Facilities

Facilities

Laboratory & Equipment

SiGe Molecular Epitaxy①
SiGe Molecular Epitaxy②
Clean room①
Clean room②
Semi clean room①
Semi clean room②
Clean room
(Photolithography room)①
Clean room
(Photolithography room)②
Sputtering
Dry etcher
Laser lithography system
Maskless aligner
Mask aligner
Wire bonder
X-ray diffraction
CMP
Mechanical Polisher
Near infrared PL spectrometer
Hall measurement①
Hall measurement②
TOP