6c17\u7279\u6027\u306e\u8a55\u4fa1
\u4f50\u85e4\u5143\u6a39\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u69cb\u9020\u306b\u304a\u3051\u308b\u6b63\u5b54\u6709\u52b9\u8cea\u91cf\u306e\u6b63\u5b54\u5bc6\u5ea6\u4f9d\u5b58\u6027
\u56fd\u53f8\u4f91\u543e\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4f50\u85e4\u3000\u96c4\uff0c\u7576\u5c71\u6e05\u5f66\uff0c\u5ca1\u672c\u3000\u5fb9\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\/SiGe\u64ec\u4f3c\u57fa\u677f\u306e\u79fb\u52d5\u5ea6\u30b9\u30da\u30af\u30c8\u30eb\u89e3\u6790
\u6bdb\u5229\u53cb\u9686\uff0c\u4f0a\u85e4\u516c\u5e73\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u30df\u30ed\u30ce\u30d5\u30de\u30af\u30b7\u30e0\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u7acb\u547d\u9928\u5927\u5b66\u30002006\u5e748\u6708<\/strong><\/p>\n\n\n\n

Ge\u5c64\u3092\u5c0e\u5165\u3057\u305f\u4f4e\u6e29\u30bd\u30fc\u30b9\u30fb\u30c9\u30ec\u30a4\u30f3\u9818\u57df\u5f62\u6210\u6cd5\u3068\u305d\u306e\u30a4\u30aa\u30f3\u6ce8\u5165\u6761\u4ef6\u306e\u691c\u8a0e
\u4e09\u4e95\u3000\u5b9f\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

SiGe\u6b6a\u307f\u7d30\u7dda\u69cb\u9020\u306e\u5f62\u6210
\u6e05\u6c34\u9999\u5948\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Ge\u30c1\u30e3\u30cd\u30eb\u69cb\u9020\u306b\u304a\u3051\u308b\u6b63\u5b54\u6709\u52b9\u8cea\u91cf\u306e\u6b6a\u307f\u4f9d\u5b58\u6027
\u56fd\u53f8\u4f91\u543e\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u7576\u5c71\u6e05\u5f66\uff0c\u5ca1\u672c\u3000\u5fb9\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Ge\u30c1\u30e3\u30cd\u30eb\u69cb\u9020\u306b\u304a\u3051\u308b\u6563\u4e71\u8981\u56e0\u306e\u6b6a\u307f\u4f9d\u5b58\u6027
\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u7576\u5c71\u6e05\u5f66\uff0c\u5ca1\u672c\u3000\u5fb9\uff0c\u56fd\u53f8\u4f91\u543e\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u539a\u819c\u6b6a\u307fSOI(sSOI)\u69cb\u9020\u306e\u71b1\u7684\u5b89\u5b9a\u6027
\u661f\u3000\u88d5\u4ecb\uff0c\u798f\u672c\u6566\u4e4b\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u30a4\u30a2\u30f3\u30ad\u30e3\u30ea\u30d5\u30a9\u30fc\uff0c\u5409\u898b\u3000\u4fe1\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c53\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u6b66\u8535\u5de5\u696d\u5927\u5b66\u30002006\u5e743\u6708<\/strong><\/p>\n\n\n\n

\u8d70\u67fb\u578b\u30c8\u30f3\u30cd\u30eb\u9855\u5fae\u93e1\u3092\u7528\u3044\u305fSiGe-pn\u63a5\u5408\u306e\u8a55\u4fa1
\u7530\u4e2d\u7950\u99ac\uff0c\u5965\u4e95\u767b\u5fd7\u5b50\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Ge\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308b\u8d85\u5e73\u5766\u306a\u8584\u819cSiGe\u7de9\u548c\u5c64\u306e\u4f5c\u88fd
\u798f\u672c\u6566\u4e4b\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

SiGe\u64ec\u4f3c\u57fa\u677f\u306e\u6b6a\u307f\u5834\u3086\u3089\u304e\u304c\u305d\u306e\u8868\u9762\u6d17\u6d44\u5de5\u7a0b\u306b\u4e0e\u3048\u308b\u5f71\u97ff
\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5927\u7af9\u7701\u81ea\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u30ac\u30b9\u30bd\u30fc\u30b9MBE\u6cd5\u306b\u3088\u308a\u4f5c\u88fd\u3057\u305fSiGe\/Si(110)\u306b\u304a\u3051\u308b\u6b6a\u307f\u7de9\u548c\u6a5f\u69cb\u306e\u6210\u9577\u6e29\u5ea6\u4f9d\u5b58\u6027
\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u30ce\u30f3\u30c9\u30fc\u30d7\u7de9\u548cSiGe\u306e\u96fb\u6c17\u7279\u6027\u306e\u8a55\u4fa1
\u4f50\u85e4\u5143\u6a39\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u5fb3\u5cf6\u5927\u5b66\u30002005\u5e749\u6708<\/strong><\/p>\n\n\n\n

Strain relaxation and surface morphology of new type thin SiGe virtual substrates
\u30df\u30ed\u30ce\u30d5\u30de\u30af\u30b7\u30e0\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

SiGe\u7de9\u548c\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306b\u304a\u3051\u308b\u6b6a\u307f\u5834\u306e\u819c\u539a\u4f9d\u5b58\u6027
\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5927\u7af9\u7701\u81ea\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u30e9\u30de\u30f3\u5206\u5149\u6cd5\u306b\u3088\u308bSi(110)\u57fa\u677f\u4e0a\u306e\u6b6a\u307fSi\u8584\u819c\u306e\u6b6a\u307f\u7387\u6e2c\u5b9a
\u6709\u5143\u572d\u4ecb\uff0c\u6c60\u7530\u5468\u5e73\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686<\/p>\n\n\n\n

\u6b6a\u307fSOI (sSOI) \u69cb\u9020\u306e\u71b1\u7684\u5b89\u5b9a\u6027
\u798f\u672c\u6566\u4e4b1\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u661f\u3000\u88d5\u4ecb\uff0c\u5409\u898b\u3000\u4fe1\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u69cb\u9020\u306b\u304a\u3051\u308b\u6b63\u5b54\u79fb\u52d5\u5ea6\u306e\u6b63\u5b54\u6fc3\u5ea6\u4f9d\u5b58\u6027
\u4f50\u85e4\u3000\u5149\uff0c\u56fd\u53f8\u4f91\u543e\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u4e2d\u5ddd\u6e05\u548c<\/p>\n\n\n\n

SiO2\u4e0a\u306b\u5f62\u6210\u3057\u305f\u591a\u7d50\u6676SiGe-TFT\u306e\u30ea\u30fc\u30af\u96fb\u6d41\u8a55\u4fa1
\u4e09\u4e95\u3000\u5b9f\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

SiO2\/Si1-xGex\u754c\u9762\u306e\u96fb\u6c17\u7684\u8a55\u4fa1
\u571f\u5c4b\u52c7\u4ecb\uff0c\u4e09\u4e95\u3000\u5b9f\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u4f50\u85e4\u54f2\u4e5f\uff0c\u798f\u7530\u5e78\u592b\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c52\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u57fc\u7389\u5927\u5b66\u30002005\u5e743\u6708<\/strong><\/p>\n\n\n\n

Ge\u3092\u7528\u3044\u305f\u65b0\u898f\u4f4e\u6e29\u30bd\u30fc\u30b9\u30c9\u30ec\u30a4\u30f3\u9818\u57df\u5f62\u6210\u6cd5
\u4e09\u4e95\u3000\u5b9f\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Si(110)\u57fa\u677f\u4e0a\u306eSiGe\u8584\u819c\u306e\u7d50\u6676\u69cb\u9020\u89e3\u6790\uff082\uff09
\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u9ec4\u3000\u664b\u4e8c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686<\/p>\n\n\n\n

Si\u8584\u819c\u306e\u7d2b\u5916\u5149\u52b1\u8d77\u30e9\u30de\u30f3\u5206\u5149\u6cd5\u3092\u7528\u3044\u305f\u30ca\u30ce\u30ec\u30d9\u30eb\u6df1\u3055\u5206\u89e3\u80fd\u5fdc\u529b\u8a55\u4fa1
\u677e\u7530\u666f\u5b50\uff0c\u6749\u6c5f\u9686\u4e00\uff0c\u6751\u4e0a\u660c\u5b5d\uff0c\u4e95\u4e0a\u656c\u5b50\uff0c\u5409\u5ddd\u6b63\u4fe1\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce<\/p>\n\n\n\n

\u7b2c65\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u6771\u5317\u5b66\u9662\u5927\u5b66\u30002004\u5e749\u6708<\/strong><\/p>\n\n\n\n

\u591a\u7d50\u6676SiGe\u8584\u819c\u306e\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027\u8a55\u4fa1
\u4e09\u4e95\u3000\u5b9f\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Si\u57fa\u677f\u4e0a\u306b\u6210\u9577\u3057\u305f\u30ce\u30f3\u30c9\u30fc\u30d7\u7de9\u548cSiGe\u306e\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u4f50\u85e4\u5143\u6a39\uff0c\u571f\u5c4b\u52c7\u4ecb\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u9ec4\u3000\u664b\u4e8c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u30d8\u30c6\u30ed\u69cb\u9020\u306b\u304a\u3051\u308b\u79fb\u52d5\u5ea6\u306e\u6b6a\u307f\u4f9d\u5b58\u6027
\u963f\u90e8\u6cf0\u5b8f\uff0c\u5c0f\u6fa4\u512a\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u670d\u90e8\u5065\u96c4\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u6b6a\u307fGe\u30c1\u30e3\u30cd\u30eb\u5909\u8abf\u30c9\u30fc\u30d7\u69cb\u9020\u306b\u304a\u3051\u308bSiGe\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u8868\u9762\u30e9\u30d5\u30cd\u30b9\u306e\u5f71\u97ff
\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u963f\u90e8\u6cf0\u5b8f\uff0c\u5c0f\u6fa4\u512a\u4ecb\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u670d\u90e8\u5065\u96c4\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u7b2c51\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u6771\u4eac\u5de5\u79d1\u5927\u5b66\u30002004\u5e743\u6708<\/strong><\/p>\n\n\n\n

Si(110)\u57fa\u677f\u4e0a\u306eSiGe\u8584\u819c\u306e\u7d50\u6676\u69cb\u9020\u89e3\u6790
\u6709\u5143\u572d\u4ecb\uff0c\u962a\u672c\u3000\u9756\uff0c\u5e03\u7559\u5ddd\u5927\u8f14\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u9ec4\u3000\u664b\u4e8c\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u5b87\u4f50\u7f8e\u5fb3\u96863<\/p>\n\n\n\n

\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308bSiGe\u7de9\u548c\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306e\u6b6a\u307f\u3086\u3089\u304e\u306e\u4f4e\u6e1b
\u5c0f\u6fa4\u512a\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u9234\u6728\u4e45\u7f8e\u5b50\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u9ec4\u3000\u664b\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u670d\u90e8\u5065\u96c4\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u5171\u9cf4\u6838\u53cd\u5fdc\u6cd5\u306b\u3088\u308bSiGe\u8868\u9762\u306e\u6c34\u7d20\u7d42\u7aef\u72b6\u614b\u306e\u5b9a\u91cf\u7684\u8a55\u4fa1
\u9ec4\u3000\u664b\u4e8c\uff0cMarkus Wilde\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u798f\u8c37\u514b\u4e4b\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u591a\u7d50\u6676Si1-xGex\u8584\u819c\u306e\u5f62\u6210\u3068\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u4e09\u4e95\u3000\u5b9f\uff0c\u52a0\u85e4\u3000\u6566\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u9ec4\u3000\u664b\u4e8c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u592a\u967d\u96fb\u6c60\u52b9\u7387\u6539\u5584\u306b\u304a\u3051\u308bGe\u5cf6\u72b6\u7d50\u6676\u306e\u52b9\u679c
\u30a2\u30eb\u30b0\u30ce\u30a2\u30fc\u30ce\u30eb\u30c9\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u85e9\u3000\u4f0d\u6839\uff0c\u5b87\u6cbb\u539f\u3000\u5fb9\uff0c\u85e4\u539f\u822a\u4e09\uff0c\u4f50\u5d0e\u3000\u5143\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u6a2a\u5c71\u656c\u5fd7\uff0c\u4e2d\u5d8b\u4e00\u96c4<\/p>\n\n\n\n

\u7b2c64\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u798f\u5ca1\u5927\u5b66\u30002003\u5e748\u6708<\/strong><\/p>\n\n\n\n

\u91d1\u5c5e\u8a98\u8d77\u56fa\u76f8\u6210\u9577\u6cd5\u306b\u3088\u308a\u4f5c\u88fd\u3057\u305f\u591a\u7d50\u6676Si1-xGex\u8584\u819c\u30c7\u30d0\u30a4\u30b9\u306e\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u4e09\u4e95\u5b9f\uff0c\u52a0\u85e4\u6566\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u9ec4\u664b\u4e8c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308b\u8d85\u5e73\u5766\u306a\u8584\u819cSiGe\u6b6a\u307f\u7de9\u548c\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306e\u4f5c\u88fd
\u5c0f\u6fa4\u512a\u4ecb\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5ee3\u702c\u4f73\u4e45\uff0c\u9ec4\u664b\u4e8c\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u670d\u90e8\u5065\u96c4\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

SiGe\u7de9\u548c\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306e\u6b6a\u307f\u3086\u3089\u304e\u304c\u30d8\u30c6\u30ed\u69cb\u9020\u306b\u53ca\u307c\u3059\u5f71\u97ff
\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u9ec4\u664b\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

Si\u57fa\u677f\u4e0a\u306b\u6210\u9577\u3057\u305fi-SiGe\u306e\u96fb\u6c17\u4f1d\u5c0e\u7279\u6027
\u4f50\u85e4\u5143\u6a39\uff0c\u571f\u5c4b\u52c7\u4ecb\uff0c\u6709\u5143\u572d\u4ecb\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u9ec4\u664b\u4e8c\uff0c\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u6b6a\u307fSi\/Si0.7Ge0.3\u306e\u9178\u5316\u306b\u3088\u308b\u6df1\u3055\u65b9\u5411\u7d44\u6210\u5909\u5316
\u9ed2\u5ca9\u8aed\u4eba\uff0c\u5ee3\u702c\u4f73\u4e45\uff0c\u91ce\u5e73\u535a\u53f8\uff0c\u670d\u90e8\u5065\u96c4\uff0c\u9152\u4e95\u6e09\uff0c\u4e2d\u5d8b\u85ab\uff0c\u9234\u6728\u57fa\u53f2\uff0c\u6728\u6751\u5065\u4e8c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u4e2d\u5ddd\u6e05\u548c<\/p>\n\n\n\n

\u7a4d\u5c64Ge\u30c9\u30c3\u30c8\u3092\u5229\u7528\u3057\u305f\u592a\u967d\u96fb\u6c60\u306eSi\u30b9\u30da\u30fc\u30b5\u5c64\u539a\u304c\u91cf\u5b50\u52b9\u7387\u306b\u53ca\u307c\u3059\u5f71\u97ff
\u30a2\u30eb\u30b0\u30ce\u30a2\u30fc\u30ce\u30eb\u30c9\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686\uff0c\u85e4\u539f\u822a\u4e09\uff0c\u5b87\u6cbb\u539f\u5fb9\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u4f50\u5d0e\u5143\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u4e2d\u5d8b\u4e00\u96c4<\/p>\n\n\n\n

\u6b6a\u307fSi MOSFET\u306b\u304a\u3051\u308b\u96fb\u5b50\u79fb\u52d5\u5ea6\u306e\u7d20\u5b50\u30b5\u30a4\u30ba\u4f9d\u5b58\u6027
\u6709\u5143\u572d\u4ecb\uff0c\u962a\u672c\u9756\uff0c\u5e03\u7559\u5ddd\u5927\u8f14\uff0c\u5c71\u4e2d\u6df3\u4e8c\uff0c\u4e2d\u5ddd\u6e05\u548c\uff0c\u6fa4\u91ce\u61b2\u592a\u90ce\uff0c\u9ec4\u664b\u4e8c\uff0c\u767d\u6728\u9756\u5bdb\uff0c\u5b87\u4f50\u7f8e\u5fb3\u9686<\/p>\n\n\n\n

\u7b2c63\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u65b0\u6f5f\u5927\u5b66\u30002002\u5e749\u6708<\/strong><\/p>\n\n\n\n

\u7a7a\u9593\u5206\u89e3\u30e9\u30de\u30f3\u5206\u5149\u6cd5\u306b\u3088\u308bSiGe\u7de9\u548c\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306e\u6b6a\u307f\u5206\u5e03\u6e2c\u5b9a
\u6fa4\u91ce\u61b2\u592a\u90ce\u3001\u5b87\u4f50\u7f8e\u5fb3\u9686\u3001\u5c0f\u6fa4\u512a\u4ecb\u3001\u6709\u5143\u572d\u4ecb\u3001\u5ee3\u702c\u4f73\u4e45\u3001\u9ec4\u664b\u4e8c\u3001\u4e2d\u5ddd\u6e05\u548c\u3001\u670d\u90e8\u5065\u96c4\u3001\u767d\u6728\u9756\u5bdb<\/p>\n\n\n\n

\u5ee3\u702c \u4f73\u4e45\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u9ec4 \u664b\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u670d\u90e8 \u5065\u96c4\u3001\u767d\u6728\u3000\u9756\u5bdb
\u30a4\u30aa\u30f3\u6ce8\u5165\u6cd5\u306b\u3088\u308bSiGe\u64ec\u4f3c\u57fa\u677f\u306b\u304a\u3051\u308b\u6b6a\u307f\u7de9\u548c\u306e\u30c9\u30fc\u30ba\u91cf\u4f9d\u5b58\u6027<\/p>\n\n\n\n

\u7b2c49\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u6771\u6d77\u5927\u5b66\u30002002\u5e743\u6708<\/strong><\/p>\n\n\n\n

CMP\u306b\u3088\u308a\u5e73\u5766\u5316\u3055\u308c\u305fSiGe\u64ec\u4f3c\u57fa\u677f\u4e0a\u306e\u6b6a\u307fSi\u5909\u8abf\u30c9\u30fc\u30d7\u69cb\u9020\u306e\u4f5c\u88fd\u3068\u8a55\u4fa1
\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u5ee3\u702c \u4f73\u4e45\u3001\u6cb3\u53e3 \u7814\u4e00\u3001\u9ec4 \u664b\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u670d\u90e8 \u5065\u96c4\u3001\u767d\u6728 \u9756\u5bdb<\/p>\n\n\n\n

\u30a4\u30aa\u30f3\u6ce8\u5165Si\u57fa\u677f\u3092\u7528\u3044\u305fSiGe\u6b6a\u307f\u7de9\u548c\u8584\u819c\u306e\u4f5c\u88fd
\u5ee3\u702c \u4f73\u4e45\u3001\u6fa4\u91ce \u61b2\u592a\u90ce\u3001<\/em>\u9ec4 \u664b\u4e8c\u3001*\u4e2d\u5ddd \u6e05\u548c\u3001\u670d\u90e8 \u5065\u96c4\u3001<\/em>\u767d\u6728 \u9756\u5bdb<\/p>\n\n\n\n

\u7b2c62\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u611b\u77e5\u5de5\u696d\u5927\u5b66\u30002001\u5e749\u6708<\/strong><\/p>\n\n\n\n

\u8d85\u5e73\u5766\u6b6a\u307f\u7de9\u548cSiGe\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306e\u6d17\u6d44\u904e\u7a0b\u306b\u304a\u3051\u308b\u8868\u9762\u5909\u5316
\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6cb3\u53e3 \u7814\u4e00\u3001\u9ec4 \u664b\u4e8c\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u767d\u6728 \u9756\u5bdb<\/p>\n\n\n\n

\u7b2c48\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u660e\u6cbb\u5927\u5b66\u30002001\u5e743\u6708<\/strong><\/p>\n\n\n\n

CMP(Chemical Mechanical Polishing)\u3092\u7528\u3044\u305f\u6b6a\u307f\u7de9\u548cSiGe\u30d0\u30c3\u30d5\u30a1\u30fc\u5c64\u306e\u8868\u9762\u5e73\u5766\u5316
\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6cb3\u53e3 \u7814\u4e00\u3001\u4e0a\u91ce \u54f2\u55e3\u3001\u9ec4 \u664b\u4e8c\u3001\u4e2d\u5ddd \u6e05\u548c\u3001\u767d\u6728 \u9756\u5bdb<\/p>\n\n\n\n

\u7b2c47\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u9752\u5c71\u5b66\u9662\u5927\u5b66\u30002000\u5e743\u6708<\/strong><\/p>\n\n\n\n

AlP\u96fb\u5b50\u5c40\u5728\u5c64\u3092\u6709\u3059\u308bGaAsP\/GaP\u91cf\u5b50\u4e95\u6238\u69cb\u9020\u306b\u304a\u3051\u308b\u30dd\u30c6\u30f3\u30b7\u30e3\u30eb\u3086\u3089\u304e
\u6fa4\u91ce \u61b2\u592a\u90ce\u3001\u6c60\u7530 \u5b66\u3001\u5927\u5e73 \u572d\u4ecb\u3001\u6709\u5143 \u572d\u4ecb\u3001\u5b87\u4f50\u7f8e \u5fb3\u9686\u3001\u767d\u6728 \u9756\u5bdb<\/p>\n","protected":false},"excerpt":{"rendered":"\u56fd\u5185\u4f1a\u8b70 (\uff5e2025, 3) \u7b2c 72 \u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a \u6771\u4eac\u7406\u79d1\u5927\u5b66 2025 \u5e74 3 \u6708 [16a-K305-8]\u5e45\u5e83\u3044\u5c0e\u6ce2\u8def\u3092\u7528\u3044\u305f\u4e2d\u8d64\u5916\u975e\u7dda\u5f62\u5149\u5b66\u30c7\u30d0\u30a4\u30b9\u7528\u306e\u9ad8 Q \u5024 Si \u30de\u30a4\u30af\u30ed\u30ea\u30f3\u30b0\u5171\u632f\u5668 […]","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-415","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.comm.tcu.ac.jp\/nano_slabo\/wp-json\/wp\/v2\/pages\/415","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.comm.tcu.ac.jp\/nano_slabo\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.comm.tcu.ac.jp\/nano_slabo\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.comm.tcu.ac.jp\/nano_slabo\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.comm.tcu.ac.jp\/nano_slabo\/wp-json\/wp\/v2\/comments?post=415"}],"version-history":[{"count":0,"href":"https:\/\/www.comm.tcu.ac.jp\/nano_slabo\/wp-json\/wp\/v2\/pages\/415\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.comm.tcu.ac.jp\/nano_slabo\/wp-json\/wp\/v2\/media?parent=415"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}